JP2016099038A - Operation mode change system - Google Patents

Abstract

[PROBLEMS] To provide an operation mode change system capable of preventing a large fluctuation in the indoor air pressure of a clean room during a switching operation for switching from a normal air flow operation to a low air flow operation and shortening the operation time of the switching operation. In switching operation, a controller 19 is in a clean room in the air volume reduction process in which the constant air volume device 16 reduces the air volume while the air volume of the constant air volume device 16 is switched from the normal air volume operation target air volume to the low air volume operation target air volume. When the indoor air pressure of 11 reaches the upper limit value or lower limit value of the specified room pressure, the constant air volume device 16 is temporarily stopped to reduce the air volume, and the indoor air pressure of the clean room 11 falls below or exceeds the upper limit value of the specified room pressure. If the airflow has decreased, the airflow reduction stop is interrupted, and the constant airflow device 16 restarts the airflow reduction. [Selection] Figure 1

Description

  The present invention is an operation for performing a normal air volume operation performed when the air-conditioned room is used, a small air volume operation performed when the air-conditioning room is not used, and a switching operation for switching from the normal air volume operation to the low air volume operation. It relates to a mode change system.

  In a facility having a clean room, an air supply fan that is installed in an air supply duct and supplies clean air to the clean room, an exhaust fan that is installed in an exhaust duct and exhausts air from the clean room, and extends downstream of the air supply fan A constant air volume device (CAV) that is installed in the air supply duct and adjusts the air volume of the air supplied to the clean room, and a motor damper that is installed in the exhaust duct extending upstream of the exhaust fan and adjusts the air volume of the air exhausted from the clean room (MD) is used.

  In normal air volume operation during use of a clean room, the indoor air pressure of the clean room is maintained at the target room pressure by adjusting the air inflow / outflow balance with a constant air volume device or a motor damper. In addition, when the clean room is not in use, the low air volume operation reduces the supply / exhaust air volume of the air supply and exhaust fans, reduces the air volume of the constant air volume device, and reduces the air volume sent to the clean room. Reduce power consumed by the supply / exhaust fan while keeping it clean.

  In the switching operation in which the normal air volume operation is switched to the low air volume operation, the air volume of the supply / exhaust fan is continuously reduced within a predetermined time without considering the indoor air pressure of the clean room, and the opening of the motor damper is When the pressure is continuously reduced uniformly within the time, as shown in FIG. 15 (b), the clean room indoor pressure rises or falls greatly, the clean room indoor pressure greatly deviates from the target room pressure, and the clean room indoor pressure falls. May become unstable. In order to avoid instability of the indoor air pressure, as shown in FIG. 16, it is necessary to slowly close the opening of the motor damper over time, but switching from normal air volume operation to low air volume operation is required. There is a problem that it takes a long time. In the graphs of FIGS. 15A and 16A, the vertical axis represents the air volume of the constant air volume device, and the horizontal axis represents the elapsed time. In the graphs of FIGS. 15B and 16B, the vertical axis represents the indoor pressure, and the horizontal axis represents the elapsed time.

  In order to solve such a problem, the dynamic pressure in the air supply duct between the air supply fan and the clean room is measured, and the pressure control damper is controlled by the pressure deviation to control the supply air volume to be constant. A method is disclosed (see Patent Document 1). The control method using the room pressure control damper disclosed in Patent Document 1 can shorten the switching time of the switching operation for switching from the normal air flow operation to the low air flow operation.

JP 2010-169307 A

  In addition, if the indoor air pressure of the clean room greatly fluctuates during the switching operation from the normal air volume operation to the low air volume operation, and the clean room indoor air pressure deviates from the target room pressure, the pressure difference between the clean room indoor air pressure and the reference pressure becomes small. If the predetermined amount cannot be secured or the pressure is reversed, the air in the adjacent space may inadvertently enter the clean room, and the clean room may be contaminated by the air in the adjacent space that has entered.

  The object of the present invention is to prevent large fluctuations in the air pressure in the air-conditioning room during switching operation for switching from normal air volume operation to low air volume operation or during switching operation for switching from low air volume operation to normal air volume operation. An object of the present invention is to provide an operation mode changing system capable of shortening the operation time. Another object of the present invention is that the pressure difference between the room pressure and the reference pressure cannot ensure a predetermined amount during the switching operation from the normal airflow operation to the low airflow operation or during the switching operation from the low airflow operation to the normal airflow operation. The air pressure chamber is not caused by the air in the adjacent space entering the air conditioning room during the switching operation, preventing the inadvertent entry of the air in the adjacent space during the switching operation. Is to provide an operation mode changing system that can prevent contamination.

  The first premise of the present invention for solving the above problems is an air conditioner that is installed in an air supply duct and supplies air to an air conditioning room, and an exhaust system that is installed in an exhaust duct and exhausts air from the air conditioning room. The air volume changing device that increases or decreases the air volume supplied to the air conditioning room or the air volume exhausted from the air conditioning room, the room pressure sensor that measures the room pressure of the air conditioning room, and the room pressure measured by the room pressure sensor. A controller that controls these devices, and the normal air volume operation that is performed when the air conditioning room is used, and the air volume that is supplied to the air conditioning room and exhausted from the air conditioning room when the air conditioning room is not used. Operation mode change to perform a low air volume operation with less air volume than normal air volume operation and a first switching operation to switch from normal air volume operation to low air volume operation by gradually reducing the air volume using the air volume changing device System It is.

  As a first feature of the present invention according to the first premise, in the first switching operation, the controller switches the air volume of the air volume changing device from the normal air volume operation target air volume of the normal air volume operation to the low air volume operation target air volume of the low air volume operation. If the air pressure in the air-conditioning room measured by the room pressure sensor reaches the upper limit or lower limit of the specified room pressure during the air volume reduction process in which the air volume changing device decreases the air volume, the air volume is changed. The air volume reduction stop means that temporarily stops the reduction and the air volume reduction stop means are interrupted when the air pressure in the air-conditioned room measured by the room pressure sensor falls below the upper limit value of the specified room pressure or exceeds the lower limit value of the specified room pressure. The air volume changing device has an air volume reduction restarting means for restarting the air volume reduction.

  As an example of the present invention having the first feature, in the first switching operation, the controller gradually decreases at least one of an air supply amount from the air conditioner and an air exhaust amount from the exhaust device, and the air conditioner The air supply amount and the air discharge amount from the exhaust device are switched from the normal air flow operation target supply / exhaust amount of the normal air flow operation to the low air flow operation target supply / exhaust amount of the low air flow operation. In the process of reducing the amount of air supplied, and in the process of reducing the amount of air supplied, and in the process of reducing the amount of air exhausted by the exhaust device, the air quantity change device temporarily stops the air quantity reduction by the air quantity reduction stop means. At least one of an air supply amount reduction stop means for temporarily stopping the air supply reduction and an exhaust air quantity reduction stop means for causing the exhaust device to temporarily stop the exhaust air quantity reduction is performed. When the air volume change device is restarted by the air volume change device, the air supply volume reduction stop means is interrupted and the air supply apparatus restarts the air supply volume reduction restart means, and the exhaust air volume reduction stop means is interrupted and exhausted. At least one of exhaust amount reduction restarting means for causing the device to restart exhaust amount reduction is implemented.

  As another example of the present invention having the first feature, in the air volume reduction stopping means, the controller causes the air volume changing device to alternately repeat the stop of the air volume reduction and the restart of the air volume reduction at a predetermined time interval.

  As another example of the present invention having the first feature, an air-conditioning chamber is formed of a plurality of first to n-th air conditioning chambers, and an air volume changing device branches from an air supply duct to form first to n-th air conditioning chambers. The first to n-th branch air supply ducts or exhaust ducts connected to the first to n-th air conditioning chambers and connected to the first to n-th branch exhaust ducts are formed from first to n-th air volume changing devices. In the first switching operation, the controller sequentially executes the air volume reduction stop means and the air volume reduction restart means at a predetermined interval from the first air volume changing device to the nth air volume changing device.

  As another example of the present invention having the first feature, an air-conditioning chamber is formed of a plurality of first to n-th air conditioning chambers, and an air volume changing device branches from an air supply duct to form first to n-th air conditioning chambers. 1st to nth branch air supply ducts or exhaust ducts connected to the first to nth branch exhaust ducts branched to the first to nth air conditioning chambers are grouped into first to nth air volume changing devices In the first switching operation, the controller performs the air volume reduction stop means and the air volume reduction restart at a predetermined interval from the first air volume changing device group to the nth air volume changing device group. The means are carried out in order.

  The second premise of the present invention for solving the above problems is an air conditioner that is installed in an air supply duct and supplies air to an air conditioning room, and an exhaust system that is installed in an exhaust duct and exhausts air from the air conditioning room. The air volume changing device that increases or decreases the air volume supplied to the air conditioning room or the air volume exhausted from the air conditioning room, the room pressure sensor that measures the room pressure of the air conditioning room, and the room pressure measured by the room pressure sensor. A controller that controls these devices, and the normal air volume operation that is performed when the air-conditioning room is used, and the air flow that is performed when the air-conditioning room is not used, and the air that is supplied to the air-conditioning room or exhausted from the air-conditioning room Operation mode change that performs low air volume operation with less air volume than normal air volume operation and second switching operation that gradually increases air volume using the air volume changing device and switches from low air volume operation to normal air volume operation System It is.

  As a second feature of the present invention based on the second premise, in the second switching operation, the controller switches the air volume of the air volume changing device from the low air volume operation target air volume of the low air volume operation to the normal air volume operation target wind of the normal air volume operation. If the air pressure in the air-conditioning room measured by the room pressure sensor reaches the upper limit or lower limit of the specified room pressure during the air volume increase process in which the air volume change device increases the air volume, the air volume change device The air volume increase stop means that temporarily stops the increase, and the air volume increase stop means are interrupted when the room air pressure measured by the room pressure sensor is below the upper limit value of the specified room pressure or above the lower limit value of the specified room pressure. The air volume changing device has an air volume increase restarting means for restarting the air volume increase.

  As an example of the present invention having the second feature, in the second switching operation, the controller gradually increases at least one of an air supply amount from the air conditioner and an air exhaust amount from the exhaust device, and the air conditioner The amount of air supplied from the exhaust air and the amount of air exhausted from the exhaust system are switched from the target air supply / exhaust amount for low air volume operation to the target air supply / exhaust amount for normal air volume operation. In the process of increasing the amount of air supplied, and in the process of increasing the amount of air supplied by the exhaust device, the amount of air is increased. At least one of an air supply increase stop means for temporarily stopping the air supply increase and an exhaust air increase stop means for causing the exhaust device to temporarily stop the increase of the exhaust air, When the air volume change device is restarted by the air volume change device, the supply air volume increase stop means is interrupted and the air conditioner restarts the supply air volume increase restart means, and the exhaust air volume increase stop means is interrupted and exhausted. At least one of exhaust amount increase restarting means for causing the device to restart increasing the exhaust amount is performed.

  As another example of the present invention having the second feature, in the air volume increase / stop means, the controller causes the air volume changing device to alternately repeat the stop of the air volume increase and the restart of the air volume increase at predetermined time intervals.

  As another example of the present invention having the second feature, the air-conditioning chamber is formed of a plurality of first to n-th air conditioning chambers, and the air volume changing device is branched from the air supply duct to be the first to n-th air conditioning chambers. The first to n-th branch air supply ducts or exhaust ducts connected to the first to n-th air conditioning chambers and connected to the first to n-th branch exhaust ducts are formed from first to n-th air volume changing devices. In the second switching operation, the controller sequentially executes the air volume increase stop means and the air volume increase restart means at a predetermined interval from the first air volume changing device to the nth air volume changing device.

  As another example of the present invention having the second feature, the air-conditioning chamber is formed of a plurality of first to n-th air conditioning chambers, and the air volume changing device is branched from the air supply duct to be the first to n-th air conditioning chambers. 1st to nth branch air supply ducts or exhaust ducts connected to the first to nth branch exhaust ducts branched to the first to nth air conditioning chambers are grouped into first to nth air volume changing devices In the second switching operation, the controller performs the air volume increase stop means and the air volume increase restart at a predetermined interval from the first air volume change apparatus group to the nth air volume change apparatus group. The means are carried out in order.

  As an example of the present invention having the first and second features, the air volume changing device is any one of a constant air volume device (CAV), a variable constant air volume device (VAV), and a motor damper (MD).

  According to the operation mode changing system of the present invention having the first feature, in the air volume decreasing process of the air volume changing device in the first switching operation from the normal air volume operation to the low air volume operation, When the indoor air pressure reaches the upper limit value or lower limit value of the predetermined specified room pressure, the air volume changing device temporarily stops the reduction of the air volume. Even when the lower limit value is reached, the room pressure can be quickly lowered with respect to the upper limit value of the specified room pressure, and the room pressure can be quickly exceeded with respect to the lower limit value of the specified room pressure. The operation mode change system does not prevent a predetermined amount from being reduced because the pressure difference between the indoor air pressure of the air conditioning chamber and the reference pressure is small during the first switching operation, and the positive / negative of the pressure is not reversed. Inadvertent entry of air in the adjacent space into the air conditioning room can be prevented, and contamination of the air conditioning room due to the entry of air in the adjacent space can be prevented. In the operation mode change system, the air pressure in the air-conditioned room measured by the room pressure sensor is lower than the upper limit value of the specified room pressure or higher than the lower limit value of the specified room pressure while the air volume reduction stop means is being implemented in the first switching operation. In this case, the air volume change device interrupts the air volume reduction stop and causes the air volume change device to restart the air volume reduction, so that the air pressure in the air conditioning room is kept within the range between the upper limit value and the lower limit value of the specified room pressure, It is possible to quickly switch from the normal air volume operation to the low air volume operation, and to shorten the operation time of the first switching operation.

  When the air volume reduction device temporarily stops the air volume reduction by the air volume reduction stop means in the air supply volume reduction process and the exhaust system exhaust volume reduction process in the first switching operation from the normal air volume operation to the low air volume operation, the air conditioning At least one of an air supply amount decrease / stop means for temporarily stopping the decrease of the air supply amount in the apparatus and an exhaust amount decrease / stop means for causing the exhaust apparatus to temporarily stop the decrease of the exhaust amount; When the air flow reduction is restarted, an operation mode is performed in which at least one of an air supply amount reduction restarting unit that causes the air conditioner to restart an air supply amount reduction and an exhaust air amount reduction restarting unit that causes the exhaust device to restart the exhaust air amount reduction is performed. In the change system, the air pressure in the air-conditioning room measured by the room pressure sensor in the process of decreasing the air supply amount of the air conditioner and the process of reducing the exhaust amount of the exhaust system When the limit value or the lower limit value has been reached and the air volume reduction device temporarily stops the air volume reduction by the air volume reduction stop device, the air supply amount reduction stop device and the exhaust device cause the air conditioner to temporarily stop the air supply decrease. Since at least one of the exhaust amount reduction stop means for temporarily stopping the exhaust amount reduction is performed, even if the indoor air pressure of the air conditioning chamber reaches the upper limit value or the lower limit value of the specified chamber pressure during the first switching operation In addition, it is possible to quickly lower the indoor air pressure with respect to the upper limit value of the specified chamber pressure, and it is possible to quickly exceed the indoor air pressure with respect to the lower limit value of the specified chamber pressure. The operation mode change system does not prevent a predetermined amount from being reduced because the pressure difference between the indoor air pressure of the air conditioning chamber and the reference pressure is small during the first switching operation, and the positive / negative of the pressure is not reversed. Inadvertent entry of air in the adjacent space into the air conditioning room can be prevented, and contamination of the air conditioning room due to the entry of air in the adjacent space can be prevented. The operation mode change system includes an air-conditioning chamber measured by a chamber pressure sensor during execution of the air volume reduction stop means in the first switching operation or at least one of the air supply amount reduction stop means and the exhaust amount reduction stop means. If the air pressure of the air conditioner falls below the upper limit value of the specified chamber pressure or exceeds the lower limit value of the specified chamber pressure and the air volume change device restarts the air volume change device by the air volume reduction restarting means, the air supply volume decreases to the air conditioner Since at least one of the supply air amount reduction restarting means for restarting the exhaust air and the exhaust air volume reduction restarting means for restarting the exhaust gas reduction is performed, the indoor air pressure of the air-conditioned room is set to the upper limit value and the lower limit value of the specified room pressure. Can be quickly switched from normal air volume operation to low air volume operation while maintaining the range between and the normal air volume operation to low air volume operation. It is possible to reduce the power consumption of the conveying power of the air supply device and an exhaust device in the non-use of the air conditioning room by switching.

  In the air volume reduction stopping means for stopping the air volume reduction by the air volume changing device, the operation mode changing system for causing the air volume changing device to alternately repeat the stop of the air volume reduction and the restart of the air volume reduction at a predetermined time interval is provided in the air volume reduction stopping means. Even if the air pressure in the air-conditioning room reaches the upper limit value or the lower limit value of the specified room pressure during the first switching operation by alternately repeating the stop of the air volume reduction and the restart of the air volume reduction, the upper limit value of the specified room pressure. As a result, it is possible to quickly lower the indoor pressure, and to quickly exceed the lower limit of the specified chamber pressure. Since the operation mode change system can quickly shift from the air volume reduction stop means to the air volume reduction restart means, it can quickly switch from the normal air volume operation to the low air volume operation, and shorten the operation time of the first switching operation. be able to.

  First to n-th branch exhaust ducts branched from the air supply duct and connected to the first to n-th air conditioning chambers to be connected to the first to n-th air conditioning chambers. When the first to nth air volume changing devices are installed, if the air volume reduction stopping means and the air volume reduction restarting means are simultaneously performed on all the first to nth air volume changing devices, the first to nth air volume changing devices are performed. The devices may interfere with each other, the duct internal pressure of the duct may fluctuate greatly, and the air pressure in the air conditioning room may fluctuate greatly. In this case, even if the air volume reduction stopping means and the air volume reduction restarting means are implemented in the first to nth air volume changing devices, it becomes difficult to maintain the indoor air pressure of the air conditioning room within the specified room pressure. However, since this operation mode change system sequentially performs the air volume reduction stop means and the air volume reduction restart means at predetermined intervals from the first air volume change device to the nth air volume change device in the first switching operation. The first to nth air volume changing devices do not interfere with each other, and fluctuations in the duct internal pressure can be prevented. As a result, the air pressure in the air conditioning room does not fluctuate significantly, and even if the air pressure in the air conditioning room reaches the upper limit value or the lower limit value of the specified room pressure during the first switching operation, the upper limit value of the specified room pressure is reached. On the other hand, the indoor air pressure can be quickly reduced, the indoor air pressure can be quickly exceeded with respect to the lower limit value of the specified room pressure, and the normal air volume operation can be quickly switched to the low air volume operation.

  First to n-th branch exhaust ducts branched from the air supply duct and connected to the first to n-th air conditioning chambers to be connected to the first to n-th air conditioning chambers. When the first to nth air volume changing devices are installed, if the air volume reduction stopping means and the air volume reduction restarting means are simultaneously performed on all the first to nth air volume changing devices, the first to nth air volume changing devices are performed. The devices may interfere with each other, the duct internal pressure of the duct may fluctuate greatly, and the air pressure in the air conditioning room may fluctuate greatly. In this case, even if the air volume reduction stopping means and the air volume reduction restarting means are implemented in the first to nth air volume changing devices, it becomes difficult to maintain the indoor air pressure of the air conditioning room within the specified room pressure. However, this operation mode changing system sequentially performs the air volume reduction stop means and the air volume reduction restart means at predetermined intervals from the first air volume changing device group to the nth air volume changing device group in the first switching operation. The first to nth air volume changing devices do not interfere with each other, and fluctuations in the duct internal pressure of the duct can be prevented. As a result, the air pressure in the air conditioning room does not fluctuate significantly, and even if the air pressure in the air conditioning room reaches the upper limit value or the lower limit value of the specified room pressure during the first switching operation, the upper limit value of the specified room pressure is reached. On the other hand, the indoor air pressure can be quickly reduced, the indoor air pressure can be quickly exceeded with respect to the lower limit value of the specified room pressure, and the normal air volume operation can be quickly switched to the low air volume operation.

  According to the operation mode changing system of the present invention having the second feature, in the air volume increasing process of the air volume changing device in the second switching operation from the low air volume operation to the normal air volume operation, When the indoor air pressure reaches the upper limit value or the lower limit value of the predetermined specified room pressure, the air volume changing device temporarily stops the increase in the air volume. Even when the lower limit value is reached, the room pressure can be quickly lowered with respect to the upper limit value of the specified room pressure, and the room pressure can be quickly exceeded with respect to the lower limit value of the specified room pressure. The operation mode change system does not prevent a predetermined amount from being reduced because the pressure difference between the air pressure in the air-conditioned room and the reference pressure is small during the second switching operation, and the positive / negative pressure is not reversed. Inadvertent entry of air in the adjacent space into the air conditioning room can be prevented, and contamination of the air conditioning room due to the entry of air in the adjacent space can be prevented. In the operation mode change system, the air pressure in the air-conditioned room measured by the room pressure sensor is lower than the upper limit value of the specified room pressure or higher than the lower limit value of the specified room pressure during the implementation of the air volume increase stop means in the second switching operation. In this case, since the air volume change device interrupts the air volume increase stop and causes the air volume change device to resume the air volume increase, the air pressure of the air conditioning chamber is kept within the range between the upper limit value and the lower limit value of the specified room pressure, The operation can be quickly switched from the low air volume operation to the normal air volume operation, the operation time of the second switching operation can be shortened, and the work can be quickly started in the air conditioning room.

When the air volume change device temporarily stops the air volume increase by the air volume increase stop means in the air volume increase process and the exhaust volume increase process of the air conditioner in the second switching operation from the low air volume operation to the normal air volume operation, the air conditioning At least one of an air supply increase stop means for causing the apparatus to temporarily stop an increase in the air supply amount and an exhaust air volume increase stopping means for causing the exhaust apparatus to temporarily stop an increase in exhaust air volume. When the air volume increase is restarted, an operation mode in which at least one of an air supply increase restarting unit that causes the air conditioner to restart the air supply increase and an exhaust air volume increase restarting unit that causes the exhaust system to restart increasing the exhaust gas volume is performed. In the change system, the air pressure of the air conditioning room measured by the room pressure sensor in the process of increasing the air supply amount of the air conditioner and the process of increasing the exhaust amount of the exhaust device When the upper limit value or the lower limit value of the airflow is reached and the airflow change device temporarily stops the increase in the airflow by the airflow increase stop means, the airflow increase stop means and the exhaust that cause the air conditioner to temporarily stop the increase in the airflow Since at least one of the exhaust amount increase stop means for causing the device to temporarily stop increasing the exhaust amount is implemented, it is assumed that the air pressure in the air conditioning chamber has reached the upper limit value or the lower limit value of the specified chamber pressure during the first switching operation. In addition, it is possible to quickly lower the indoor pressure with respect to the upper limit value of the specified chamber pressure, and it is possible to quickly exceed the indoor pressure with respect to the lower limit value of the specified chamber pressure.
The operation mode change system does not prevent a predetermined amount from being reduced because the pressure difference between the air pressure in the air-conditioned room and the reference pressure is small during the second switching operation, and the positive / negative pressure is not reversed. Inadvertent entry of air in the adjacent space into the air conditioning room can be prevented, and contamination of the air conditioning room due to the entry of air in the adjacent space can be prevented. The operation mode change system is an air conditioner measured by the room pressure sensor during the air flow increase stop means during the second switching operation or at least one of the air supply increase stop means and the exhaust amount increase stop means. When the room air pressure falls below the upper limit value of the specified chamber pressure or exceeds the lower limit value of the specified chamber pressure, and the air volume change device restarts the air volume increase by the air volume increase restarting means, the air supply to the air conditioner Since at least one of the supply amount increase restart means for restarting the increase and the exhaust amount increase restart means for restarting the exhaust amount increase in the exhaust device is performed, the indoor air pressure of the air-conditioned room is set to the upper limit value and the lower limit of the specified room pressure. While maintaining within the range between the values, it is possible to quickly switch from the low airflow operation to the normal airflow operation, shorten the operation time of the second switching operation, and speed up the work in the air conditioning room. It is possible to start to.

  In the air volume increase stop means for stopping the air volume increase device in the air volume change device, the operation mode change system in which the air volume change device alternately repeats the stop of the air volume increase and the restart of the air volume increase at a predetermined time interval is provided in the air volume increase stop means. Even if the air pressure in the air-conditioned room reaches the upper limit value or the lower limit value of the specified room pressure during the first switching operation, the upper limit value of the specified room pressure is stopped by alternately repeating the stop of the air volume increase and the restart of the air volume increase. As a result, it is possible to quickly lower the indoor pressure, and to quickly exceed the lower limit of the specified chamber pressure. Since the operation mode change system can quickly shift from the air volume increase stop means to the air volume increase restart means, it can quickly switch from the low air volume operation to the normal air volume operation, and shorten the operation time of the second switching operation. be able to.

  First to n-th branch exhaust ducts branched from the air supply duct and connected to the first to n-th air conditioning chambers to be connected to the first to n-th air conditioning chambers. When the first to nth air volume changing devices are installed, if the air volume reduction stopping means and the air volume reduction restarting means are simultaneously performed on all the first to nth air volume changing devices, the first to nth air volume changing devices are performed. The devices may interfere with each other, the duct internal pressure of the duct may fluctuate greatly, and the air pressure in the air conditioning room may fluctuate greatly. In this case, even if the air volume reduction stopping means and the air volume reduction restarting means are implemented in the first to nth air volume changing devices, it becomes difficult to maintain the indoor air pressure of the air conditioning room within the specified room pressure. However, since this operation mode change system sequentially performs the air volume increase stop means and the air volume increase restart means at predetermined intervals from the first air volume change device to the nth air volume change device in the second switching operation. The first to nth air volume changing devices do not interfere with each other, and fluctuations in the duct internal pressure can be prevented. As a result, the air pressure in the air conditioning room does not fluctuate greatly, and even if the air pressure in the air conditioning room reaches the upper limit value or the lower limit value of the specified room pressure during the second switching operation, the upper limit value of the specified room pressure is reached. On the other hand, the indoor air pressure can be quickly lowered, the indoor air pressure can be quickly exceeded with respect to the lower limit value of the specified room pressure, and the low air volume operation can be quickly switched to the normal air air volume operation.

  First to n-th branch exhaust ducts branched from the air supply duct and connected to the first to n-th air conditioning chambers to be connected to the first to n-th air conditioning chambers. When the first to nth air volume changing devices are installed, if the air volume reduction stopping means and the air volume reduction restarting means are simultaneously performed on all the first to nth air volume changing devices, the first to nth air volume changing devices are performed. The devices may interfere with each other, the duct internal pressure of the duct may fluctuate greatly, and the air pressure in the air conditioning room may fluctuate greatly. In this case, even if the air volume increase stop unit and the air volume increase restart unit are implemented in the first to n-th air volume changing devices, it is difficult to maintain the indoor air pressure of the air-conditioned room within the specified room pressure range. However, this operation mode changing system sequentially performs the air volume increase stop means and the air volume increase restart means at predetermined intervals from the first air volume changing device group to the nth air volume changing device group in the second switching operation. The first to nth air volume changing devices do not interfere with each other, and fluctuations in the duct internal pressure of the duct can be prevented. As a result, the air pressure in the air conditioning room does not fluctuate greatly, and even if the air pressure in the air conditioning room reaches the upper limit value or the lower limit value of the specified room pressure during the second switching operation, the upper limit value of the specified room pressure is reached. On the other hand, the indoor air pressure can be quickly lowered, the indoor air pressure can be quickly exceeded with respect to the lower limit value of the specified room pressure, and the low air volume operation can be quickly switched to the normal air air volume operation.

  The operation mode change system in which the air volume changing device is one of a constant air volume device (CAV), a variable constant air volume device (VAV), and a motor damper (MD) is the first switching operation from the normal air volume operation to the low air volume operation or the small air volume. In the second switching operation from the operation to the normal air flow operation, when the indoor air pressure of the air-conditioned room measured by the room pressure sensor reaches the upper limit value or the lower limit value of the predetermined specified room pressure, the constant air flow device or the variable constant air flow device or Since the motor damper temporarily stops the air volume decrease or the air volume increase, even if the air pressure in the air conditioning chamber reaches the upper limit value or the lower limit value of the specified room pressure during the first switching operation or the second switching operation, the specified chamber pressure The room pressure can be quickly reduced below the upper limit value, and the room pressure can be quickly increased above the lower limit value of the specified room pressure. In the operation mode change system, during the first switching operation or the second switching operation, the air pressure in the air-conditioned room measured by the room pressure sensor is lower than the upper limit value of the specified room pressure or higher than the lower limit value of the specified room pressure. Since the constant air volume device or variable constant air volume device or motor damper restarts the air volume decrease or the air volume increase, the normal air volume is maintained while maintaining the air pressure in the air conditioning room within the range between the upper limit value and the lower limit value of the specified room pressure. The operation can be quickly switched from the low air volume operation or the low air volume operation to the normal air volume operation, and the operation time of the first switching operation or the second switching operation can be shortened.

The conceptual block diagram of the operation mode change system shown as an example. The block diagram of the operation mode change system shown in the state of a normal air volume driving | operation, a low air volume driving | operation, or the 1st and 2nd switching operation. The flowchart explaining the 1st switching operation. The flowchart which continues from FIG. The flowchart which continues from FIG. (A) is a graph which shows the time change of the air volume of the constant air volume apparatus in 1st switching operation, (b) is a graph which shows the time change of the indoor air pressure of the clean room in 1st switching operation. The flowchart explaining the 2nd switching operation. 8 is a flowchart continued from FIG. The flowchart which continues from FIG. (A) is a graph which shows a time-dependent change of the air volume of the constant air volume apparatus in 2nd switching operation, (b) is a graph which shows the time-dependent change of the indoor air pressure of the clean room in 2nd switching operation. The conceptual block diagram of the operation mode change system shown as another example. The conceptual block diagram of the operation mode change system shown as another example. (A) is a graph which shows a time-dependent change of the air volume of the constant air volume apparatus in a 1st switching operation, (b) is a graph which shows a time-dependent change of the indoor air pressure of the clean room in a 1st switching operation. (A) is a graph which shows a time-dependent change of the air volume of the constant air volume apparatus in 2nd switching operation, (b) is a graph which shows the time-dependent change of the indoor air pressure of the clean room in 2nd switching operation. (A) is a graph which shows a time-dependent change of the air volume of the constant air volume apparatus in background art, (b) is a graph which shows a time-dependent change of the indoor air pressure of the clean room in background art. (A) is a graph which shows a time-dependent change of the air volume of the constant air volume apparatus in background art, (b) is a graph which shows a time-dependent change of the indoor air pressure of the clean room in background art.

  The details of the operation mode change system according to the present invention will be described below with reference to the accompanying drawings such as FIG. 1 which is a conceptual configuration diagram of the operation mode change system 10A shown as an example. In FIG. 1, the clean room 11 (air-conditioning room) is shown from the side.

  The operation mode change system 10A performs a normal air volume operation that is performed when the clean room 11 (air conditioning room) provided in the building is used, and performs a low air volume operation that is performed when the clean room 11 is not used. . Furthermore, the first switching operation for switching from the normal air volume operation to the low air volume operation is performed, and the second switching operation for switching from the low air volume operation to the normal air volume operation is performed. In addition, this system 10A can be used not only for the clean room 11 but also for all other types of air conditioning rooms.

  The case where the clean room 11 is used is a case where the worker performs a predetermined work inside the clean room 11, and the normal air volume operation is performed mainly during the daytime work time. The case where the clean room 11 is not used is a case where the worker goes out of the clean room 11 and the work inside the clean room 11 is interrupted, and the low air volume operation is performed mainly during the non-working time at night. The operation mode changing system 10A promptly switches from the normal air volume operation to the low air volume operation while preventing the fluctuation in the indoor air pressure of the clean room 11 during the first switching operation, and the indoor air pressure of the clean room 11 during the second switching operation. Switch from low airflow operation to normal airflow operation while preventing fluctuations.

  The operation mode changing system 10A includes an air supply duct 12 that sends outdoor air to the clean room 11, an exhaust duct 13 that sends air from the clean room 11 to the outside, an air conditioner 14 installed in the air supply duct 12, and an exhaust duct 13 On the upstream side of the exhaust fan 15, the constant air volume device (CAV) 16 (air volume changing device) installed in the air supply duct 12 extending downstream of the air conditioner 14, and the exhaust fan 15. A room pressure control motor damper (MD) 17 installed in the extending exhaust duct 13, a room pressure sensor 18 (pressure sensor) for measuring the room pressure of the clean room 11, and a controller 19 are formed. 1, the constant air volume device (CAV) 16 is illustrated, but instead of the constant air volume device (CAV) 16, a variable constant air volume device (VAV) (air volume changing device) or a motor damper (MD) (air volume) Change device) can also be used.

  The clean room 11 has a clean air-conditioned space of a predetermined volume surrounded by a ceiling, a floor, front and rear walls, and side walls, and is partitioned from the outside by the ceiling, the floor, and these walls. An air supply port (not shown) for taking air supplied from the air supply duct 12 into the clean room 11 is provided on the ceiling. An exhaust port (not shown) for taking the air of the clean room 11 into the exhaust duct 13 is provided on the floor or side wall. The clean room 11 is provided with a door (not shown) for entering and exiting the clean room 11.

  In the clean room 11, the indoor air pressure is strictly managed, and the indoor air pressure is maintained at the target room pressure (positive pressure) in the normal air flow operation and the low air flow operation. Alternatively, the target chamber pressure (negative pressure) may be maintained, and in that case, it is important to prevent air leakage to the adjacent chamber by ensuring a pressure difference from the adjacent chamber. The air supply duct 12 is connected to an air supply port provided on the ceiling of the clean room 11, and connects the outdoor and the clean room 11. Although not shown, the air supply duct 12 is provided with a flow meter for measuring the flow rate of air flowing through the duct 12. The flow meter is connected to the controller 19 via the control signal line 20. The exhaust duct 13 is connected to an exhaust port provided on the floor or side wall of the clean room 11 and connects the clean room 11 and the outdoors. The exhaust duct 13 is provided with a flow meter that measures the flow rate of air flowing through the duct 13. The flow meter is connected to the controller 19 via the control signal line 20.

  The control unit (not shown) of the air conditioner 14 is connected to the controller 19 via the control signal line 20. The air conditioner 14 incorporates an air supply fan 21 (air supply device). The frequency of the air supply fan 21 of the air conditioner 14 is controlled by an inverter. In the normal air flow operation, the air conditioner 14 forcibly supplies the clean room 11 with air (air-conditioned air) having a preset normal air flow operation target air supply amount. In the small air volume operation, the air conditioner 14 forcibly supplies the clean room 11 with air of a preset small air volume operation target air supply amount (air conditioned air).

  In the first switching operation, the air conditioner 14 supplies air to the clean room 11 (air-conditioned air) until the normal air volume operation target air supply amount in the normal air amount operation is switched to the small air amount operation target air supply amount in the low air amount operation. After the air supply amount is gradually decreased and the operation is switched to the low air amount operation, the low air amount operation target air supply amount is maintained. In the first switching operation, the controller 19 controls whether the air supply amount of the air conditioner 14 can be increased / decreased / maintained.

  In the second switching operation, the air conditioner 14 supplies air to the clean room 11 (air-conditioned air) until it switches from the small air volume operation target air supply amount of the low air volume operation to the normal air volume operation target air supply amount of the normal air volume operation. The air supply amount is gradually increased, and after switching to the normal air flow operation, the normal air flow operation target air supply amount is maintained. In the second switching operation, in the second switching operation, the controller 19 controls whether or not the supply air volume of the air conditioner 14 can be increased / decreased / maintained.

  The exhaust fan 15 has a control unit (not shown) connected to the controller 19 via a control signal line 20. The frequency of the exhaust fan 15 is controlled by an inverter. In the normal air volume operation, the exhaust fan 15 forcibly exhausts air of a preset normal air volume operation target exhaust air volume from the clean room 11. In the small air volume operation, the exhaust fan 15 forcibly exhausts air of a preset small air volume operation target exhaust volume from the clean room 11.

  In the first switching operation, the exhaust fan 15 gradually decreases the amount of air exhausted from the clean room 11 until the normal air amount operation target exhaust amount in the normal air amount operation is switched to the low air amount operation target exhaust amount in the low air amount operation. After switching to the low air volume operation, the low air volume operation target exhaust volume is maintained. In the first switching operation, whether or not the supply air volume of the exhaust fan 15 can be increased / decreased / maintenance is controlled by the controller 19.

  In the second switching operation, the exhaust fan 15 gradually increases the exhaust amount of the air exhausted from the clean room 11 until switching from the small air amount operation target exhaust amount of the low air amount operation to the normal air amount operation target exhaust amount of the normal air amount operation. After switching to the normal air volume operation, the normal air volume operation target exhaust amount is maintained. In the second switching operation, whether or not the supply air volume of the exhaust fan 15 can be increased / decreased / maintained is controlled by the controller 19.

  The constant air volume device (CAV) 16 is installed in an air supply duct 12 extending near the ceiling of the clean room 11. The constant air volume device 16 has a control unit (not shown) connected to the controller 19 via a control signal line 20. The constant air volume device 16 includes a swirl vane (opening / closing mechanism), an air flow path opened and closed by swirling of the swirl vane, a detection unit that detects a wind speed in the air flow path, and a cross-sectional area of the air flow path multiplied by the wind speed. A calculation unit that calculates the air volume in the air flow path, and a determination unit that determines the opening / closing operation of the swirling blade by comparing the air volume in the air flow path with the target air volume. By changing the degree (the amount of air passing through the air passage), the air volume of the air passing through the air passage is adjusted.

  In the constant air volume device 16, the target air volume corresponding to the normal air volume operation and the low air volume operation is set in advance. In the normal air volume operation, the constant air volume device 16 adjusts the opening of the air flow path with the swirl blades, and maintains the air volume of the air supplied to the clean room 11 at a preset normal air volume operation target air volume. In the small air volume operation, the constant air volume device 16 adjusts the opening degree of the air flow path with the swirl blades, and maintains the air volume of the air supplied to the clean room 11 at a preset low air volume operation target air volume.

  In the first switching operation, the constant air volume device 16 gradually decreases the opening of the air flow path until the normal air volume operation target air volume of the normal air volume operation is switched to the low air volume operation target air volume of the low air volume operation, and enters the clean room 11. Reduce the air volume of the supplied air. The constant air volume device 16 holds the opening degree of the swirl blade corresponding to the low air volume operation after switching to the low air volume operation. In the first switching operation, the controller 19 controls the opening / closing operation of the swirling blades of the constant air volume device 16.

  In the second switching operation, the constant air volume device 16 gradually increases the opening of the air flow path until it switches from the low air volume operation target air volume of the low air volume operation to the normal air volume operation target air volume of the normal air volume operation, and enters the clean room 11. Increase the air volume of the supplied air. After switching to the normal air volume operation, the constant air volume device 16 holds the opening degree of the swirl blades corresponding to the normal air volume operation. In the second switching operation, the controller 19 controls the opening / closing operation of the swirling blades of the constant air volume device 16.

  The room pressure control motor damper (MD) 17 is installed in an exhaust duct 13 extending near the floor of the clean room 11. The motor damper 17 has a controller (not shown) connected to the controller 19 via the control signal line 20. The motor damper 17 has a swirl vane (opening / closing mechanism) and an air flow path that is opened and closed by swirling of the swirl vane, and changes the opening of the air flow path (the amount of air passing through the air flow path) with the swirl vane. Then, the air volume passing through the air flow path is adjusted.

  In the room pressure control motor damper 17, target room pressures corresponding to normal air volume operation and low air volume operation are set in advance. In the normal air volume operation, the motor damper 17 adjusts the opening degree of the air flow path with the swirl vanes, and increases or decreases the air volume of the air passing through the air flow path to maintain the indoor air pressure of the clean room 11 at a preset target room pressure. . In the small air volume operation, the motor damper 17 adjusts the opening degree of the air flow path with the swirl blades, and increases or decreases the air volume of the air passing through the air flow path to maintain the indoor air pressure of the clean room 11 at a preset target room pressure. .

  The room pressure sensor 18 is connected to the controller 19 via the control signal line 20. The room pressure sensor 18 measures the room pressure of the clean room 11 and transmits a room pressure signal indicating the measured room pressure to the controller 19. The controller 19 is a computer having a central processing unit (CPU or MPU) that performs arithmetic processing and a memory that can store various data. The controller 19 is connected to an input device for inputting various data and operating conditions and a display device for input confirmation (not shown).

  In the memory of the controller 19, the target room pressure of the clean room 11 in the normal air volume operation and the low air volume operation, the normal air volume operation target supply air amount or the normal air volume operation target static pressure of the air conditioner 14, and the low air volume operation target supply of the air conditioner 14. Air volume or small air volume operation target static pressure, normal air volume operation target exhaust volume or normal air volume operation target static pressure of the exhaust fan 15, low air volume operation target exhaust air volume or low air volume operation target static pressure of the exhaust fan 15, constant air volume device 16 The normal air volume operation target air volume and the small air volume operation target air volume of the constant air volume device 16 are stored. These target values are input from the input device to the controller 19 and are arbitrarily set via the input device. The target chamber pressure is the same in normal air volume operation and low air volume operation.

  The memory of the controller 19 stores the upper limit value of the prescribed room pressure and the lower limit value of the prescribed room pressure of the clean room 11. The upper limit value and the lower limit value of the specified chamber pressure are input from the input device to the controller 19 and are arbitrarily set via the input device. The upper limit value of the specified chamber pressure is smaller than the upper limit value of the target chamber pressure, and the lower limit value of the specified chamber pressure is smaller than the lower limit value of the target chamber pressure. Therefore, the specified chamber pressure is within the range of the target chamber pressure. The specified chamber pressure is input from the input device to the controller 19 and is arbitrarily set within the range of the target chamber pressure via the input device.

  In the first switching operation, the controller 19 transmits the small air amount operation target air supply amount or the small air amount operation target static pressure of the air supply fan 21 of the air conditioner 14 to the control unit of the air conditioner 14, and the air supply of the air supply fan 21. An air supply amount decrease stop signal for temporarily stopping the decrease in amount is transmitted to the control unit of the air conditioner 14. Alternatively, in the first switching operation, the controller 19 transmits to the control unit of the air conditioner 14 a small air amount operation command for switching to the small air amount operation target air supply amount or the small air amount operation target static pressure of the air supply fan 21 of the air conditioner 14. Then, a supply amount decrease stop signal for temporarily stopping the decrease in supply amount of the supply fan 21 is transmitted to the control unit of the air conditioner 14. In this case, the memory of the air conditioner 14 stores a small air volume operation target supply air amount or a small air volume operation target static pressure. Further, an air supply amount decrease restart signal for restarting the supply amount decrease of the air supply fan 21 that has been temporarily stopped is transmitted to the control unit of the air conditioner 14.

  In the second switching operation, the controller 19 transmits the normal air volume operation target air supply amount or the normal air volume operation target static pressure of the air supply fan 21 of the air conditioner 14 to the control unit of the air conditioner 14, and the air supply of the air supply fan 21. An air supply amount increase stop signal for temporarily stopping the increase in amount is transmitted to the control unit of the air conditioner 14. Alternatively, in the second switching operation, the controller 19 transmits a normal air flow operation command for switching to the normal air flow operation target supply air amount or the normal air flow operation target static pressure of the air supply fan 21 of the air conditioner 14 to the control unit of the air conditioner 14. Then, a supply amount increase stop signal for temporarily stopping the increase in supply amount of the supply fan 21 is transmitted to the control unit of the air conditioner 14. In this case, the normal air volume operation target supply air amount is stored in the memory of the air conditioner 14. Furthermore, a supply amount increase restart signal for restarting the increase in the supply amount of the temporarily stopped supply fan 21 is transmitted to the control unit of the air conditioner 14.

  In the first switching operation, the controller 19 transmits the small air amount operation target exhaust amount or the small air amount operation target static pressure of the exhaust fan 15 to the control unit of the exhaust fan 15 and temporarily stops the exhaust amount decrease of the exhaust fan 15. A decrease stop signal is transmitted to the control unit of the exhaust fan 15. Alternatively, in the first switching operation, the controller 19 transmits a small air amount operation command for switching to the small air amount operation target exhaust amount or the small air amount operation target static pressure of the exhaust fan 15 to the control unit of the exhaust fan 15, and An exhaust amount reduction stop signal for temporarily stopping the reduction in amount is transmitted to the control unit of the exhaust fan 15. Further, an exhaust amount reduction restart signal for restarting the exhaust amount reduction of the temporarily stopped exhaust fan 15 is transmitted to the control unit of the exhaust fan 15.

  In the second switching operation, the controller 19 transmits the normal airflow operation target exhaust amount or the normal airflow operation target static pressure of the exhaust fan 15 to the control unit of the exhaust fan 15 to temporarily stop the exhaust amount increase of the exhaust fan 15. An increase stop signal is transmitted to the control unit of the exhaust fan 15. Alternatively, in the second switching operation, the controller 19 transmits a normal air amount operation command for switching to the normal air amount operation target exhaust amount or the normal air amount operation target static pressure of the exhaust fan 15 to the control unit of the exhaust fan 15. An exhaust amount increase stop signal for temporarily stopping the increase in amount is transmitted to the control unit of the exhaust fan 15. Furthermore, an exhaust amount increase restart signal for restarting the exhaust amount increase of the exhaust fan 15 that has been temporarily stopped is transmitted to the control unit of the exhaust fan 15.

  In the first switching operation, the controller 19 transmits an opening / closing operation stop signal for temporarily stopping the opening / closing operation of the swirling blades of the constant air volume device 16 by transmitting the small air volume operation target air volume of the constant air volume device 16 to the control unit of the constant air volume device 16. It transmits to the control part of the constant air volume apparatus 16. Alternatively, in the first switching operation, the controller 19 transmits a small air volume operation command for switching to the small air volume operation target air volume of the constant air volume device 16 to the control unit of the constant air volume device 16, and opens and closes the swirl blades of the constant air volume device 16. An opening / closing operation stop signal to be temporarily stopped is transmitted to the control unit of the constant air volume device 16. Further, an opening / closing operation resumption signal for resuming the opening / closing operation of the swirling blades of the constant air volume device 16 that has been temporarily stopped is transmitted to the control unit of the constant air volume device 16. The constant air volume device 16 transmits the air volume of the constant air volume device 16 to the controller 19.

  In the second switching operation, the controller 19 transmits the normal air volume operation target air volume of the constant air volume device 16 to the control unit of the constant air volume device 16, and generates an opening / closing operation stop signal for temporarily stopping the opening / closing operation of the swirling blades of the constant air volume device 16. It transmits to the control part of the constant air volume apparatus 16. Alternatively, in the second switching operation, the controller 19 transmits a normal air volume operation command for switching to the normal air volume operation target air volume of the constant air volume device 16 to the control unit of the constant air volume device 16, and opens and closes the swirl blades of the constant air volume device 16. An opening / closing operation stop signal to be temporarily stopped is transmitted to the control unit of the constant air volume device 16. Further, an opening / closing operation resumption signal for resuming the opening / closing operation of the swirling blades of the constant air volume device 16 that has been temporarily stopped is transmitted to the control unit of the constant air volume device 16. The constant air volume device 16 transmits the air volume of the constant air volume device 16 to the controller 19.

  In the normal air volume operation and the low air volume operation, the air conditioner 14, the exhaust fan 15, the constant air volume device 16, the room pressure control motor damper 17, the room pressure sensor 18, and the controller 19 are operated. Air is supplied to the clean room 11, and a predetermined amount of air is exhausted from the clean room 11 to the outside by the exhaust fan 15. In the normal air flow operation and the low air flow operation, the indoor pressure of the clean room 11 is transmitted from the room pressure sensor 18 to the controller 19, and a control signal is transmitted from the controller 19 to the motor damper 17. By adjusting the opening, the room pressure of the clean room 11 is maintained at the target room pressure. Alternatively, the room pressure control motor damper 17 detects the indoor pressure in the clean room 11 and adjusts the opening degree of the swirl blade, whereby the indoor pressure in the clean room 11 is maintained at the target room pressure.

  FIG. 2 is a configuration diagram of the operation mode changing system 10A shown in the state of normal air volume operation, low air volume operation, or first and second switching operations, and FIG. 3 is a flowchart for explaining the first switching operation. 4 is a flowchart continuing from FIG. FIG. 5 is a flowchart continuing from FIG. 6A is a graph showing the change over time in the air volume of the constant air volume device 16 in the first switching operation, and FIG. 6B is a graph showing the change over time in the indoor air pressure of the clean room 11 in the first switching operation. It is. FIG. 2 shows changes in the air volume in the first switching operation. In the graph of FIG. 6A, the vertical axis represents the air volume of the constant air volume device 16, and the horizontal axis represents the elapsed time. In the graph of FIG. 6B, the vertical axis represents the indoor pressure, and the horizontal axis represents the elapsed time.

  Based on these flowcharts, each means implemented by the operation mode change system 10A in the first switching operation will be described as follows. In the operation mode changing system 10A, the normal air volume operation is performed during the usage time in which the worker performs a predetermined work in the clean room 11 (S-10). In the normal air flow operation, the air conditioner 14 is operated with the normal air flow operation target supply air amount or the normal air flow operation target static pressure, and the exhaust fan 15 is operated with the normal air flow operation target exhaust amount or the normal air flow operation target static pressure. The constant air volume device 16 is operated at the normal air volume operation target air volume. In the normal air volume operation, the indoor air pressure of the clean room 11 is maintained at the target room pressure (S-11).

  In the non-use time when the work in the clean room 11 is interrupted, a low air volume operation is performed in order to save energy. The controller 19 determines whether there is a switching instruction for switching from the normal air volume operation to the low air volume operation during the normal air volume operation (S-12). When there is no switching instruction from the normal air volume operation to the low air volume operation, the controller 19 continues the normal air volume operation. When there is a switching instruction from the normal air volume operation to the low air volume operation, the controller 19 performs the first switching operation and switches from the normal air volume operation to the low air volume operation.

  The controller 19 reads the small air volume operation target air supply amount or the small air volume operation target static pressure of the air conditioner 14 from the memory, and transmits the small air volume operation target air supply amount or the small air volume operation target static pressure to the control unit of the air conditioner 14. To do. The control unit of the air conditioner 14 receives the low airflow operation target air supply amount or the low airflow operation target static pressure from the controller 19, and then supplies the normal airflow operation target air supply amount or the normal airflow operation target static pressure to the low airflow operation target supply. The air volume or the small air volume operation target static pressure is changed (S-13). The control unit of the air conditioner 14 is in a period from when the normal air flow operation target supply air amount or normal air flow operation target static pressure of normal air flow operation is switched to the low air flow operation target supply air amount or low air flow operation target static pressure of low air flow operation. Then, the air supply fan 21 is inverter-controlled to gradually reduce the amount of air supplied to the clean room 11 (air-conditioned air) (S-14).

  The controller 19 reads the small air volume operation target exhaust volume or the small air volume operation target static pressure of the exhaust fan 15 from the memory, and transmits the small air volume operation target exhaust volume or the small air volume operation target static pressure to the control unit of the exhaust fan 15. The control unit of the exhaust fan 15 receives the low airflow operation target exhaust amount or the low airflow operation target static pressure from the controller 19, and then changes the normal airflow operation target exhaust amount or the normal airflow operation target static pressure to the low airflow operation target exhaust amount or Change to a small air volume operation target static pressure (S-13). The control unit of the exhaust fan 15 performs exhaust until the normal air amount operation target exhaust amount in the normal air amount operation or the normal air amount operation target static pressure is switched to the low air amount operation target exhaust amount in the low air amount operation or the low air amount operation target static pressure. The fan 15 is inverter-controlled to gradually reduce the amount of air exhausted from the clean room 11 (S-14). A flow signal of air flowing through the exhaust duct 13 is transmitted from the flow meter to the controller 19.

  The controller 19 reads the small air volume operation target air volume of the constant air volume device 16 from the memory, and transmits the read low air volume operation target air volume to the control unit of the constant air volume device 16. The control unit of the constant air volume device 16 receives the low air volume operation target air volume from the controller 19 and then changes the normal air volume operation target air volume to the low air volume operation target air volume (S-13) and also corresponds to the low air volume operation target air volume. The air volume reduction is started by the opening and closing operation of the swirl blade. The control unit of the constant air flow device 16 turns the swirl blade to gradually reduce the opening of the air flow path until the normal air flow operation target air volume in the normal air flow operation is switched to the low air flow operation target air volume in the low air flow operation. The air volume supplied to the clean room 11 is gradually reduced (S-14).

  The controller 19 is a process for reducing the air supply amount of the air conditioner 14 (while the air supply amount is continuing to decrease), a process for reducing the exhaust air amount of the exhaust fan 15 (while continuing to reduce the exhaust amount), In the middle), it is determined whether the room air pressure in the clean room 11 has reached the upper limit value or the lower limit value of the specified room pressure based on the room pressure signal transmitted from the room pressure sensor 18 (S-15). When the controller 19 determines that the indoor air pressure of the clean room 11 has not reached the upper limit value or the lower limit value of the specified room pressure and the indoor air pressure is within the specified room pressure, the controller 19 reduces the air supply amount of the air conditioner 14. The exhaust air amount of the exhaust fan 15 is continuously reduced, and the air amount reduction of the constant air amount device 16 is continued (S-16).

  Next, the controller 19 determines whether or not the air volume of the constant air volume device 16 has reached the low air volume operation target air volume (S-17). If the controller 19 determines in step 17 (S-17) that the air volume of the constant air volume device 16 has not reached the low air volume operation target air volume, the controller 19 returns to step 14 (S-14), and step 14 (S-14). Repeat the procedure from). When the controller 19 determines in step 17 (S-17) that the air volume of the constant air volume device 16 has reached the low air volume operation target air volume, the controller 19 performs the low air volume operation in that state (S-18).

  In the low air volume operation, the air conditioner 14 holds the low air volume operation target supply air amount, the exhaust fan 15 holds the low air volume operation target exhaust air volume, and the constant air volume device 16 holds the low air volume operation target air volume. The indoor pressure in the clean room 11 is maintained at the target room pressure by the pressure control motor damper 17. In the operation mode change system 10A, the time until the constant air volume device 16 is switched from the normal air volume operation target air volume (normal air volume operation) to the low air volume operation target air volume (low air volume operation) is in the range of 300 to 900 seconds. Therefore, the time from the normal air volume operation to the low air volume operation is in the range of 300 to 900 seconds.

  In step 15 (S-15), when the controller 19 determines that the indoor air pressure of the clean room 11 has reached the lower limit value of the specified room pressure, the controller 19 transmits an air supply amount decrease stop signal to the control unit of the air conditioner 14. When it is determined that the room pressure in the clean room 11 has reached the upper limit value of the specified room pressure, an exhaust amount reduction stop signal is transmitted to the control unit of the exhaust fan 15 and the room pressure in the clean room 11 is the upper limit value of the specified room pressure. Alternatively, when it is determined that the lower limit value has been reached, an air volume reduction stop signal is transmitted to the control unit of the constant air volume device 16. The air volume reduction stop signal may include a repeat command for alternately repeating the air volume reduction stop and the air volume reduction restart at a predetermined time interval, or may not include a repeat command.

  The control unit of the air conditioner 14 temporarily stops the air amount decrease of the air conditioner 14 according to the air amount decrease stop signal from the controller 19 (air amount decrease stop means) (S-19), and the air amount decreases. A stop execution signal is transmitted to the controller 19. The control unit of the exhaust fan 15 temporarily stops the exhaust amount decrease of the exhaust fan 15 according to the exhaust amount decrease stop signal from the controller 19 (exhaust amount decrease stop means) (S-19), and sends an exhaust amount decrease stop execution signal. It transmits to the controller 19. The controller of the constant air volume device 16 temporarily stops the air volume reduction of the constant air volume device 16 according to the air volume reduction stop signal from the controller 19 (air volume reduction stop means) (S-19), and sends the air volume reduction stop execution signal to the controller 19. Send to. The supply air amount decrease stop of the air conditioner 14, the exhaust amount decrease stop of the exhaust fan 15, and the air amount decrease stop of the constant air amount device 16 are performed independently.

  When the air volume reduction stop signal does not include a repeat command, the control unit of the constant air volume device 16 stops the air volume reduction until the air volume reduction restart signal is transmitted from the controller 19. When the repetition instruction is included in the air volume reduction stop signal, the control unit of the constant air volume device 16 causes the constant air volume device 16 to alternately repeat the stop of the air volume reduction and the restart of the air volume reduction at predetermined time intervals. For example, after the air volume reduction is stopped for 2 seconds, the air volume reduction is resumed. After the air volume reduction is performed for 3 seconds, the air volume reduction is stopped again, and then the air volume reduction is restarted.

  When the air volume reduction stopping means repeatedly stops the air volume reduction and restarts the air volume reduction, even if the indoor air pressure of the clean room 11 reaches the upper limit value or the lower limit value of the specified room pressure during the first switching operation, the specified room The room pressure can be quickly reduced below the upper limit value of the pressure, and the room pressure can be quickly increased above the lower limit value of the specified chamber pressure.

  Next, the controller 19 determines whether the room air pressure of the clean room 11 has fallen below the upper limit value or the lower limit value of the specified room pressure based on the room pressure signal transmitted from the room pressure sensor 18 (S-20). When the controller 19 determines that the indoor air pressure of the clean room 11 is not lower than the upper limit value of the specified room pressure or is not higher than the lower limit value, the controller 19 continues the air supply amount reduction stop of the air conditioner 14 and the exhaust fan 15 While continuing the exhaust amount reduction stop and continuing the air amount reduction stop of the constant air quantity device 16 (S-21), the procedure from step 20 (S-20) is repeated.

  In Step 20 (S-20), when the controller 19 determines that the indoor air pressure of the clean room 11 is below the upper limit value or above the lower limit value of the specified room pressure, an air supply amount reduction restart signal is sent to the control unit of the air conditioner 14. In addition to transmitting an exhaust amount reduction restart signal to the control unit of the exhaust fan 15, a close operation restart signal is transmitted to the control unit of the constant air volume device 16.

  The control unit of the air conditioner 14 resumes the air amount decrease of the air conditioner 14 according to the air amount decrease restart signal from the controller 19 (air amount decrease restart means) (S-22), and restarts the air amount decrease. An execution signal is transmitted to the controller 19. The control unit of the exhaust fan 15 resumes the exhaust amount decrease of the exhaust fan 15 according to the exhaust amount decrease restart signal from the controller 19 (exhaust amount decrease restart means) (S-22), and sends the exhaust amount decrease restart execution signal to the controller. 19 to send. The controller of the constant air volume device 16 restarts the air volume reduction of the constant air volume device 16 according to the air volume reduction restart signal from the controller 19 (air volume reduction restarting means) (S-22), and sends the air volume reduction restart execution signal to the controller 19. Send. The air supply unit 14 restarts the reduction of the air supply amount, the exhaust fan 15 restarts the reduction of the exhaust air amount, and the constant air volume device 16 restarts the air volume reduction.

  After the air conditioner 14 restarts the reduction of the supply air amount, the exhaust fan 15 restarts the reduction of the exhaust air amount, and the air volume reduction of the constant air volume device 16 resumes, the controller 19 operates the air volume of the constant air volume device 16 with the low air volume operation. It is determined whether the target air volume has been reached (S-23). When the controller 19 determines in step 23 (S-23) that the air volume of the constant air volume device 16 is not the low air volume operation target air volume, the controller 19 returns to step 15 (S-15), and step 15 (S-15). Repeat the procedure from). When the controller 19 determines in step 23 (S-23) that the air volume of the constant air volume device 16 has reached the low air volume operation target air volume, the controller 19 performs the low air volume operation in that state as in step 17 (S-17). Implement (S-18).

  The operation mode changing system 10A includes a process for reducing the air supply amount of the air conditioner 14 in the first switching operation from the normal air volume operation to the low air volume operation, a process for reducing the exhaust air volume of the exhaust fan 15 (exhaust device), and a constant air volume device 16 (air volume). In the air volume reduction process of the change device), when the indoor air pressure of the clean room 11 (air-conditioning room) measured by the room pressure sensor 18 reaches the lower limit value of the predetermined specified room pressure, the air-conditioner 14 temporarily stops the air supply reduction. When the indoor air pressure of the clean room 11 (air conditioning room) reaches the upper limit value of the predetermined specified room pressure, the exhaust fan 15 is temporarily stopped to reduce the exhaust amount, and the indoor air pressure of the clean room 11 (air conditioning room) is predetermined. When the upper limit value or the lower limit value of the specified room pressure is reached, the constant air volume device 16 temporarily stops the decrease in the air volume, so that the room pressure of the clean room 11 is changed to the specified room pressure during the first switching operation. Even if the upper limit value or the lower limit value is reached, the indoor pressure can be quickly lowered with respect to the upper limit value of the specified chamber pressure, and the indoor pressure can be quickly exceeded with respect to the lower limit value of the specified chamber pressure. it can.

  The operation mode change system 10A does not prevent a predetermined amount from being reduced because the pressure difference between the indoor air pressure of the clean room 11 and the reference pressure is reduced during the first switching operation, and the positive / negative pressure is not reversed. Inadvertent entry of air in the adjacent space into the clean room 11 can be prevented, and contamination of the clean room 11 due to the entry of air in the adjacent space can be prevented.

  The operation mode change system 10A is configured such that the room pressure of the clean room 11 measured by the room pressure sensor 18 is the specified room pressure during the execution of the air supply amount reduction stop means, the exhaust amount reduction stop means, and the air volume reduction stop means in the first switching operation. When the air pressure is lower than the upper limit value or exceeds the lower limit value of the specified room pressure, the air supply unit 14 restarts the reduction of the supply air amount, the exhaust fan 15 restarts the reduction of the exhaust amount, and the constant air volume device 16 restarts the reduction of the air volume. Therefore, it is possible to quickly switch from the normal air flow operation to the low air flow operation while maintaining the indoor air pressure of the clean room 11 within the range between the upper limit value and the lower limit value of the specified room pressure, and the operation of the first switching operation. Time can be shortened.

  The operation mode change system 10A can promptly shift from the supply amount decrease stop to the supply amount decrease restart, can promptly shift from the exhaust amount decrease stop to the exhaust amount decrease restart, and from the air amount decrease stop. Since the flow can be promptly shifted to the reduction of the air volume, compared with the background art shown in FIGS. 15 and 16, when switching from the normal air volume operation to the low air volume operation, as shown in FIGS. The indoor air pressure of the clean room 11 does not exceed the upper limit value of the specified room pressure, the indoor air pressure does not fall below the lower limit value of the specified room pressure, and the switching time from the normal air flow operation to the low air flow operation is the same as that of the background art. Short compared.

  FIG. 7 is a flowchart for explaining the second switching operation, and FIG. 8 is a flowchart continued from FIG. FIG. 9 is a flowchart continued from FIG. FIG. 10A is a graph showing the change over time in the air volume of the constant air volume device 16 in the second switching operation, and FIG. 10B is a graph showing the change over time in the indoor air pressure of the clean room 11 in the second switching operation. It is. FIG. 7 shows the change in air volume in the second switching operation. In the graph of FIG. 10A, the vertical axis represents the air volume of the constant air volume device 16, and the horizontal axis represents the elapsed time. In the graph of FIG. 10B, the vertical axis represents the indoor pressure, and the horizontal axis represents the elapsed time.

  Based on these flowcharts, each means implemented by the operation mode change system 10A in the second switching operation will be described as follows. In the non-use time when the work in the clean room 11 is interrupted, for example, a low air volume operation is performed to save energy (S-30). In the small air volume operation, the air conditioner 14 is operated with a small air volume operation target supply air amount or a small air volume operation target static pressure, and the exhaust fan 15 is operated with a small air volume operation target exhaust amount or a small air volume operation target static pressure. The constant air volume device 16 is operated with a small air volume operation target air volume. In the small air volume operation, the indoor air pressure of the clean room 11 is maintained at the target room pressure (S-31).

  When it is time to use the work in the clean room 11, normal air volume operation is performed. The controller 19 determines whether there is a switching instruction to switch from the low air flow operation to the normal air flow operation during the low air flow operation (S-32). When there is no switching instruction from the small air volume operation to the normal air volume operation, the controller 19 continues the small air volume operation. When there is an instruction to switch from the low air volume operation to the normal air volume operation, the controller 19 performs the second switching operation and switches from the low air volume operation to the normal air volume operation.

  The controller 19 reads the normal air volume operation target air supply amount or the normal air volume operation target static pressure of the air conditioner 14 from the memory, and transmits the normal air volume operation target air supply amount or the normal air volume operation target static pressure to the control unit of the air conditioner 14. To do. The control unit of the air conditioner 14 receives the normal airflow operation target air supply amount or the normal airflow operation target static pressure from the controller 19, and then supplies the low airflow operation target air supply amount or the low airflow operation target static pressure to the normal airflow operation target supply. Change to air volume or normal air volume operation target static pressure (S-33). The control unit of the air conditioner 14 is in the period from when the small air volume operation target supply air amount or the low air volume operation target static pressure is switched to the normal air volume operation target air supply amount or the normal air volume operation target static pressure of the normal air volume operation. Then, the air supply fan 21 is inverter-controlled to gradually increase the amount of air supplied to the clean room 11 (conditioned air) (S-34).

  The controller 19 reads the normal air volume operation target exhaust amount or the normal air volume operation target static pressure of the exhaust fan 15 from the memory, and transmits the normal air volume operation target exhaust amount or the normal air amount operation target static pressure to the control unit of the exhaust fan 15. The control unit of the exhaust fan 15 receives the normal airflow operation target exhaust amount or the normal airflow operation target static pressure from the controller 19, and then changes the low airflow operation target exhaust amount or the low airflow operation target static pressure to the normal airflow operation target exhaust amount or The normal air volume operation target static pressure is changed (S-33). The exhaust amount increase start signal is started according to the exhaust amount increase start signal, and the exhaust amount increase start signal is transmitted to the controller 19. The control unit of the exhaust fan 15 performs exhaust until the low airflow operation target exhaust pressure or the low airflow operation target static pressure in the low airflow operation is switched to the normal airflow operation target exhaust amount or the normal airflow operation target static pressure in the normal airflow operation. The fan 15 is inverter-controlled to gradually increase the amount of air exhausted from the clean room 11 (S-34). A flow signal of air flowing through the exhaust duct 13 is transmitted from the flow meter to the controller 19.

  The controller 19 reads the normal air volume operation target air volume of the constant air volume device 16 from the memory, and transmits the read normal air volume operation target air volume to the control unit of the constant air volume device 16. The control unit of the constant air volume device 16 receives the normal air volume operation target air volume from the controller 19 and then changes the small air volume operation target air volume to the normal air volume operation target air volume (S-33) and also corresponds to the normal air volume operation target air volume. The air volume increases due to the opening and closing operation of the swirling blades. The control unit of the constant air volume device 16 gradually increases the opening of the air flow path by turning the swirl blade until the low air volume operation target air volume in the low air volume operation is switched to the normal air volume operation target air volume in the normal air volume operation. The air volume supplied to the clean room 11 is gradually increased (S-34).

  The controller 19 is configured to increase the air supply amount of the air conditioner 14 (while the air supply amount continues to increase), increase the exhaust air amount of the exhaust fan 15 (while continuing to increase the exhaust amount), and increase the air amount of the constant air volume device 16 (continuously increase the air volume). In the middle), it is determined from the room pressure signal transmitted from the room pressure sensor 18 whether the room pressure in the clean room 11 has reached the upper limit value or the lower limit value of the specified room pressure (S-35). When the controller 19 determines that the indoor air pressure of the clean room 11 has not reached the upper limit value or the lower limit value of the specified room pressure and the indoor air pressure is within the specified room pressure, the controller 19 increases the air supply amount of the air conditioner 14. The air volume of the exhaust fan 15 is continuously increased, and the air volume of the constant air volume device 16 is continuously increased (S-36).

  Next, the controller 19 determines whether or not the air volume of the constant air volume device 16 has reached the normal air volume operation target air volume (S-37). When the controller 19 determines in step 37 (S-37) that the air volume of the constant air volume device 16 is not the normal air volume operation target air volume, the controller 19 returns to step 34 (S-34), and step 34 (S-34). Repeat the procedure from). When the controller 19 determines in step 37 (S-37) that the air volume of the constant air volume device 16 has reached the normal air volume operation target air volume, the controller 19 performs the normal air volume operation in that state (S-38).

  In the normal airflow operation, the air conditioner 14 holds the normal airflow operation target supply air amount, the exhaust fan 15 holds the normal airflow operation target exhaust airflow, and the constant airflow device 16 holds the normal airflow operation target airflow. The indoor pressure in the clean room 11 is maintained at the target room pressure by the pressure control motor damper 17. In the operation mode changing system 10A, the time until the constant air volume device 16 switches from the low air volume operation target air volume (low air volume operation) to the normal air volume operation target air volume (normal air volume operation) is in the range of 300 to 900 seconds. Therefore, the time from the low air volume operation to the normal air volume operation is in the range of 300 to 900 seconds.

  In step 35 (S-35), when the controller 19 determines that the indoor air pressure of the clean room 11 has reached the upper limit value of the specified room pressure, the controller 19 transmits an air supply amount increase stop signal to the control unit of the air conditioner 14. When it is determined that the indoor air pressure of the clean room 11 has reached the lower limit value of the specified room pressure, an exhaust amount increase stop signal is transmitted to the control unit of the exhaust fan 15 and the indoor air pressure of the clean room 11 is the upper limit value of the specified room pressure. Alternatively, when it is determined that the lower limit has been reached, an air volume increase stop signal is transmitted to the control unit of the constant air volume device 16. The air volume increase stop signal may include a repeat command for alternately repeating the air volume increase stop and the air volume increase restart at predetermined time intervals, or may not include the repeat command.

  The control unit of the air conditioner 14 temporarily stops the increase of the air supply amount of the air conditioner 14 according to the supply amount increase stop signal from the controller 19 (air supply increase stop means) (S-39), and increases the air supply amount. A stop execution signal is transmitted to the controller 19. The control unit of the exhaust fan 15 temporarily stops the exhaust amount increase of the exhaust fan 15 according to the exhaust amount increase stop signal from the controller 19 (exhaust amount increase stop means) (S-39), and sends an exhaust amount increase stop execution signal. It transmits to the controller 19. The control unit of the constant air volume device 16 temporarily stops the increase in the air volume of the constant air volume device 16 according to the air volume increase stop signal from the controller 19 (air volume increase stop means) (S-39), and sends the air volume increase stop execution signal to the controller 19. Send to. The supply air amount increase stop of the air conditioner 14, the exhaust air amount increase stop of the exhaust fan 15, and the air volume increase stop of the constant air volume device 16 are performed independently.

  If the repeat command is not included in the air volume increase stop signal, the control unit of the constant air volume device 16 stops the air volume increase until the air volume increase restart signal is transmitted from the controller 19. When the repeat instruction is included in the air volume increase stop signal, the control unit of the constant air volume device 16 causes the constant air volume device 16 to alternately repeat the stop of the air volume increase and the restart of the air volume increase at predetermined time intervals. For example, after the air volume increase is stopped for 2 seconds, the air volume increase is resumed, and after the air volume increase is performed for 3 seconds, the air volume increase is stopped again, and then the air volume increase is restarted.

  When the air volume increase stop means repeatedly stops the air volume increase and restarts the air volume increase, even if the room air pressure of the clean room 11 reaches the upper limit value or the lower limit value of the specified room pressure during the second switching operation, the specified room The room pressure can be quickly reduced below the upper limit value of the pressure, and the room pressure can be quickly increased above the lower limit value of the specified chamber pressure.

  Next, the controller 19 determines whether the room air pressure of the clean room 11 has fallen below the upper limit value or the lower limit value of the specified room pressure based on the room pressure signal transmitted from the room pressure sensor 18 (S-40). When the controller 19 determines that the indoor air pressure of the clean room 11 does not fall below the upper limit value of the specified room pressure or exceeds the lower limit value, the controller 19 continues to stop increasing the air supply amount of the air conditioner 14 and While continuing to stop increasing the exhaust amount and continuing to stop increasing the air volume of the constant air volume device 16 (S-41), the procedure from Step 40 (S-40) is repeated.

  In step 40 (S-40), when the controller 19 determines that the indoor air pressure in the clean room 11 is below the upper limit value or above the lower limit value of the specified room pressure, an air supply increase restart signal is sent to the control unit of the air conditioner 14. Then, an exhaust amount increase restart signal is transmitted to the control unit of the exhaust fan 15, and an open operation restart signal is transmitted to the control unit of the constant air volume device 16.

  The control unit of the air conditioner 14 resumes the increase of the air supply amount of the air conditioner 14 according to the supply amount increase restart signal from the controller 19 (supply amount increase restart means) (S-42), and restarts the increase of the air supply amount. An execution signal is transmitted to the controller 19. The control unit of the exhaust fan 15 restarts the exhaust amount increase of the exhaust fan 15 according to the exhaust amount increase restart signal from the controller 19 (exhaust amount increase restart means) (S-42), and the exhaust amount increase restart execution signal is transmitted to the controller. 19 to send. The control unit of the constant air volume device 16 resumes the increase in the air volume of the constant air volume device 16 according to the air volume increase restart signal from the controller 19 (air volume increase restart means) (S-42), and sends the air volume increase restart execution signal to the controller 19. Send. The restart of the increase in the air supply amount of the air conditioner 14, the restart of the increase in the exhaust amount of the exhaust fan 15, and the restart of the increase in the air amount of the constant air amount device 16 are performed independently.

  After the air conditioner 14 resumes the increase in the air supply amount, the exhaust fan 15 resumes the increase in the exhaust amount, and the air volume of the constant air volume device 16 resumes, the controller 19 operates the normal air volume operation of the constant air volume device 16. It is determined whether the target air volume has been reached (S-43). When the controller 19 determines in step 43 (S-43) that the air volume of the constant air volume device 16 is not the normal air volume operation target air volume, the controller 19 returns to step 35 (S-35), and step 35 (S-35). Repeat the procedure from). When the controller 19 determines in step 43 (S-43) that the air volume of the constant air volume device 16 has reached the normal air volume operation target air volume, the controller 19 performs the normal air volume operation in that state as in step 37 (S-37). Implement (S-38).

  The operation mode change system 10A includes a process for increasing the air supply amount of the air conditioner 14, a process for increasing the exhaust air amount of the exhaust fan 15 (exhaust device), and a constant air amount device 16 (air volume) in the second switching operation from the low air volume operation to the normal air volume operation. In the process of increasing the air volume of the change device), when the indoor air pressure of the clean room 11 (air conditioning room) measured by the room pressure sensor 18 reaches the upper limit value of the predetermined specified room pressure, the air supply device 14 temporarily stops increasing the air supply amount When the indoor air pressure in the clean room 11 (air conditioning room) reaches the lower limit value of the predetermined specified room pressure, the exhaust fan 15 is temporarily stopped from increasing the exhaust amount, and the indoor air pressure in the clean room 11 (air conditioning room) is predetermined. When the upper limit value or the lower limit value of the specified room pressure is reached, the constant air volume device 16 temporarily stops the increase in the air volume, so that the room pressure of the clean room 11 becomes the specified room pressure during the second switching operation. Even if the upper limit value or the lower limit value is reached, the indoor pressure can be quickly lowered with respect to the upper limit value of the specified chamber pressure, and the indoor pressure can be quickly exceeded with respect to the lower limit value of the specified chamber pressure. it can.

  The operation mode changing system 10A does not prevent a predetermined amount from being reduced because the pressure difference between the indoor air pressure of the clean room 11 and the reference pressure is small during the second switching operation, and the positive / negative pressure is not reversed. Inadvertent entry of air in the adjacent space into the clean room 11 can be prevented, and contamination of the clean room 11 due to the entry of air in the adjacent space can be prevented.

  The operation mode change system 10A is configured such that the room pressure of the clean room 11 measured by the room pressure sensor 18 is the specified room pressure during the execution of the air supply amount increase stop means, the exhaust amount increase stop means, and the air volume increase stop means in the second switching operation. When the air pressure is lower than the upper limit value or exceeds the lower limit value of the specified room pressure, the air supply device 14 restarts the increase in the supply air amount, the exhaust fan 15 restarts the increase in the exhaust air amount, and the constant air flow device 16 restarts the air flow increase. Therefore, while maintaining the indoor air pressure of the clean room 11 within the range between the upper limit value and the lower limit value of the specified room pressure, it is possible to quickly switch from the low air flow operation to the normal air flow operation, and the operation of the second switching operation The time can be shortened, and an operator can quickly start work in the clean room 11.

  The operation mode change system 10A can quickly shift from an increase in supply amount to a restart in an increase in supply amount, can quickly shift from an increase in stop amount of exhaust to restart of an increase in exhaust amount, Since it is possible to promptly shift to the restart of the increase in the air volume, as compared with the background art shown in FIGS. 15 and 16, as shown in FIGS. 10 (a) and 10 (b), when switching from the low air volume operation to the normal air volume operation. The room pressure of the clean room 11 does not exceed the upper limit value of the specified room pressure, the room pressure does not fall below the lower limit value of the specified room pressure, and the switching time from the low air flow operation to the normal air flow operation is the same as that of the background art. Short compared.

  FIG. 11 is a conceptual configuration diagram of an operation mode change system 10B shown as another example, and FIG. 12 is a conceptual configuration diagram of an operation mode change system 10C shown as another example. FIG. 13A is a graph showing the change over time in the air volume of the constant air volume device 16 in the first switching operation, and FIG. 13B is a graph showing the change over time in the indoor air pressure of the clean room 11 in the first switching operation. It is. FIG. 14A is a graph showing the change over time in the air volume of the constant air volume device 16 in the second switching operation, and FIG. 14B is a graph showing the change over time in the indoor air pressure of the clean room 11 in the second switching operation. It is.

  In the graphs of FIGS. 13A and 14A, the vertical axis represents the air volume of the constant air volume device 16, and the horizontal axis represents the elapsed time. In the graphs of FIG. 13B and FIG. 14B, the vertical axis represents the indoor pressure, and the horizontal axis represents the elapsed time. The procedures of the normal air volume operation, the low air volume operation, and the first and second switching operations in the operation mode change system 10B and the operation mode change system 10C are the same as those of the operation mode change system 10A in FIG. The description of the procedure of each operation is omitted by using the description of the operation mode change system 10A.

  The operation mode change system 10B shown in FIG. 11 includes a first clean room 11a and a second clean room 11b (first to n-th air conditioning rooms), and branches from the main air supply duct 12 and the main air supply duct 12 to the first and The first and second branch air supply ducts 12a and 12b (first to nth branch air supply ducts) connected to the second clean rooms 11a and 11b are provided and branched from the main exhaust duct 13 and the main exhaust duct 13. And first and second branch exhaust ducts 13a and 13b (first to nth branch air supply ducts) connected to the first and second clean rooms 11a and 11b.

  Furthermore, a first constant air volume device 16a installed in the first branch air supply duct 12a and a second constant air volume device 16b (first to nth air volume changing devices) installed in the second branch air supply duct 12b are provided. And a first chamber pressure control motor damper 17a installed in the first branch exhaust duct 13a and a second chamber pressure control motor damper 17b installed in the second branch exhaust duct 13b. A first chamber pressure sensor 18a that measures the room pressure and a second chamber pressure sensor 18b that measures the room pressure of the second clean room 11b are provided. Note that the number of clean rooms is not limited to two, and there may be three or more clean rooms.

  In the operation mode changing system 10B, in the first switching operation, the air volume reduction stop means at a predetermined interval from the first constant air volume device 16a (first air volume changing device) toward the second constant air volume device 16b (nth air volume changing device). And the air volume reduction restarting means is executed in order. As an example, in the first switching operation, the controller 19 performs the first operation after a predetermined time has elapsed (for example, after 20 to 60 seconds have elapsed) after the air volume reduction stop means and the air volume reduction restart means are implemented in the first constant air volume device 16a. 2 The air volume reduction stop means and the air volume reduction restart means are implemented in the constant air volume device 16b. As described above, in the first switching operation, the air volume reduction stopping unit and the air volume reduction restarting unit are sequentially performed from the first constant air volume device toward the nth constant air volume device at predetermined time intervals.

  As another example, in the first switching operation, the controller 19 performs air volume reduction stop means and air volume reduction restart means on the first constant air volume device 16a (first air volume changing device), and then the first constant air volume device 16a. After the air volume reaches the low air volume operation target air volume, or after the air volume of the first constant air volume device 16a reaches 30% to 50% of the low air volume operation target air volume, the second constant air volume device 16b (nth air volume change) Air volume reduction stop means and air volume reduction restart means are implemented in the apparatus. In this way, in the first switching operation, the air volume reduction stop means and the air volume reduction restart means according to the air volume with respect to the small air volume operation target air volume of the immediately preceding constant air volume device from the first constant air volume device toward the nth constant air volume device. Carry out in order.

  In the operation mode change system 10B, in the second switching operation, the air volume increase stop means at a predetermined interval from the first constant air volume device 16a (first air volume changing device) toward the second constant air volume device 16b (nth air volume changing device). And the air volume increase restarting means is carried out in order. As an example, in the second switching operation, the controller 19 performs the first operation after a predetermined time has elapsed (for example, after 20 to 60 seconds have elapsed) after the air volume increase stop unit and the air volume increase restart unit are implemented in the first constant air volume device 16a. 2 The air volume increase stop means and the air volume increase restart means are implemented in the constant air volume device 16b. As described above, in the first switching operation, the air volume increase stop unit and the air volume increase restart unit are sequentially performed from the first constant air volume device toward the nth constant air volume device at predetermined time intervals.

  As another example, in the second switching operation, the controller 19 performs air volume increase stop means and air volume increase restart means on the first constant air volume device 16a (first air volume changing device), and then the first constant air volume device 16a. After the air volume reaches the low air volume operation target air volume, or after the air volume of the first constant air volume device 16a reaches 30% to 50% of the low air volume operation target air volume, the second constant air volume device 16b (nth air volume change) Air volume increase stop means and air volume increase restart means are implemented in the apparatus. As described above, in the second switching operation, the air volume increase stop means and the air volume increase restart means are arranged in accordance with the air volume with respect to the small air volume operation target air volume of the immediately preceding constant air volume device from the first constant air volume device toward the nth constant air volume device. Carry out in order.

  The operation mode change system 11C shown in FIG. 12 includes first to fourth clean rooms 11a to 11d (first to n-th air conditioning rooms), and branches from the main air supply duct 12 and the main air supply duct 12 to first to first The first to fourth branch air supply ducts 12 a to 12 d (first to nth branch air supply ducts) connected to the fourth clean rooms 11 a to 11 d are branched from the main exhaust duct 13 and the main exhaust duct 13. And first to fourth branch exhaust ducts 13a to 13d (first to nth branch air supply ducts) connected to the first to fourth clean rooms 11a to 11d.

  Further, the first to fourth branch air supply ducts 12a to 12d are provided with first to fourth constant air volume devices 16a to 16d (first to nth air volume changing devices), and the first to fourth branch air exhaust ducts are provided. The first to fourth chamber pressure sensors 18a are provided with first to fourth chamber pressure control motor dampers 17a to 17d installed in 13a to 13d, and measure the indoor pressure of the first to fourth clean rooms 11a to 11d. To 18d. In the operation mode changing system 11C, the first and second constant air volume devices 16a and 16b form a first constant air volume device group G1 (first air volume changing device group), and the third and fourth constant air volume devices 16c and 16d are included. A second constant air volume device group G2 (nth air volume changing device group) is formed. The constant air volume device group is not limited to two groups, and there may be three or more groups. Further, the number of constant air volume devices forming the constant air volume device group is not limited, and three or more constant air volume devices (the number of constant air volume devices in each group may not be equal) form one group. Also good.

  In the operation mode change system 10C, in the first switching operation, at a predetermined interval from the first constant airflow device group G1 (first airflow change device group) to the second constant airflow device group G2 (nth airflow change device group). The air volume reduction stopping means and the air volume reduction restarting means are sequentially executed. As an example, in the first switching operation, the controller 19 performs a predetermined amount of time (for example, after 20 to 60 seconds have elapsed) after the air volume reduction stop unit and the air volume reduction restart unit are performed on the first constant air volume device group G1. Air volume reduction stop means and air volume reduction restart means are implemented in the first constant air volume device group G2. As described above, in the first switching operation, the air volume reduction stopping unit and the air volume reduction restarting unit are sequentially performed from the first constant air volume device group toward the nth constant air volume device group at predetermined time intervals.

  As another example, in the first switching operation, the controller 19 implements the air volume reduction stop unit and the air volume reduction restart unit in the first constant air volume device group G1 (first air volume changing device group), and then the first constant air volume device. After the air volume of the group G1 reaches the low air volume operation target air volume or after the air volume of the first constant air volume device group G1 reaches 30% to 50% of the low air volume operation target air volume, the second constant air volume device group G2 Air volume reduction stop means and air volume reduction restart means are implemented in the (n-th air volume change device group). In this way, in the first switching operation, the air volume reduction stop means and the air volume reduction restart are performed in accordance with the air volume with respect to the small air volume operation target air volume of the immediately preceding constant air volume device group from the first constant air volume device group toward the nth air volume device group. The means are carried out in order.

  In the operation mode change system 10C, in the second switching operation, at a predetermined interval from the first constant air volume device group G1 (first air volume change device group) toward the second constant air volume device group G2 (nth air volume change device group). The air volume increase stop means and the air volume increase restart means are executed in order. As an example, in the second switching operation, the controller 19 performs a predetermined time (for example, after 20 to 60 seconds) after the air volume increase stop unit and the air volume increase restart unit are performed on the first constant air volume device group G1. Air volume increase stop means and air volume increase restart means are implemented in the second constant air volume device group G2. As described above, in the first switching operation, the air volume increase stop unit and the air volume increase restart unit are sequentially performed from the first constant air volume device group toward the nth constant air volume device group at predetermined time intervals.

  As another example, in the second switching operation, the controller 19 implements the air volume increase stop unit and the air volume increase restart unit in the first constant air volume device group G1 (first air volume change device group), and then the first constant air volume device. After the air volume (opening) of the group G1 reaches the low airflow operation target airflow (the opening corresponding to the low airflow operation target airflow), or the airflow (opening) of the first constant airflow device group G1 is the low airflow operation target airflow. After reaching 30% to 50% of the (low air volume operation target air volume corresponding opening), the air volume increase stop means and the air volume increase restart means are implemented in the second constant air volume device group G2 (nth air volume change device group). Thus, in the second switching operation, the air volume with respect to the small air volume operation target air volume (the opening corresponding to the low air volume operation target air volume) of the immediately preceding constant air volume device group from the first constant air volume device group toward the nth constant air volume device group. The air volume increase stop means and the air volume increase restart means are sequentially executed according to (opening degree).

  When the 1st-4th constant air volume apparatus 16a-16d is installed in the 1st-4th branch air supply ducts 12a-12d branched from the main air supply duct 12, the 1st-4th constant air volume apparatus 16a-16d When the air volume reduction stopping means and the air volume reduction restarting means are simultaneously performed, or when the air volume increase stopping means and the air volume increase restarting means are simultaneously performed, the first to fourth constant air volume devices 16a to 16d interfere with each other, The duct internal pressures of the main supply duct 12 and the branch supply ducts 12a to 12d may fluctuate greatly, and the indoor air pressures of the clean rooms 11a to 11d may fluctuate greatly. In this case, it is difficult to maintain the room air pressure of the clean rooms 11a to 11d within the range of the specified room pressure even if the air volume reduction stopping unit and the air volume reduction restarting unit are implemented in the first to fourth constant air volume devices 16a to 16d. become.

  However, the operation mode change systems 10B and 10C have a predetermined interval in the first switching operation from the first constant air volume device toward the nth constant air volume device or from the first constant air volume device group toward the nth constant air volume device group. In the second switching operation, the air volume reduction stop means and the air volume reduction restarting means are sequentially performed, or from the first constant air volume device toward the nth constant air volume device or from the first constant air volume device group. Since the air volume increase stop unit and the air volume increase restart unit are sequentially performed at predetermined intervals toward the device group, the first to nth constant airflow devices do not interfere with each other, and the first to nth constant airflow devices. The groups do not interfere with each other, and fluctuations in the duct pressure can be prevented. As a result, the room pressure in the clean room does not fluctuate greatly, and even if the room pressure in the clean room reaches the upper limit value or the lower limit value of the specified room pressure during the first switching operation or the second switching operation, the specified room pressure. The indoor air pressure can be quickly reduced below the upper limit value, the indoor air pressure can be quickly exceeded the lower limit value of the specified room pressure, and the normal air flow operation can be quickly switched to the low air flow operation. Therefore, it is possible to quickly switch from the low air volume operation to the normal air volume operation. As shown in FIGS. 13 and 14, the operation mode change systems 10B and 10C are configured so that the indoor air pressure of the clean room 11 is a specified room when switching from normal air volume operation to low air volume operation or when switching from low air volume operation to normal air volume operation. The upper limit value of the pressure is not exceeded, and the indoor atmospheric pressure does not fall below the lower limit value of the specified room pressure.

  In the operation mode change systems 10A, 10B, and 10C shown in FIGS. 1, 12, and 13, the constant air volume device 16 (first to fourth constant air volume devices 16 a to 16 d) is supplied to the air supply duct 12 (first to fourth branches). Although installed in the air supply ducts 12a to 12d), the constant air volume device 16 (first to fourth constant air volume devices 16a to 16d) is installed in the exhaust duct 13 (first to fourth branch exhaust ducts 13a to 13d). With the chamber pressure control motor damper 17 (first to fourth chamber pressure control motor dampers 17a to 17d) installed in the air supply duct 12 (first to fourth branch air supply ducts 12a to 12d), Each of the means described above in the first and second switching operations can also be implemented.

  In the operation mode change systems 10A, 10B, and 10C shown in FIG. 1, FIG. 12, and FIG. 13, the air conditioner 14 has an air supply amount decrease / stop means, an air supply decrease decrease means, an air supply increase stop means, and an air supply increase. The case where the resuming unit is implemented and the exhaust fan 15 performs the exhaust amount decrease / stop unit, the exhaust amount decrease / restart unit, the exhaust amount increase / stop unit, and the exhaust amount increase / restart unit has been described as an example. An air flow reduction stop means, an air supply amount decrease restart means, an air supply amount increase stop means, and an air supply amount increase restart means are implemented. In some cases, the exhaust amount increase resumption means is not implemented, and the air conditioner 14 does not implement the supply amount decrease stop means, the supply amount decrease restart means, the supply amount increase stop means, and the supply amount increase restart means. The exhaust fan 15 stops the exhaust amount reduction Means, exhaust amount reduction resuming means, the exhaust amount increase stop means, there is a case of implementing the emissions increase resuming means.

10A Operation mode change system 10B Operation mode change system 10C Operation mode change system 11 Clean room (air conditioning room)
11a-11d 1st-4th clean room (1st-nth air-conditioning room)
12 Air supply duct (main air supply duct)
12a to 12d First to fourth branch air supply ducts (first to nth branch air supply ducts)
13 Exhaust duct (main exhaust duct)
13a to 13d First to fourth branch exhaust ducts (first to nth branch exhaust ducts)
14 Air conditioner 15 Exhaust fan (exhaust device)
16 Constant air volume device (air volume changing device)
16a to 16d First to fourth constant air volume devices (first to nth air volume changing devices)
17 chamber pressure control motor dampers 17a to 17d first to fourth chamber pressure control motor dampers 18 chamber pressure sensors 18a to 18d first to fourth chamber pressure sensors 19 controller 21 air supply fan (air supply device)

Claims (11)

An air conditioner that is installed in the air supply duct and supplies air to the air conditioning room, an exhaust apparatus that is installed in the exhaust duct and exhausts air from the air conditioning room, and the air volume of the air supplied to the air conditioning room or the air conditioner An air volume changing device that increases or decreases the air volume of air exhausted from the chamber, a chamber pressure sensor that measures the chamber pressure of the air conditioning chamber, and a controller that controls these devices according to the chamber pressure measured by the chamber pressure sensor, The normal air volume operation performed when using the air-conditioned room, and the air volume supplied to the air-conditioned room and the air volume exhausted from the air-conditioned room are performed when the air-conditioned room is not used. Operation mode change for performing a low air volume operation smaller than the air volume operation and a first switching operation that gradually reduces the air volume using the air volume changing device and switches from the normal air volume operation to the low air volume operation. In the stem,
In the first switching operation, the controller switches the air volume of the air volume changing device from the normal air volume operation target air volume of the normal air volume operation to the low air volume operation target air volume of the low air volume operation. In the process of decreasing the air volume to be decreased, when the indoor air pressure of the air-conditioned room measured by the room pressure sensor reaches an upper limit value or a lower limit value of a predetermined specified room pressure, the air volume reduction device temporarily stops the air volume reduction. When the indoor air pressure of the air-conditioned room measured by the stop means and the room pressure sensor falls below the upper limit value of the specified room pressure or exceeds the lower limit value of the specified room pressure, the air volume reduction stop means is interrupted to An operation mode changing system comprising: an air volume reduction restarting means for causing the air volume changing device to restart air volume reduction.   In the first switching operation, the controller gradually decreases at least one of an air supply amount from the air conditioner and an air exhaust amount from the exhaust device, and an air supply amount from the air conditioner and the The amount of air exhausted from the exhaust device is during the transition from the normal air flow operation target supply / exhaust amount of the normal air flow operation to the low air flow operation target supply / exhaust amount of the low air flow operation, and the air conditioner supplies the air In the process of reducing the supply air amount for reducing the air volume and the exhaust gas amount decreasing process for reducing the air exhaust amount by the exhaust device, the air volume change device causes the air volume change device to temporarily stop the air volume reduction. Performing at least one of an air supply amount reduction stop means for causing the device to temporarily stop an air supply amount reduction and an exhaust amount reduction stop means for causing the exhaust device to temporarily stop an exhaust amount reduction; When the air volume changing device restarts the air volume reduction by the air volume reduction restarting means, the air supply amount reduction restarting means for interrupting the air supply amount decreasing / stopping means and causing the air conditioner to restart the air supply amount decreasing, and the exhaust 2. The operation mode changing system according to claim 1, wherein at least one of exhaust quantity reduction restarting means for interrupting an amount reduction stop means and causing the exhaust device to resume exhaust quantity reduction is implemented.   The operation mode change system according to claim 1 or 2, wherein the controller in the air volume reduction stop unit causes the air volume change device to alternately repeat the stop of the air volume reduction and the restart of the air volume reduction at predetermined time intervals.   The air conditioning chamber is formed of a plurality of first to nth air conditioning chambers, and the air volume changing device branches from the air supply duct and connects to the first to nth air conditioning chambers. Alternatively, the first to n-th air volume changing devices installed in the first to n-th branch exhaust ducts branched from the exhaust duct and connected to the first to n-th air conditioning chambers, and the controller in the first switching operation, 4. The operation mode according to claim 1, wherein the air volume reduction stop unit and the air volume reduction restart unit are sequentially performed at a predetermined interval from the first air volume changing device toward the n-th air volume changing device. Change system.   The air conditioning chamber is formed of a plurality of first to nth air conditioning chambers, and the air volume changing device branches from the air supply duct and connects to the first to nth air conditioning chambers. Or the 1st-nth air volume change apparatus group which grouped the 1st-nth air volume change apparatus installed in the 1st-nth branch exhaust duct branched from the exhaust duct and connected to the 1st-nth air conditioning room In the first switching operation, the controller sequentially executes the air volume reduction stop means and the air volume reduction restart means at a predetermined interval from the first air volume changing device group toward the nth air volume changing device group. The operation mode change system according to any one of claims 1 to 3. An air conditioner that is installed in the air supply duct and supplies air to the air conditioning room, an exhaust apparatus that is installed in the exhaust duct and exhausts air from the air conditioning room, and the air volume of the air supplied to the air conditioning room or the air conditioner An air volume changing device that increases or decreases the air volume of air exhausted from the chamber, a chamber pressure sensor that measures the chamber pressure of the air conditioning chamber, and a controller that controls these devices according to the chamber pressure measured by the chamber pressure sensor, The normal air volume operation performed when the air-conditioned room is used and the air volume supplied to the air-conditioned room or the air volume exhausted from the air-conditioned room are performed when the air-conditioned room is not used. Operation mode change for performing a small air volume operation smaller than the air volume operation and a second switching operation for gradually increasing the air volume using the air volume changing device and switching from the low air volume operation to the normal air volume operation. In the stem,
In the second switching operation, the controller switches the air volume of the air volume changing device from the low air volume operation target air volume of the low air volume operation to the normal air volume operation target air flow of the normal air volume operation. In the process of increasing the air volume, the air volume increase that causes the air volume changing device to temporarily stop the air volume increase when the indoor air pressure measured by the room pressure sensor reaches the upper limit value or the lower limit value of the predetermined specified room pressure. When the indoor air pressure of the air-conditioned room measured by the stop means and the room pressure sensor falls below the upper limit value of the specified room pressure or exceeds the lower limit value of the specified room pressure, the air volume increase stop means is interrupted and An operation mode change system comprising: an air volume increase restarting means for causing the air volume change device to restart an increase in the air volume.   In the second switching operation, the controller gradually increases at least one of an air supply amount from the air conditioner and an air exhaust amount from the exhaust device, and an air supply amount from the air conditioner The amount of air exhausted from the exhaust device is during the transition from the small air volume operation target supply / exhaust amount of the small air amount operation to the normal air amount operation target supply / exhaust amount of the normal air amount operation, and the air conditioner supplies the air In the process of increasing the supply air amount to increase the air volume and the exhaust gas volume increasing process in which the exhaust device increases the exhaust air volume of the air, Performing at least one of an air supply amount increase stop means for causing the device to temporarily stop an increase in air supply amount and an exhaust amount increase stop means for causing the exhaust device to temporarily stop an increase in exhaust amount; In the case where the air volume change device restarts the air volume increase device by the air volume increase restart device, the air flow rate increase restart device interrupts the air supply volume increase stop device and causes the air conditioner to restart the air supply increase. 7. The operation mode change system according to claim 6, wherein at least one of exhaust amount increase restarting means for interrupting the amount increase stop means and causing the exhaust device to restart increasing the exhaust amount is implemented.   8. The operation mode change system according to claim 6, wherein the controller in the air volume increase stop unit causes the air volume change device to alternately repeat the stop of the air volume increase and the restart of the air volume increase at a predetermined time interval.   The air conditioning chamber is formed of a plurality of first to nth air conditioning chambers, and the air volume changing device branches from the air supply duct and connects to the first to nth air conditioning chambers. Alternatively, the first to n-th air volume changing devices installed in the first to n-th branch exhaust ducts branched from the exhaust duct and connected to the first to n-th air conditioning chambers, and the controller in the second switching operation, The operation mode according to any one of claims 6 to 8, wherein the air volume increase stop unit and the air volume increase restart unit are sequentially performed at a predetermined interval from the first air volume changing device to the nth air volume changing device. Change system.   The air conditioning chamber is formed of a plurality of first to nth air conditioning chambers, and the air volume changing device branches from the air supply duct and connects to the first to nth air conditioning chambers. Or the 1st-nth air volume change apparatus group which grouped the 1st-nth air volume change apparatus installed in the 1st-nth branch exhaust duct branched from the exhaust duct and connected to the 1st-nth air conditioning room In the second switching operation, the controller sequentially executes the air volume increase stop means and the air volume increase restart means at a predetermined interval from the first air volume changing device group toward the nth air volume changing device group. The operation mode changing system according to any one of claims 6 to 8. The operation mode changing system according to any one of claims 1 to 10, wherein the air volume changing device is one of a constant air volume device (CAV), a variable constant air volume device (VAV), and a motor damper (MD).

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