JPH07116561A - Jetting nozzle - Google Patents
Jetting nozzleInfo
- Publication number
- JPH07116561A JPH07116561A JP27103093A JP27103093A JPH07116561A JP H07116561 A JPH07116561 A JP H07116561A JP 27103093 A JP27103093 A JP 27103093A JP 27103093 A JP27103093 A JP 27103093A JP H07116561 A JPH07116561 A JP H07116561A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- primary
- fluid
- side nozzle
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims abstract description 46
- 238000002347 injection Methods 0.000 claims abstract description 18
- 239000007924 injection Substances 0.000 claims abstract description 18
- 229920006395 saturated elastomer Polymers 0.000 claims abstract description 6
- 230000035939 shock Effects 0.000 abstract description 10
- 239000004071 soot Substances 0.000 description 12
- 238000007664 blowing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000001141 propulsive effect Effects 0.000 description 3
- 238000005507 spraying Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 235000013372 meat Nutrition 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Nozzles (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は噴射ノズルに関し、特
に、低圧入力より高圧出力を得る噴射ノズルに関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an injection nozzle, and more particularly to an injection nozzle which obtains a high pressure output from a low pressure input.
【0002】[0002]
【従来の技術】船舶ではタービン駆動を始め高圧蒸気圧
を用いることが多く、多種の蒸気圧を利用した機器が用
いられている。例えばボイラーでは、主要な伝熱面であ
る水管群などに付着した煤を高圧蒸気を吹き付けて取り
除く煤吹き機を設けて、ボイラの伝熱効果を高めること
が行われている。2. Description of the Related Art Ships often use high pressure steam pressure such as turbine drive, and equipment using various kinds of steam pressure is used. For example, in a boiler, a soot blower that removes soot adhering to the water tube group, which is the main heat transfer surface, by blowing high-pressure steam is provided to enhance the heat transfer effect of the boiler.
【0003】同様に、化学工場等に敷設された薬品槽、
油槽などの水垢、煤、残留物などを清掃する場合にも、
ノズルから蒸気又は圧縮空気を吹き付けて水垢、煤、残
留物などを吹き飛ばす方法が採用されることがある。Similarly, a chemical tank laid in a chemical factory,
Also when cleaning water stains, soot, residues, etc. in oil tanks,
A method of blowing steam or compressed air from a nozzle to blow off scales, soot, residues and the like may be adopted.
【0004】これら従来のタービンあるいは煤吹き器の
多くは、単に多数の小孔を周面に周方向及び軸心方向に
適当な間隔を置いて形成したパイプ状のノズルを用いて
いるが、場合によっては、気流を噴出する小孔を配管に
直接貫通させたストレートノズル、末広ノズルなどのノ
ズルをパイプの周面に周方向及び軸心方向に適当な間隔
を置いて植設し、パイプ内の流体をノズルを介して噴出
させるようにしたものがある。Many of these conventional turbines or sootblowers use pipe-shaped nozzles in which a large number of small holes are formed on the peripheral surface at appropriate intervals in the circumferential direction and the axial direction. Depending on the pipe, a nozzle such as a straight nozzle or a divergent nozzle that directly penetrates the pipe through a small hole that ejects an airflow is planted on the peripheral surface of the pipe at appropriate intervals in the circumferential direction and the axial direction. There is one in which a fluid is ejected through a nozzle.
【0005】また、ボイラーよりの圧力蒸気を一時的に
蓄えるため圧力容器を用いているが、従来の圧力容器は
単にボイラーからの圧力を直接該圧力容器に導いている
だけの構造であった。Further, although a pressure vessel is used to temporarily store the pressure steam from the boiler, the conventional pressure vessel has a structure in which the pressure from the boiler is directly led to the pressure vessel.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、これら
のノズルでは圧力源側より出力側の流路断面積を減少さ
せて噴出圧力を高めているので、供給される蒸気又は圧
縮空気の供給圧に比べて噴出圧をわずかに高めることは
できるが、数倍にも高められた高圧の噴出気流を得るこ
とができず、一次側の圧力が充分に高くない場合には二
次側の圧力も期待する程高くはならない欠点がある。However, in these nozzles, since the cross-sectional area of the flow passage on the output side is reduced from the pressure source side to increase the jet pressure, compared with the supply pressure of the supplied steam or compressed air. Although it is possible to slightly increase the jet pressure, it is not possible to obtain a high-pressure jet stream that is several times higher, and when the pressure on the primary side is not sufficiently high, the pressure on the secondary side is also expected. It has the drawback of not being as expensive.
【0007】従って、従来のノズルが、煤吹き機に用い
らる場合には短時間の吹き付けでは十分に煤を吹きとば
せないことがあり、又、薬品槽、油槽などの清掃におい
ても同様の問題がある。Therefore, when the conventional nozzle is used in a soot blower, it may not be possible to blow out the soot sufficiently by spraying for a short time, and the same problem may occur when cleaning a chemical tank or an oil tank. There is.
【0008】また、タービンに圧力流体を吹きつける噴
射ノズルにおいても、ノズルに供給される流体圧よりも
高圧で流体を噴出できない。更に、圧力容器でも上記し
たようにボイラーからの蒸気を直接導くだけで該ボイラ
ーの出力する圧力以上の高い圧力の蒸気を蓄積できるも
のではない。Further, even in the injection nozzle for blowing the pressure fluid to the turbine, the fluid cannot be ejected at a pressure higher than the fluid pressure supplied to the nozzle. Furthermore, even in a pressure vessel, it is not possible to accumulate steam at a pressure higher than the pressure output by the boiler by only directly guiding the steam from the boiler as described above.
【0009】本発明は、上記の事情を鑑みてなされたも
のであり、供給圧の数倍の高圧で気流を噴出できるよう
にした噴出ノズルを提供することを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an ejection nozzle capable of ejecting an air flow at a high pressure several times higher than the supply pressure.
【0010】[0010]
【課題を解決するための手段】本発明は、上記の目的を
達成するため、一次流体を高速噴射する一次側ノズル
と、一次側ノズルの出口に連続し、入射口が一次側ノズ
ルの出口径よりも大径に形成され、流路断面積が次第に
狭められる二次側ノズルと、二次側ノズルの入射口で一
次側ノズルの周囲に開口され、一次側ノズルから二次流
体を上記一次流体の中心に向かって該一次流体よりも高
い圧力で噴出する高圧噴出口とを備える構成としてい
る。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a primary side nozzle for injecting a primary fluid at a high speed and an outlet of the primary side nozzle. A secondary side nozzle having a larger diameter than that of the primary side nozzle, which has a narrower flow passage cross-sectional area, and an inlet port of the secondary side nozzle, which is opened around the primary side nozzle and which is the secondary fluid from the primary side nozzle. And a high-pressure jet port that jets out toward the center at a pressure higher than that of the primary fluid.
【0011】上記一次流体としては飽和水蒸気を用い、
また二次流体としては常温空気を用いることが可能であ
る。また、上記二次側ノズルののど部にこののど部を通
過する流体に旋回成分を与える螺旋形の凹条または凸条
を設けた構成とする。更に、上記二次側ノズルののど径
と一次側ノズルの出口径とを同等に形成するとこの発明
の目的をより有効に達成することができる。Saturated steam is used as the primary fluid,
Also, room temperature air can be used as the secondary fluid. Further, the throat of the secondary side nozzle is provided with a spiral groove or ridge that gives a swirling component to the fluid passing through the throat. Further, if the throat diameter of the secondary nozzle and the outlet diameter of the primary nozzle are formed to be equal, the object of the present invention can be achieved more effectively.
【0012】[0012]
【作 用】上記の構成において、二次側ノズル内で、一
次側ノズルから高速で噴出された一次流体と高圧噴出口
から噴出される二次流体が、二次側ノズル内で混合され
て衝撃波が発生し、この衝撃波が音速程度の速度で二次
側ノズルから噴出することにより、一次流体及びこれよ
りも高圧の二次流体の供給圧よりも数倍圧力が高い衝撃
波が二次側ノズルより噴出する。[Operation] In the above configuration, in the secondary side nozzle, the primary fluid ejected from the primary side nozzle at high speed and the secondary fluid ejected from the high pressure outlet are mixed in the secondary side nozzle to generate a shock wave. Is generated, and this shock wave is ejected from the secondary side nozzle at a speed of about the speed of sound, so that a shock wave whose pressure is several times higher than the supply pressure of the primary fluid and the secondary fluid higher than this is generated from the secondary side nozzle. Gush out.
【0013】[0013]
【実施例】以下、本発明の一実施例に係る噴射ノズルを
図1の断面図に基づいて具体的に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An injection nozzle according to an embodiment of the present invention will be specifically described below with reference to the sectional view of FIG.
【0014】この噴射ノズルは一次側ノズル1と、二次
側ノズル2が連続する2段ノズル構造を備える。上記一
次側ノズル1は次第に流路断面積が狭められ、出口3の
内周面は直円筒形に形成される。この一次側ノズル1に
は下記する二次流体よりも低圧の一次流体が供給され、
上記出口3の口径(出口径)d1は、この飽和蒸気を音
速ないし遷音速程度の流速で二次側ノズル1内に噴出さ
せるように設計される。This injection nozzle has a two-stage nozzle structure in which a primary side nozzle 1 and a secondary side nozzle 2 are continuous. The cross-sectional area of the flow path of the primary side nozzle 1 is gradually narrowed, and the inner peripheral surface of the outlet 3 is formed in a right cylindrical shape. A primary fluid having a lower pressure than the secondary fluid described below is supplied to the primary nozzle 1,
The diameter (outlet diameter) d1 of the outlet 3 is designed so that the saturated vapor is jetted into the secondary side nozzle 1 at a flow velocity of about sonic velocity or transonic velocity.
【0015】又、上記二次側ノズル2は、一次側ノズル
1の出口径よりも大径に形成され入射口4と、該入射口
4に連続して次第に流路断面積が縮小される混合室5
と、更に、一次側ノズル1の出口径d1と同じ口径d2
ののど部6と、末広がりに形成された出口7とに連続す
る構成となっている。Further, the secondary nozzle 2 is formed with a diameter larger than the outlet diameter of the primary nozzle 1, and the inlet 4 and the mixing in which the cross-sectional area of the flow path is gradually reduced continuously to the inlet 4. Room 5
And further, the same diameter d2 as the outlet diameter d1 of the primary side nozzle 1.
The throat portion 6 and the outlet 7 formed in a divergent shape are connected to each other.
【0016】上記二次側ノズル2の入射口4には、高圧
噴出口8が一次側ノズル1の出口3を取り囲むように開
口面積aにわたって円環状に開口させてある。この高圧
噴出口8は、ニードル弁9を介在させた圧縮空気供給路
10に接続され、圧縮空気供給路10から上記飽和蒸気
よりも高圧の二次流体が供給される。又、一次側ノズル
1から噴出される一次流体に所定の角度でこの一次流体
の中心に収束するように噴出させるように設計される。At the entrance 4 of the secondary nozzle 2, a high-pressure jet 8 is formed in an annular shape over an opening area a so as to surround the outlet 3 of the primary nozzle 1. The high-pressure jet port 8 is connected to a compressed air supply passage 10 with a needle valve 9 interposed, and a secondary fluid having a higher pressure than the saturated vapor is supplied from the compressed air supply passage 10. The primary fluid ejected from the primary side nozzle 1 is designed to be ejected at a predetermined angle so as to converge on the center of the primary fluid.
【0017】上記二次側ノズル2の混合室5内で、一次
側ノズル1から噴出する一次流体と高圧噴出口8から噴
出する二次流体とが混合されると、衝撃波が形成され、
この衝撃波が音速程度の流速でのど部6を経て出口7か
ら外部に噴出される。When the primary fluid ejected from the primary nozzle 1 and the secondary fluid ejected from the high-pressure ejection port 8 are mixed in the mixing chamber 5 of the secondary nozzle 2, a shock wave is formed,
This shock wave is ejected from the outlet 7 to the outside through the throat portion 6 at a velocity of sound speed.
【0018】上記のど部6の内周面には、必要に応じ
て、こののど部6を通過する流体に旋回成分を与える螺
旋形の凹条または凸条が設けられる。従って、こののど
部6を通過した気流は旋回成分を与えられることにより
収束性を高められ、噴出エネルギーを分散されることな
く高圧の衝撃波として出口6から外部に噴出される。If necessary, the inner peripheral surface of the throat portion 6 is provided with a spiral concave or convex ridge that imparts a swirling component to the fluid passing through the throat portion 6. Therefore, the airflow that has passed through the throat portion 6 is given a swirl component to enhance the convergence, and is jetted out from the outlet 6 as a high-pressure shock wave without dispersing the jetting energy.
【0019】上記構成において、一次流体として3kg/c
m2の飽和水蒸気をまた二次流体として5kg/cm2の常温空
気を用いると、10〜15kg/cm2の出力が得られた。即
ち、一次流体の供給圧に比べれば3〜5倍、二次流体の
供給圧に比べても2〜3倍の高圧で、推進力の強い気流
が噴出されることになる。又、流速が速いことから、多
量の噴出流体が得られることになる。In the above structure, the primary fluid is 3 kg / c
When the saturated steam of m 2 The use of ambient temperature air 5 kg / cm 2 as a secondary fluid, the output of 10-15 kg / cm 2 was obtained. That is, an air flow having a strong propulsive force is ejected at a high pressure which is 3 to 5 times higher than the supply pressure of the primary fluid and 2 to 3 times higher than the supply pressure of the secondary fluid. Further, since the flow velocity is high, a large amount of jetted fluid can be obtained.
【0020】従って、タービンの駆動にこの噴射ノズル
を用いる場合には、タービンの出力を従来の数倍程度に
高めることができ、ボイラーの煤吹き、エコノマイザー
の煤吹き、圧力容器、薬品槽あるいは油槽などの清掃に
用いる場合には、従来の数倍の高圧の噴出流体を得られ
るので、短時間の吹き付けで十分に煤や残留物を吹きと
ばすことかできる。Therefore, when this injection nozzle is used to drive the turbine, the output of the turbine can be increased to several times that of the conventional one, and the soot blowing of the boiler, the soot blowing of the economizer, the pressure vessel, the chemical tank or When it is used for cleaning an oil tank or the like, a jet fluid having a pressure several times higher than that of a conventional one can be obtained, so that soot and residues can be sufficiently blown off in a short time.
【0021】なお、上記衝撃波の発生は、二次流体の流
量が過多になると不安定になるが、ニードル弁9の開度
を調整することにより、安定良く連続して衝撃波を発生
させることができる。また、上記二次ノズル2の噴出口
4の面積と一次ノズルの出口面積は略同等か、もしくは
二次ノズル2の噴出口4の面積を若干大きく設計すると
より大きな効果を得ることができる。The generation of the shock wave becomes unstable when the flow rate of the secondary fluid becomes excessive. However, by adjusting the opening of the needle valve 9, the shock wave can be generated stably and continuously. . Further, if the area of the ejection port 4 of the secondary nozzle 2 and the outlet area of the primary nozzle are substantially equal to each other, or if the area of the ejection port 4 of the secondary nozzle 2 is designed to be slightly larger, a greater effect can be obtained.
【0022】図2の断面図に示す本発明の他の実施例に
係る噴射ノズルにおいては、一次側ノズル1の周囲に圧
縮空気供給路10が形成され、高圧噴出口8が一次側ノ
ズル1の出口の周囲に周方向に等間隔を置いた6〜8個
の孔で構成される。又、ニードル弁9は図外に設けられ
る。更に、二次側ノズル2の入射口4と混合室5とは一
連の円錐台形に形成される。In the injection nozzle according to another embodiment of the present invention shown in the sectional view of FIG. 2, a compressed air supply passage 10 is formed around the primary side nozzle 1 and the high pressure ejection port 8 is provided in the primary side nozzle 1. It is composed of 6 to 8 holes that are equally spaced in the circumferential direction around the outlet. The needle valve 9 is provided outside the drawing. Further, the entrance 4 of the secondary side nozzle 2 and the mixing chamber 5 are formed in a series of truncated cones.
【0023】なお、図2において符号11は圧縮空気供
給路10の端末を結合するためのナットであり、12は
図示しない蒸気供給路の端末を結合するためのねじ込部
である。In FIG. 2, reference numeral 11 is a nut for connecting the end of the compressed air supply passage 10, and 12 is a screwing portion for connecting the end of the steam supply passage (not shown).
【0024】その他の構成、作用ないし効果は、上記の
一実施例と同様であるので、重複を避けるためその詳細
な説明は省略する。図3は本発明の又他の実施例に係る
噴射ノズルを用いる煤吹き器であり、この煤吹き器20
は、内外二重のパイプ21・22の両端部をそれぞれ鏡
板23・24で閉塞して、内側のパイプ21の内部に一
次側蒸気室25を、内外両パイプ21・22の間に二次
側空気室26とそれぞれ形成し、内側のパイプ21の周
壁に複数(ここでは5個)の噴射ノズルの各一次側ノズ
ル1を、外側のパイプ22の周壁に二次側ノズル2をそ
れぞれ支持させている。二次側ノズル2の肉壁部には二
次側空気室26と高圧噴出口8とを連通させる空気通路
27が形成される。The other construction, operation and effect are similar to those of the above-mentioned embodiment, and therefore detailed description thereof will be omitted to avoid duplication. FIG. 3 shows a soot blower using an injection nozzle according to another embodiment of the present invention.
Is closed by end plates 23 and 24 at both ends of the inner and outer double pipes 21 and 22, respectively, and a primary steam chamber 25 is provided inside the inner pipe 21 and a secondary side steam chamber 25 is provided between the inner and outer pipes 21 and 22. The primary side nozzles 1 of a plurality (here, five) of injection nozzles are formed on the inner wall of the inner pipe 21 and the secondary side nozzles 2 are supported on the outer wall of the outer pipe 22, respectively. There is. An air passage 27 that connects the secondary air chamber 26 and the high-pressure jet port 8 is formed in the meat wall portion of the secondary nozzle 2.
【0025】この実施例に係る噴射ノズルのその他の構
成、作用ないし効果は上記の各実施例と同様であり、こ
の噴射ノズルを用いる煤吹き器では、各噴射ノズルから
従来の数倍の圧力ないし推進力の蒸気と圧縮空気との混
合気体が噴出される。従って、短時間の吹き付けで十分
に煤を吹きとばすことができるようになる。The other constitution, action and effect of the injection nozzle according to this embodiment are the same as those of the above-mentioned respective embodiments, and in the soot blower using this injection nozzle, the pressure from each injection nozzle is several times that of the conventional one. A mixed gas of propulsive steam and compressed air is ejected. Therefore, it becomes possible to sufficiently blow out the soot by spraying for a short time.
【0026】[0026]
【発明の効果】以上に説明したように、本発明の噴射ノ
ズルは、ノズルを2段構造にし、高速で噴出させた一次
流体にこれよりも高圧の二次流体をより高速で混合させ
ることにより衝撃波を発生させ、供給圧力の数倍の圧力
ないし推進力で気流を噴出させることができる。As described above, in the injection nozzle of the present invention, the nozzle has a two-stage structure and the primary fluid ejected at a high speed is mixed with the secondary fluid having a higher pressure than this at a higher speed. It is possible to generate a shock wave and jet the airflow with a pressure or a propulsive force that is several times the supply pressure.
【図1】本発明の一実施例の断面図である。FIG. 1 is a sectional view of an embodiment of the present invention.
【図2】本発明の他の実施例の断面図である。FIG. 2 is a sectional view of another embodiment of the present invention.
【図3】本発明の又他の実施例を用いる煤吹き器の一部
分を切除した側面図である。FIG. 3 is a partially cutaway side view of a sootblower according to another embodiment of the present invention.
1 一次側ノズル 2 二次側ノズル 3 出口 4 入射口 5 混合室 6 のど部 7 出口 8 高圧噴出口 1 Primary Nozzle 2 Secondary Nozzle 3 Outlet 4 Entrance 5 Mixing Chamber 6 Throat 7 Outlet 8 High Pressure Jet
Claims (4)
と、一次側ノズルの出口に連続し、入射口が一次側ノズ
ルの出口径よりも大径に形成され、流路断面積が次第に
狭められる二次側ノズルと、二次側ノズルの入口で一次
側ノズルの周囲に開口され、一次側ノズルから二次流体
を上記一次流体の中心に向かって該一次流体よりも高い
圧力で噴出する高圧噴出口とを備えることを特徴とする
噴射ノズル。1. A primary side nozzle for injecting a primary fluid at a high speed and an inlet of the primary side nozzle, which is continuous with the outlet of the primary side nozzle, has a diameter larger than the outlet diameter of the primary side nozzle, and the flow passage cross-sectional area is gradually narrowed. A secondary nozzle and a high-pressure jet that is opened around the primary nozzle at the inlet of the secondary nozzle and ejects a secondary fluid from the primary nozzle toward the center of the primary fluid at a pressure higher than that of the primary fluid. An injection nozzle having an outlet.
流体が常温空気である請求項1に記載の噴射ノズル。2. The injection nozzle according to claim 1, wherein the primary fluid is saturated steam and the secondary fluid is room temperature air.
を通過する流体に旋回成分を与える螺旋形の凹条または
凸条を設けたことを特徴とする請求項1に記載の噴射ノ
ズル。3. The injection nozzle according to claim 1, wherein the throat portion of the secondary side nozzle is provided with a spiral groove or protrusion that gives a swirling component to the fluid passing through the throat portion. .
ルの出口径と同等に形成されることを特徴とする請求項
1に記載の噴射ノズル。4. The injection nozzle according to claim 1, wherein a throat diameter of the secondary side nozzle is formed to be equal to an outlet diameter of the primary side nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27103093A JPH07116561A (en) | 1993-10-28 | 1993-10-28 | Jetting nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27103093A JPH07116561A (en) | 1993-10-28 | 1993-10-28 | Jetting nozzle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07116561A true JPH07116561A (en) | 1995-05-09 |
Family
ID=17494430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27103093A Pending JPH07116561A (en) | 1993-10-28 | 1993-10-28 | Jetting nozzle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07116561A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001045827A1 (en) * | 1999-12-22 | 2001-06-28 | Robert Bosch Gmbh | Device and method for producing a reducing agent-air mixture |
| JP2002011387A (en) * | 2000-06-30 | 2002-01-15 | Shibuya Kogyo Co Ltd | Cleaning nozzle |
| JP2002079145A (en) * | 2000-06-30 | 2002-03-19 | Shibuya Kogyo Co Ltd | Cleaning nozzle and cleaning device |
| JP2005230715A (en) * | 2004-02-20 | 2005-09-02 | Kyoritsu Gokin Co Ltd | Nozzle apparatus and nozzle member |
| KR100565815B1 (en) * | 1999-07-26 | 2006-03-30 | 시부야 코교 가부시키가이샤 | Injection apparatus for gas-liquid mixed flow |
| US8037891B2 (en) | 2004-03-09 | 2011-10-18 | Tokyo Electron Limited | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus |
| JP2014057924A (en) * | 2012-09-18 | 2014-04-03 | Nakanishi Mfg Co Ltd | Nozzle pipe unit, and washing device using the same |
| JP2015513463A (en) * | 2012-02-29 | 2015-05-14 | ユニバーシダッド デ セビリア | Dispensing head device and method |
-
1993
- 1993-10-28 JP JP27103093A patent/JPH07116561A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100565815B1 (en) * | 1999-07-26 | 2006-03-30 | 시부야 코교 가부시키가이샤 | Injection apparatus for gas-liquid mixed flow |
| WO2001045827A1 (en) * | 1999-12-22 | 2001-06-28 | Robert Bosch Gmbh | Device and method for producing a reducing agent-air mixture |
| JP2002011387A (en) * | 2000-06-30 | 2002-01-15 | Shibuya Kogyo Co Ltd | Cleaning nozzle |
| JP2002079145A (en) * | 2000-06-30 | 2002-03-19 | Shibuya Kogyo Co Ltd | Cleaning nozzle and cleaning device |
| JP2005230715A (en) * | 2004-02-20 | 2005-09-02 | Kyoritsu Gokin Co Ltd | Nozzle apparatus and nozzle member |
| US8037891B2 (en) | 2004-03-09 | 2011-10-18 | Tokyo Electron Limited | Two-fluid nozzle for cleaning substrate and substrate cleaning apparatus |
| JP2015513463A (en) * | 2012-02-29 | 2015-05-14 | ユニバーシダッド デ セビリア | Dispensing head device and method |
| JP2014057924A (en) * | 2012-09-18 | 2014-04-03 | Nakanishi Mfg Co Ltd | Nozzle pipe unit, and washing device using the same |
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