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SG10201913007VA - Method for wafer-level manufacturing of objects and corresponding semi-finished products - Google Patents

Method for wafer-level manufacturing of objects and corresponding semi-finished products

Info

Publication number
SG10201913007VA
SG10201913007VA SG10201913007VA SG10201913007VA SG10201913007VA SG 10201913007V A SG10201913007V A SG 10201913007VA SG 10201913007V A SG10201913007V A SG 10201913007VA SG 10201913007V A SG10201913007V A SG 10201913007VA SG 10201913007V A SG10201913007V A SG 10201913007VA
Authority
SG
Singapore
Prior art keywords
wafer
objects
finished products
corresponding semi
level manufacturing
Prior art date
Application number
SG10201913007VA
Inventor
Peter Riel
Hartmut Rudmann
Markus Rossi
Original Assignee
Heptagon Micro Optics Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heptagon Micro Optics Pte Ltd filed Critical Heptagon Micro Optics Pte Ltd
Publication of SG10201913007VA publication Critical patent/SG10201913007VA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/04Networks or arrays of similar microstructural devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00009Production of simple or compound lenses
    • B29D11/00278Lenticular sheets
    • B29D11/00307Producing lens wafers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00663Production of light guides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00865Multistep processes for the separation of wafers into individual elements
    • B81C1/00904Multistep processes for the separation of wafers into individual elements not provided for in groups B81C1/00873 - B81C1/00896
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/022Manufacture or treatment of image sensors covered by group H10F39/12 of image sensors having active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/804Containers or encapsulations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/18Longitudinally sectional layer of three or more sections

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
SG10201913007VA 2011-10-06 2012-10-01 Method for wafer-level manufacturing of objects and corresponding semi-finished products SG10201913007VA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201161544005P 2011-10-06 2011-10-06

Publications (1)

Publication Number Publication Date
SG10201913007VA true SG10201913007VA (en) 2020-02-27

Family

ID=47002453

Family Applications (3)

Application Number Title Priority Date Filing Date
SG10201602612PA SG10201602612PA (en) 2011-10-06 2012-10-01 Method for wafer-level manufacturing of objects and corresponding semi-finished products
SG10201913007VA SG10201913007VA (en) 2011-10-06 2012-10-01 Method for wafer-level manufacturing of objects and corresponding semi-finished products
SG11201400917VA SG11201400917VA (en) 2011-10-06 2012-10-01 Method for wafer-level manufacturing of objects and corresponding semi-finished products

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10201602612PA SG10201602612PA (en) 2011-10-06 2012-10-01 Method for wafer-level manufacturing of objects and corresponding semi-finished products

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG11201400917VA SG11201400917VA (en) 2011-10-06 2012-10-01 Method for wafer-level manufacturing of objects and corresponding semi-finished products

Country Status (5)

Country Link
US (1) US10343899B2 (en)
CN (1) CN103959465B (en)
SG (3) SG10201602612PA (en)
TW (1) TWI557791B (en)
WO (1) WO2013049948A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2735029B1 (en) * 2011-07-19 2022-12-21 Heptagon Micro Optics Pte. Ltd. Method for manufacturing passive optical components, and devices comprising the same
SG10201602612PA (en) * 2011-10-06 2016-05-30 Heptagon Micro Optics Pte Ltd Method for wafer-level manufacturing of objects and corresponding semi-finished products
NL2013094B1 (en) 2014-06-30 2016-07-11 Anteryon Wafer Optics B V Method for manufacturing optical modules.
NL2013524B1 (en) * 2014-09-25 2016-09-07 Anteryon Wafer Optics B V An optical light guide element and a method for manufacturing.
EP3218746B1 (en) 2014-11-13 2023-09-27 Heptagon Micro Optics Pte. Ltd. Manufacture of optical light guides
US10007052B2 (en) 2015-02-04 2018-06-26 Heptagon Micro Optics Pte. Ltd. Method for manufacturing waveguide structures on wafer-level and corresponding waveguide structures
US10551602B2 (en) 2015-08-28 2020-02-04 Ams Sensors Singapore Pte. Ltd. Wafer-level optical device having light guide properties
US11018269B2 (en) * 2016-02-22 2021-05-25 ams Sensor Singapore Pte. Ltd. Thin optoelectronic modules with apertures and their manufacture
US11009660B2 (en) 2017-02-10 2021-05-18 Heptagon Micro Optics Pte. Ltd. Light guides and manufacture of light guides
CN112714692B (en) * 2018-09-17 2023-08-11 ams传感器新加坡私人有限公司 Optical light guide and method of making optical light guide

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6635941B2 (en) * 2001-03-21 2003-10-21 Canon Kabushiki Kaisha Structure of semiconductor device with improved reliability
EP1569276A1 (en) * 2004-02-27 2005-08-31 Heptagon OY Micro-optics on optoelectronics
US7202141B2 (en) * 2004-03-29 2007-04-10 J.P. Sercel Associates, Inc. Method of separating layers of material
FR2880194B1 (en) * 2004-12-24 2007-06-01 Atmel Grenoble Soc Par Actions IMAGE SENSOR WITH GLOBALLY SEPARATE COLORED ZONES
KR20060087273A (en) * 2005-01-28 2006-08-02 삼성전기주식회사 Semiconductor package and manufacturing method
JP2006216788A (en) * 2005-02-03 2006-08-17 Hitachi Cable Ltd Single crystal wafer for semiconductor laser
JP2008227233A (en) * 2007-03-14 2008-09-25 Matsushita Electric Ind Co Ltd Semiconductor device manufacturing method, optical pickup module, and semiconductor device
CN101419952B (en) * 2008-12-03 2010-09-15 晶方半导体科技(苏州)有限公司 Wafer level chip packaging method and packaging structure
JP5395446B2 (en) * 2009-01-22 2014-01-22 ルネサスエレクトロニクス株式会社 Semiconductor device and manufacturing method of semiconductor device
US20130286686A1 (en) * 2010-11-30 2013-10-31 Heptagon Micro Optics Pte. Ltd. Optical Light Guide Element For An Electronic Device
SG11201400761UA (en) * 2011-10-05 2014-08-28 Heptagon Micro Optics Pte Ltd Micro-optical system and method of manufacture thereof
SG10201602612PA (en) * 2011-10-06 2016-05-30 Heptagon Micro Optics Pte Ltd Method for wafer-level manufacturing of objects and corresponding semi-finished products
NL2013094B1 (en) * 2014-06-30 2016-07-11 Anteryon Wafer Optics B V Method for manufacturing optical modules.

Also Published As

Publication number Publication date
US10343899B2 (en) 2019-07-09
US20140295122A1 (en) 2014-10-02
CN103959465A (en) 2014-07-30
TW201334050A (en) 2013-08-16
TWI557791B (en) 2016-11-11
CN103959465B (en) 2019-06-07
WO2013049948A1 (en) 2013-04-11
SG10201602612PA (en) 2016-05-30
SG11201400917VA (en) 2014-07-30

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