JP2018182178A - Diagnosis method of processing equipment - Google Patents

Abstract

A method for diagnosing a machining apparatus capable of diagnosing whether or not a flow rate adjustment unit for adjusting the supply amount of machining fluid is properly functioning. A method for diagnosing a processing apparatus, comprising: a processing step for processing a workpiece in a processing unit; The threshold is set in advance based on the load current value when the spindle is idling at a predetermined number of revolutions while supplying the machining fluid adjusted to a predetermined flow rate, and the machining fluid is supplied at a predetermined flow rate. Diagnosis step for diagnosing whether the flow rate adjuster is normal or abnormal according to the result of comparing the load current value when the spindle is idled at a predetermined number of revolutions while supplying machining fluid by controlling the flow rate adjuster. and a notification step of notifying the operator of the diagnosis result of the diagnosis step. [Selection drawing] Fig. 1

Description

  The present invention relates to a diagnostic method of a processing apparatus for processing a plate-like workpiece.

  In order to process a plate-like workpiece represented by a semiconductor wafer, for example, a processing apparatus such as a cutting apparatus (a dicer) or a grinding apparatus (a grinder) may be used. These processing apparatuses are equipped with a spindle (rotary shaft) on which a grinding tool made by solidifying abrasive grains with a bonding material is mounted, and a part of the workpiece is brought into contact with the workpiece while rotating the grinding tool. Scrape off.

  In such a processing apparatus, a large amount of heat and cutting waste (shavings) are generated due to the friction between the grinding tool and the workpiece. Therefore, heat and chips can be removed by processing the workpiece while supplying a processing fluid such as pure water to the grinding tool and the workpiece (see, for example, Patent Documents 1 and 2). .

JP 2008-91775 A JP, 2014-124690, A

  By the way, when the amount of processing fluid supplied to the grinding tool increases, for example, the grinding tool is deformed by the pressure of the processing fluid or the like, and the processing accuracy can not be maintained high. Moreover, in this case, a tip or the like formed by processing may be blown away by the processing liquid and collide with the grinding tool. Thus, the possibility of breakage of the grinding tool also increases.

  On the other hand, when the amount of processing fluid supplied to the grinding tool decreases, the removal of heat and cutting debris becomes insufficient. Therefore, the processing apparatus is provided with a flow rate adjusting unit (flow rate controller) for keeping the supply amount of the processing liquid in an appropriate range. However, it is also conceivable that the flow rate adjusting unit does not function properly for some reason.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a processing apparatus capable of diagnosing whether or not a flow rate adjusting unit for adjusting the supply amount of a processing fluid is functioning properly. It is to provide a diagnostic method.

  According to one aspect of the present invention, the flow rate is adjusted by the processing unit including the chuck table for holding the workpiece, the processing unit equipped with the grinding tool for processing the workpiece and the spindle rotated by the motor, Processing fluid supply unit for supplying the processing fluid to the grinding tool, a current value detection unit for detecting the load current value of the motor, a notification unit for providing the information of the apparatus to the operator, and control for controlling each component And a processing step of processing a workpiece with the processing unit, and performing the processing step before or after performing the processing step. Are preset based on the load current value when the spindle is idled at a predetermined rotation speed while supplying the machining fluid adjusted to a predetermined flow rate by the flow rate adjustment unit. And the load current value when the spindle is idled at the predetermined rotation speed while supplying the processing fluid by controlling the flow rate adjusting unit so as to supply the processing fluid having the predetermined flow rate. And a diagnosis step of diagnosing the flow rate adjustment unit as normal or abnormal according to the comparison result, and a notification step of notifying the diagnosis result of the diagnosis step.

  In one aspect of the present invention, the method may further include a threshold setting step of setting the threshold before performing the processing step and the diagnosis step.

  In the method of diagnosing a processing device according to one aspect of the present invention, the load when the spindle is idled at a predetermined number of rotations while supplying the machining fluid adjusted to a predetermined flow rate by the flow rate adjusting unit functioning normally. A threshold value set in advance based on the current value is compared with a load current value when the spindle is idled at a predetermined rotation speed while controlling the flow rate adjustment unit to supply a working fluid of a predetermined flow rate. Therefore, it can be diagnosed whether the flow rate adjustment unit is functioning properly.

It is a perspective view which shows the structural example of a processing apparatus typically. It is a perspective view which shows the structural example of a cutting unit etc. typically. It is a side view showing typically the example of composition of a cutting unit etc.

  Embodiments according to one aspect of the present invention will be described with reference to the attached drawings. First, a configuration example of a processing apparatus to which a diagnosis method of a processing apparatus according to the present embodiment is applied will be described. FIG. 1: is a perspective view which shows typically the structural example of the processing apparatus 2 which concerns on this embodiment. In addition, in FIG. 1, the one part component of the processing apparatus 2 is shown by the functional block. Further, in the present embodiment, a cutting device for cutting a plate-like workpiece is described as an example, but a processing device to which the present invention is applied may be a grinding device or the like.

  As shown in FIG. 1, the processing device 2 includes a base 4 that supports each component. An opening 4a is formed at a front corner of the base 4, and a cassette elevator 6 which is moved up and down by an elevating mechanism (not shown) is provided in the opening 4a. On the upper surface of the cassette elevator 6, a cassette 8 for storing a plurality of workpieces 11 is placed. In addition, in FIG. 1, only the outline of the cassette 8 is shown for convenience of explanation.

  The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The surface side of the workpiece 11 is divided into a plurality of areas by planned dividing lines (streets) arranged in a lattice, and devices such as integrated circuits (ICs) are formed in each area. .

  On the back side of the workpiece 11, an adhesive tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is attached. The outer peripheral portion of the adhesive tape 13 is fixed to an annular frame 15. The workpiece 11 is accommodated in the cassette 8 in a state of being supported by the frame 15 via the adhesive tape 13.

  In the present embodiment, a disk-shaped wafer made of a semiconductor material such as silicon is used as the workpiece 11, but the material, shape, structure, size and the like of the workpiece are not limited. For example, a workpiece made of another semiconductor, ceramic, resin, metal or the like can also be used. Further, there are no limitations on the type, number, shape, structure, size, arrangement, etc. of devices.

  On the side of the cassette elevator 6, an opening 4b long in the X-axis direction (front-rear direction, machining feed direction) is formed. In the opening 4 b, a ball screw type X-axis moving mechanism (processing feed unit) 10 and a dustproof drip-proof cover 12 covering the upper portion of the X-axis moving mechanism 10 are disposed. The X-axis moving mechanism 10 includes an X-axis moving table 10a, and moves the X-axis moving table 10a in the X-axis direction.

  A chuck table (holding table) 14 for holding the workpiece 11 is disposed on the X-axis moving table 10a. The chuck table 14 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotational axis substantially parallel to the Z-axis direction (vertical direction). In addition, the chuck table 14 is moved in the X-axis direction by the above-described X-axis moving mechanism 10 (processing feed).

  The upper surface of the chuck table 14 is a holding surface 14 a for holding the workpiece 11. The holding surface 14 a is formed substantially in parallel to the X-axis direction and the Y-axis direction (left-right direction, indexing feed direction), and is a suction source via a suction path (not shown) or the like formed inside the chuck table 14. It is connected to (not shown). Further, around the chuck table 14, four clamps 16 for fixing an annular frame 15 supporting the workpiece 11 from four directions are provided.

  Above the opening 4b, a transport unit (not shown) for transporting the above-described workpiece 11 (frame 15) to the chuck table 14 or the like is disposed. The workpiece 11 transported by the transport unit is, for example, placed on the holding surface 14 a of the chuck table 14 such that the surface side is exposed upward.

  A cantilevered support structure 20 for supporting a cutting unit (machining unit) 18 for cutting the workpiece 11 is disposed at a position adjacent to the opening 4 b. A cutting unit moving mechanism (indexing and feeding unit) 22 for moving the cutting unit 18 in the Y-axis direction and the Z-axis direction is provided at the upper front of the support structure 20.

  The cutting unit moving mechanism 22 includes a pair of Y axis guide rails 24 disposed on the front surface of the support structure 20 and parallel to the Y axis direction. A Y-axis moving plate 26 constituting the cutting unit moving mechanism 22 is slidably attached to the Y-axis guide rail 24.

  A nut portion (not shown) is provided on the back surface side (rear surface side) of the Y-axis moving plate 26, and a Y-axis ball screw 28 parallel to the Y-axis guide rail 24 is screwed into this nut portion. There is. A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 28. When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor, the Y-axis moving plate 26 moves along the Y-axis guide rail 24 in the Y-axis direction.

  A pair of Z-axis guide rails 30 parallel to the Z-axis direction are provided on the surface (front surface) of the Y-axis moving plate 26. A Z-axis moving plate 32 is slidably attached to the Z-axis guide rail 30.

  A nut portion (not shown) is provided on the back surface side (rear surface side) of the Z-axis moving plate 32, and a Z-axis ball screw 34 parallel to the Z-axis guide rail 30 is screwed into this nut portion. There is. A Z-axis pulse motor 36 is connected to one end of the Z-axis ball screw 34. When the Z-axis ball screw 34 is rotated by the Z-axis pulse motor 36, the Z-axis moving plate 32 moves in the Z-axis direction along the Z-axis guide rail 30.

  A cutting unit 18 is provided below the Z-axis moving plate 32. FIG. 2 is a perspective view schematically showing a configuration example of the cutting unit 18 and the like, and FIG. 3 is a side view schematically showing a configuration example of the cutting unit 18 and the like. 2 and 3 also show some components as functional blocks.

  The cutting unit 18 includes a cylindrical spindle housing 38. The spindle housing 38 accommodates a spindle 40 serving as a rotation shaft. One end of the spindle 40 is exposed to the outside from one end of the spindle housing 38, and at one end of the spindle 40, a cutting blade (grindstone tool) 42 for cutting (machining) the workpiece 11 is provided. It is attached. At the other end side of the spindle 40, a rotational drive source (not shown) including a motor is connected.

  At one end of the spindle housing 38, a blade cover 44 is mounted for accommodating the cutting blade 42 and the like mounted on the spindle 40. At a rear portion of the blade cover 44, a pair of substantially L-shaped first nozzles (working fluid supply units) 46a sandwiching the lower portion of the cutting blade 42 is provided.

  A plurality of slits facing the cutting blade 42 are formed on the tip end side of the first nozzle 46 a. The machining fluid supply source 52 is connected to the base end side (upper end side) of the first nozzle 46a via the first supply passage 48a, the first flow rate controller (flow rate adjustment unit) 50a, and the like. A processing fluid such as pure water is supplied from the processing fluid supply source 52.

  The front end portion of the blade cover 44 is provided with a second nozzle (working fluid supply unit) 46 b extending downward. At the front end (lower end) of the second nozzle 46b, an injection hole that opens rearward and obliquely downward is formed. The machining fluid supply source 52 is connected to the base end side (upper end side) of the second nozzle 46b via the second supply passage 48b, the second flow rate controller (flow rate adjustment unit) 50b, and the like.

  A third nozzle (working fluid supply unit) 46c is provided at a position between the cutting blade 42 and the second nozzle 46b. At the tip of the third nozzle 46c, an injection hole facing the front of the cutting blade 42 is formed. The machining fluid supply source 52 is connected to the base end side (upper end side) of the third nozzle 46c via the third supply passage 48c, the third flow rate controller (flow rate adjustment unit) 50c, and the like.

  The working fluid is adjusted in flow rate by the first flow rate controller 50a, the second flow rate controller 50b, or the third flow rate controller 50c, and then the first nozzle 46a (slit), the second nozzle 46b (injection hole), and It injects from the 3rd nozzle 46c (injection hole). Thereby, the cutting blade 42 and the workpiece 11 are cooled and cleaned at the time of cutting (processing).

  As shown in FIG. 1, the cutting unit 18 is connected to a current value detection unit 54 for detecting a current value of a motor (rotational drive source) for rotating the spindle 40. The load applied to the motor can be evaluated by measuring (detecting) the current value (load current value) of the motor in a loaded state by the current value detection unit 54. Therefore, for example, if the cutting blade 42 (spindle 40) is idled while supplying the working fluid (that is, if it is rotated without cutting the cutting blade 42 with respect to the workpiece 11), It is possible to check the supply amount etc.

  At a position adjacent to the cutting unit 28, an imaging unit (camera) 56 for imaging the workpiece 11 and the like is provided. When the Y-axis moving plate 26 is moved in the Y-axis direction by the cutting unit moving mechanism 22, the cutting unit 18 and the imaging unit 56 move in the Y-axis direction (index feed). Further, when the Z-axis moving plate 32 is moved in the Z-axis direction by the cutting unit moving mechanism 22, the cutting unit 18 and the imaging unit 56 move in the Z-axis direction.

  An opening 4 c is formed at a position opposite to the opening 4 a with respect to the opening 4 b. In the opening 4c, a cleaning unit 58 for cleaning the workpiece 11 and the like after cutting is disposed. Cassette elevator 6, X-axis moving mechanism 10, chuck table 14, cutting unit 18, cutting unit moving mechanism 22, first flow rate controller 50a, second flow rate controller 50b, third flow rate controller 50c, current value detection unit 54, imaging unit The control unit 60 is connected to the components such as the cleaning unit 58 and the like.

  The control unit 60 controls the above-described components in accordance with a series of steps required for cutting (machining) the workpiece 11. Further, a touch panel monitor (notification unit) 62 serving as a user interface is connected to the control unit 60. Details of the function of the control unit 60 will be described later.

  In the diagnosis method of the processing apparatus according to the present embodiment, first, a threshold value which is used as a reference when determining whether or not the first flow controller 50a, the second flow controller 50b, and the third flow controller 50c function normally. Perform the threshold setting step of setting. The threshold setting step is performed by the threshold setting unit 60 a of the control unit 60.

  Specifically, the cutting blade 42 (spindle 40) is idled at a predetermined rotation speed while supplying the machining fluid adjusted to a predetermined flow rate to the cutting blade 42 from each nozzle (in the processed object 11 The current value (load current value) of the motor (rotational drive source) at that time is measured by the current value detection unit 54 by rotating the cutting blade 42 without cutting it.

  More specifically, for example, after confirming that the first flow rate controller 50a is functioning properly, the working fluid supplied to the first nozzle 46a is adjusted to a predetermined flow rate by the first flow rate controller 50a. While the cutting blade 42 is idled at a predetermined rotational speed. At the same time, the supply of the processing fluid to the second nozzle 46 b and the third nozzle 46 c is stopped. Then, the current value of the motor at this time is measured by the current value detection unit 54.

  Thereby, the current value of the motor corresponding to the predetermined flow rate and the predetermined rotation number can be obtained. The predetermined flow rate and the predetermined number of revolutions are arbitrarily set. For example, the flow rate (for example, 0.5 L / min to 2.0 L / min) and the rotation speed (for example, 20000 rpm to 100000 rpm) can be used.

  After the current value of the motor corresponding to the predetermined flow rate and the predetermined rotation number is obtained, the threshold setting unit 60a determines a threshold (upper limit for determining whether the first flow controller 50a is functioning properly). Set the value and the lower limit). The rotational speed of the cutting blade 42 (spindle 40), the flow rate of the machining fluid supplied to the first nozzle 46a, the measurement value of the current value detection unit 54, and the like have errors to some extent. Therefore, the threshold setting unit 60a sets the threshold in consideration of the obtained current value (load current value) and various errors.

  For example, when the predetermined flow rate is set to 1.5 L / min and the predetermined rotation speed is set to 40000 rpm, it is assumed that the current value measured by the current value detection unit 54 is 1.5A. If the sum of various errors and the like is ± 0.2 A, the threshold setting unit 60a sets 1.5 A ± 0.2 A (that is, 1.3 A and 1.7 A) as the threshold. However, the method of setting the threshold is not particularly limited, and the threshold may be set in accordance with other criteria or the like.

  Similarly, after confirming that the second flow rate controller 50b is functioning properly, the cutting blade 42 is adjusted while adjusting the working fluid supplied to the second nozzle 46b to a predetermined flow rate by the second flow rate controller 50b. At a predetermined speed. At the same time, the supply of the processing fluid to the first nozzle 46a and the third nozzle 46c is stopped. Then, the current value of the motor at this time is measured by the current value detection unit 54.

  Thereby, the current value of the motor corresponding to the predetermined flow rate and the predetermined rotation number can be obtained. After the current value of the motor corresponding to the predetermined flow rate and the predetermined rotation number is obtained, the threshold setting unit 60a sets a threshold value for determining whether the second flow controller 50b functions properly. Do.

  Furthermore, after confirming that the third flow rate controller 50c is functioning properly, the cutting blade 42 is adjusted while adjusting the machining fluid supplied to the third nozzle 46c to a predetermined flow rate by the third flow rate controller 50c. It spins at a predetermined number of revolutions. At the same time, the supply of the processing fluid to the first nozzle 46a and the second nozzle 46b is stopped. Then, the current value of the motor at this time is measured by the current value detection unit 54.

  Thereby, the current value of the motor corresponding to the predetermined flow rate and the predetermined rotation number can be obtained. After the current value of the motor corresponding to the predetermined flow rate and the predetermined rotation number is obtained, the threshold setting unit 60a sets a threshold for determining whether the third flow controller 50c is functioning properly. Do.

  The threshold setting step may be performed based on an instruction of an operator or the like (user) when actually using the processing apparatus 2, or when the processing apparatus 2 is shipped, etc., the manufacturing of the processing apparatus 2. It may be performed based on the instruction of the person, etc.

  After the threshold setting step, for example, a processing step of cutting (processing) the workpiece 11 using the cutting unit 18 is performed. In this processing step, first, the adhesive tape 13 attached to the back surface side of the workpiece 11 is brought into contact with the holding surface 14 a of the chuck table 14 to apply a negative pressure of a suction source. At the same time, the frame 15 is fixed by the clamp 16. Thereby, the workpiece 11 is held in the state where the surface side is exposed upward.

  Next, for example, the chuck table 14 is rotated to align the extending direction of the target dividing line with the X-axis direction of the processing apparatus 2. Further, the chuck table 14 and the cutting unit 18 are moved relatively to align the position of the cutting blade 42 on the extension of the target dividing line. Then, the lower end of the cutting blade 42 is moved to a position lower than the surface of the workpiece 11.

  Thereafter, the chuck table 4 is moved in the X-axis direction while rotating the cutting blade 42. At the same time, the machining fluid is supplied to the cutting blade 42 and the workpiece 11 from the first nozzle 46 a, the second nozzle 46 b, and the third nozzle 46 c. Thus, the cutting blade 42 can be cut along the target dividing line, and the workpiece 11 can be cut (processed).

  After the processing step, for example, a diagnosis step is performed to diagnose whether or not the first flow controller 50a, the second flow controller 50b, and the third flow controller 50c function normally. This diagnosis step is performed by the diagnosis unit 60b of the control unit 60.

  Specifically, the cutting blade 42 (spindle 40) is idled at a predetermined rotation speed while supplying the machining fluid adjusted to a predetermined flow rate to the cutting blade 42 from each nozzle (in the processed object 11 The current value (load current value) of the motor (rotational drive source) at that time is measured by the current value detection unit 54 by rotating the cutting blade 42 without cutting it. Then, the measured current value is compared with the threshold set by the threshold setting unit 60a.

  More specifically, for example, while the machining fluid supplied to the first nozzle 46a is adjusted to a predetermined flow rate by the first flow rate controller 50a, the cutting blade 42 is idled at a predetermined rotational speed. At the same time, the supply of the processing fluid to the second nozzle 46 b and the third nozzle 46 c is stopped. Then, the current value of the motor at this time is measured by the current value detection unit 54.

  The predetermined flow rate and the predetermined number of revolutions set in the diagnosis step match the predetermined flow rate and the predetermined number of revolutions of the threshold setting step. That is, when diagnosing the first flow rate controller 50a, the predetermined flow rate and the predetermined rotation number used when determining the threshold value of the first flow rate controller 50a are adopted.

  For example, if the measured current value is within the range determined by the threshold value, the diagnosis unit 60b determines that the first flow controller 50a is functioning properly. On the other hand, when the measured current value is out of the range determined by the threshold value, the diagnosis unit 60b determines that the first flow controller 50a is not functioning normally (abnormal).

  Similarly, while adjusting the machining fluid supplied to the second nozzle 46b to a predetermined flow rate by the second flow rate controller 50b, the cutting blade 42 is idled at a predetermined rotational speed. At the same time, the supply of the processing fluid to the first nozzle 46a and the third nozzle 46c is stopped. Then, the current value of the motor at this time is measured by the current value detection unit 54.

  For example, if the measured current value is within the range determined by the threshold value, the diagnosis unit 60b determines that the second flow controller 50b is functioning properly. On the other hand, when the measured current value is out of the range determined by the threshold value, the diagnosis unit 60b determines that the second flow controller 50b is not functioning normally (abnormal).

  Furthermore, while the machining fluid supplied to the third nozzle 46c is adjusted to a predetermined flow rate by the third flow rate controller 50c, the cutting blade 42 is idled at a predetermined rotational speed. At the same time, the supply of the processing fluid to the first nozzle 46a and the second nozzle 46b is stopped. Then, the current value of the motor at this time is measured by the current value detection unit 54.

  For example, if the measured current value is within the range determined by the threshold value, the diagnosis unit 60b determines that the third flow controller 50c is functioning properly. On the other hand, when the measured current value is out of the range defined by the threshold value, the diagnosis unit 60b determines that the third flow rate controller 50c is not functioning normally (abnormality).

  After the diagnosis step, a notification step of notifying the operator or the like of the result of the diagnosis is performed. This notification step is performed by the notification unit 60c of the control unit 60. Specifically, for example, the notification unit 60c causes the monitor 62 to display the diagnosis results of the first flow controller 50a, the second flow controller 50b, and the third flow controller 50c.

  Note that even if it is determined that any one of the first flow controller 50a, the second flow controller 50b, and the third flow controller 50c is not functioning properly, this is displayed on the monitor 62. good. In addition, it is also possible to notify the operator or the like that the device does not function properly by generation of a warning sound, lighting (flashing) of a warning light, or the like.

  As described above, in the method of diagnosing a processing apparatus according to the present embodiment, the first flow controller (flow adjustment unit) 50a, the second flow controller (flow adjustment unit) 50b, or the third flow controller functioning properly. (Flow rate adjustment unit) Set in advance based on the current value (load current value) when the cutting blade 42 (spindle 40) is idled at a predetermined rotation speed while supplying the machining fluid adjusted to a predetermined flow rate by the 50c Of the cutting blade 42 at a predetermined rotational speed while controlling the first flow controller 50a, the second flow controller 50b, or the third flow controller 50c so as to supply the machining fluid having a predetermined threshold value and a predetermined flow rate. The first flow rate controller 50a, the second flow rate controller 50b, or the third flow rate controller 50c function properly because Luke whether it can diagnose.

  The present invention is not limited to the above-described embodiment and the like, and can be implemented with various modifications. For example, as long as the method of use of each flow rate controller (flow rate adjustment unit), which is the premise of diagnosis, the state, and the like do not change significantly, the already set threshold can be used continuously. That is, the threshold setting step does not have to be performed many times. More specifically, the threshold setting step may be performed only at the time of shipping of the processing device or the like.

  Also, the diagnostic step can be performed at any timing. For example, the diagnostic step may be performed before starting cutting (machining) of the workpiece for each cassette. That is, the diagnostic step does not necessarily have to be performed after the processing step. Also, the diagnosis step may be performed periodically (every predetermined time).

  In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented without departing from the scope of the object of the present invention.

11 Workpiece 13 Adhesive Tape (Dicing Tape)
15 frame 2 processing device 4 base 4a, 4b, 4c opening 6 cassette elevator 8 cassette 10 X axis moving mechanism (processing feed unit)
10a X-axis moving table 12 Dustproof drip-proof cover 14 Chuck table (holding table)
14a Holding surface 16 Clamp 18 Cutting unit (Machining unit)
20 Support Structure 22 Cutting Unit Movement Mechanism (Indexing Feed Unit)
24 Y-axis guide rail 26 Y-axis moving plate 28 Y-axis ball screw 30 Z-axis guide rail 32 Z-axis moving plate 34 Z-axis ball screw 36 Z-axis pulse motor 38 spindle housing 40 spindle 42 cutting blade (grindstone tool)
44 Blade cover 46a 1st nozzle (working fluid supply unit)
46b 2nd nozzle (working fluid supply unit)
46c 3rd nozzle (working fluid supply unit)
48a first supply passage 48b second supply passage 48c third supply passage 50a first flow rate controller (flow rate adjustment unit)
50b 2nd flow rate controller (flow rate adjustment unit)
50c 3rd flow rate controller (flow rate adjustment unit)
52 machining fluid supply source 54 current value detection unit 56 imaging unit 58 cleaning unit 60 control unit 60a threshold setting unit 60b diagnosis unit 60c notification unit 62 monitor (notification unit)

Claims (2)

A processing unit having a chuck table for holding a workpiece, a grinding tool mounted on a grinding tool for processing the workpiece, and a spindle rotated by a motor, and a processing fluid whose flow rate is adjusted by a flow rate adjusting unit is supplied to the grinding tool Diagnosis of a processing device comprising a working fluid supply unit, a current value detection unit for detecting a load current value of the motor, a notification unit for providing information of the device to an operator, and a control unit for controlling each component Method,
A processing step of processing a workpiece by the processing unit;
Before performing the processing step or after performing the processing step, the spindle is operated at a predetermined number of revolutions while supplying the processing fluid adjusted to a predetermined flow rate by the flow rate adjusting unit functioning normally. The spindle is controlled while supplying the machining fluid by controlling the flow rate adjusting unit so as to supply the machining fluid having the predetermined flow rate and the predetermined threshold value based on the load current value when idling. A diagnosis step of diagnosing the flow rate adjustment unit as normal or abnormal according to the result of comparison between the load current value at the time of idling at a predetermined rotation speed and the load current value;
And a notification step of notifying the diagnosis result of the diagnosis step.   The diagnostic method of the processing apparatus according to claim 1, further comprising a threshold setting step of setting the threshold before carrying out the processing step and the diagnostic step.