JP2009188125A - Green sheet and method for producing green sheet - Google Patents

Abstract

Provided are a green sheet and a method for manufacturing a green sheet, which can draw a high-definition pattern on a drawing surface even when using conductive ink droplets without performing a new surface modification.
A green sheet produced by kneading glass ceramic powder and a binder resin with a dispersion medium to form a kneaded product to be a green sheet 18 by adding a fluorosurfactant and molding the kneaded product. 18 is made liquid repellent. The droplets Fb discharged from the discharge head 30 and landing on the green sheet 18 do not penetrate into the green sheet 18 but remain as droplets on the drawing surface 18a and are evaporated and dried on the drawing surface 18a. A fine wiring pattern with the metal ink F can be drawn on 18a.
[Selection] Figure 5

Description

  The present invention relates to a green sheet and a method for producing the green sheet.

  Low temperature co-fired ceramics (LTCC) technology enables the simultaneous firing of green sheets and metals, and thus can implement a device-embedded substrate incorporating various passive elements between ceramic layers. In the system-on-package (SOP) mounting technology, this element-embedded substrate (hereinafter simply referred to as an LTCC multilayer substrate) is used in order to reduce the parasitic effects that occur in the combination of electronic components and surface-mounted components. The manufacturing method involved has been intensively developed.

  In the manufacturing method of the LTCC multilayer substrate, a drawing process for drawing a pattern such as a passive element or a wiring on each of a plurality of green sheets, a crimping process for laminating a plurality of green sheets having the pattern, and a crimping body, A firing step of batch firing is sequentially performed.

In order to increase the density of various patterns in the drawing process, a so-called ink jet method is proposed in which conductive ink is discharged as fine droplets (for example, Patent Document 1). The ink-jet method uses droplets of several picoliters to several tens of picoliters, and enables pattern miniaturization and narrow pitch by changing the ejection position of the droplets.
JP 2005-57139 A

  By the way, the green sheet is a sheet formed by kneading ceramic particles and a binder resin and then forming them by a doctor blade method, a reverse roll coater method or the like. The binder resin of the green sheet was water repellant but also oleophilic.

  Therefore, when the conductive ink for drawing a pattern such as a wiring is oily, the droplets of the conductive ink landed on the green sheet penetrate into the green sheet and spread without being repelled on the drawing surface. As a result, there is a problem that a fine wiring pattern cannot be drawn with a conductive ink on the drawing surface.

  Therefore, it is conceivable to apply a surface treatment to the green sheet so that the surface of the green sheet is made liquid-repellent by repelling conductive ink by applying a fluorine resin. However, before the wiring pattern is drawn, surface treatment must be performed on each green sheet, which increases the number of processes and lowers the production efficiency.

  The present invention has been made to solve the above-described problems, and its purpose is to draw a high-definition pattern on a drawing surface even when a droplet of conductive ink is used without performing a new surface modification. A green sheet that can be produced and a method for producing the green sheet.

  The green sheet of the present invention is produced by kneading ceramic particles and a binder resin together with a dispersion medium to form a kneaded product, forming the kneaded product into a sheet shape, and a liquid liquid containing conductive fine particles on the sheet surface. A green sheet on which a liquid wiring pattern is drawn by discharging droplets with a discharging means, and a fluorine-based surfactant is kneaded in addition to the ceramic particles and the binder resin.

  According to the green sheet of the present invention, since the fluorosurfactant is added to the binder resin, the green sheet itself becomes liquid repellant, so that the surface treatment for making the surface of the green sheet liquid repellant in a later step Is not required for the green sheet.

  The green sheet of the present invention is produced by kneading ceramic particles and a binder resin together with a dispersion medium to form a kneaded product, forming the kneaded product into a sheet shape, and a liquid liquid containing conductive fine particles on the sheet surface. A green sheet on which a liquid wiring pattern is drawn by discharging droplets by a discharge means, and the binder resin is a fluorine-based resin.

  According to the green sheet of the present invention, since the binder resin is a fluorine-based resin, the green sheet itself becomes liquid repellent. Therefore, in the subsequent step, the surface treatment for making the surface of the green sheet liquid repellent is performed by using the green sheet. There is no need to do this for the sheet.

  Moreover, since the binder resin itself is a fluororesin that exhibits liquid repellency, there is no need to add a material that exhibits liquid repellency when kneading, so the number of kneading materials can be reduced and material management is facilitated. At the same time, the kneading time can be shortened.

In this green sheet, the conductive fine particles contained in the liquid may be metal fine particles.
According to this green sheet, since the liquid droplets containing the metal fine particles are liquid repellent, the liquid droplets containing the metal fine particles do not penetrate into the green sheet and spread. Therefore, a high-definition liquid wiring pattern can be formed.

  The method for producing a green sheet of the present invention is to produce a kneaded product by kneading ceramic particles and a binder resin together with a dispersion medium, forming the kneaded product into a sheet shape, and a liquid containing conductive fine particles on the sheet surface. A method for producing a green sheet in which a liquid wiring pattern is drawn by ejecting body droplets by ejection means, wherein a fluorosurfactant is added to the binder resin and the ceramic particles and kneaded with a dispersion medium The kneaded product was formed.

  According to the method for producing a green sheet of the present invention, when kneading ceramic particles and a binder resin together with a dispersion medium, a liquid-repellent green sheet can be easily produced simply by adding and kneading a fluorosurfactant. In a later step, there is no step for surface treatment for making the surface of the green sheet liquid repellent.

    The method for producing a green sheet of the present invention is to produce a kneaded product by kneading ceramic particles and a binder resin together with a dispersion medium, forming the kneaded product into a sheet shape, and a liquid containing conductive fine particles on the sheet surface. A method for producing a green sheet in which a liquid wiring pattern is drawn by ejecting body droplets by ejection means, wherein the binder resin is a fluororesin, and the fluororesin and the ceramic particles are kneaded together with a dispersion medium Thus, the kneaded product was formed.

  According to the method for producing a green sheet of the present invention, a liquid-repellent green sheet can be produced simply by kneading the binder resin with a fluorine resin and kneading the fluorine resin and ceramic particles together with a dispersion medium. In the process, the surface treatment process for making the surface of the green sheet liquid-repellent is eliminated.

  Moreover, since the binder resin itself is a fluororesin that exhibits liquid repellency, there is no need to add a material that exhibits liquid repellency when kneading, so the number of kneading materials can be reduced and material management is facilitated. At the same time, the kneading time can be shortened.

  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional view of a circuit module comprising a ceramic multilayer substrate manufactured using the manufacturing method of the present invention.

  In FIG. 1, a circuit module 10 includes a low temperature co-fired ceramics (LTCC) multilayer substrate 11 as a ceramic multilayer substrate, and a semiconductor chip 12 connected to the LTCC multilayer substrate 11.

  The LTCC multilayer substrate 11 has a plurality of LTCC substrates 13 stacked. Each LTCC substrate 13 is a sintered body of a green sheet and has a thickness of several tens to several hundreds of μm. Each LTCC substrate 13 is formed with various internal elements 14 such as a resistance element, a capacitive element, and a coil element, and an internal wiring 15 electrically connected to each internal element 14. A via wiring 16 forming a thermal via structure is formed.

  The internal wiring 15 is a sintered body of conductive fine particles, and the wiring pattern is formed on the green sheet 18 that is a precursor of the LTCC substrate 13 by an ink jet method using a conductive ink (metal ink) as a liquid. Is done.

  In FIG. 2, the green sheet 18 is formed on a carrier film 19. The green sheet 18 is a layer made of a glass ceramic composition containing glass ceramic powder, a binder resin, a dispersion medium, and the like. The film thickness of the green sheet 18 is several tens of μm when a capacitor element is formed as the internal element 14, and the film thickness is 100 μm to 200 μm in the other layers.

  The glass ceramic powder is a powder having an average particle diameter of 0.1 μm to 5 μm. For example, a glass composite ceramic obtained by mixing borosilicate glass with ceramic powder such as alumina or forsterite can be used. Further, as the glass ceramic powder, a crystallized glass ceramic using a ZnO—MgO—Al 2 O 3 —SiO 2 type crystallized glass, a BaO—Al 2 O 3 —SiO 2 type ceramic powder, an Al 2 O 3 —CaO—SiO 2 —MgO—B 2 O 3 type ceramic powder, etc. Non-glass-based ceramics using may be used.

  The binder resin is an organic polymer that has a function as a binder of the glass ceramic powder and can be easily removed by being decomposed in a subsequent baking step. As the binder, for example, a binder resin such as butyral, acrylic or cellulose can be used. As the acrylic binder resin, for example, a homopolymer of a (meth) acrylate compound such as alkyl (meth) acrylate, alkoxyalkyl (meth) acrylate, polyalkylene glycol (meth) acrylate, cycloalkyl (meth) acrylate, or the like is used. Can do. Moreover, as an acrylic binder resin, it can be obtained from a copolymer obtained from two or more of the (meth) acrylate compounds, or from other copolymerizable monomers such as (meth) acrylate compounds and unsaturated carboxylic acids. Can be used.

  The binder resin may contain a plasticizer such as adipic acid ester plasticizer, dioctyl phthalate (DOP), dibutyl phthalate (DBP) phthalic acid ester plasticizer, glycol ester plasticizer.

  Furthermore, in this embodiment, a fluorine-based surfactant is added to the binder resin and ceramic particles, and the binder resin and ceramic particles to which the fluorine-based surfactant is added are kneaded with a dispersion medium.

  Examples of the fluorine-based resin include fluorine-containing polyimide resin, polytetrafluoroethylene (PTFE), ethylene-4 fluoroethylene copolymer, hexafluoropropylene-4 fluoroethylene copolymer, and polyvinylidene fluoride (PVdF). And ethylene, acrylate, methacrylate, vinyl, urethane and silicone polymers having a long-chain perfluoroalkyl structure such as poly (pentadecafluoropeptylethyl methacrylate) (PPFMA) and poly (perfluorooctylethyl acrylate). it can.

  Examples of the fluorine-based surfactant include fluorine-based nonionic surfactants having a fluoroalkyl structure, a perfluoroalkyl structure, and a perfluoroalkyl ether structure in a lipophilic group. Moreover, a cationic surfactant, an anionic surfactant, and an amphoteric surfactant can be used. A silane coupling agent or titanium coupling agent having a methoxy group, ethoxy group, or halogen group as a hydrophilic group can also be used as a surfactant. Representative fluorosurfactants include ZONYL FSN and FSO manufactured by DuPont, Surflon S-141 and 145 manufactured by Asahi Glass Co., Ltd., Megafac F-141 and 144 manufactured by Dainippon Ink and Chemicals, Neos ( Examples include FUTAGEND F-200 and F251 manufactured by Daikin Industries, Ltd., Unidyne DS-401 and 402 manufactured by Daikin Industries, Ltd., and FLORARD FC-170 and 176 manufactured by 3M Corporation.

  As a dispersion medium, the glass ceramic powder is uniformly dispersed so as to obtain a complete solution of the binder resin, and the solvent can be evaporated by applying a relatively low level of heat at atmospheric pressure. Is selected to obtain sufficiently high volatility. For example, acetone, xylene, methanol, ethanol, isopropanol, methyl ethylene ketone, ethyl acetate, 2,2,4-triethylpentanediol-1,3-monoisobutyrate, toluene and fluorocarbons can be used. A particularly preferred solvent is ethyl acetate.

  The green sheet 18 is kneaded into a slurry by adding glass ceramic powder, a binder resin, a fluorosurfactant and a dispersion medium. Thereby, the surface of glass ceramic powder and binder resin is coat | covered with the film | membrane of a fluorine-type surfactant. This slurryed glass ceramic composition (kneaded material) is applied onto the carrier film 19 using a sheet forming method such as a doctor blade method or a reverse roll coater method, and the coated film is dried to a state where it can be handled. It is obtained by doing.

  The carrier film 19 is a film for supporting the green sheet 18 in the drawing process and the drying process. For example, a plastic film excellent in peelability from the green sheet 18 and mechanical resistance in each process can be used. As the carrier film 19, for example, a polyethylene terephthalate film, a polyethylene naphthalate film, a polyethylene film, or a polypropylene film can be used.

  Therefore, since the green sheet 18 to which the completed carrier film 19 is pasted is kneaded by adding a fluorosurfactant when the glass ceramic powder and the binder resin are kneaded, the surface of the glass ceramic powder and the binder resin is a fluorochemical interface. Since it is coated with an activator, it is oil repellent and repellent.

FIG. 3 shows a droplet discharge device 20 that draws a wiring pattern for forming the internal wiring 15 on a drawing surface 18 a as a sheet surface of the green sheet 18. The droplet discharge device 20 has a base 21 formed in a rectangular parallelepiped shape. A pair of guide grooves 22 extending along the longitudinal direction (Y arrow direction) is formed on the upper surface of the base 21. Above the guide groove 22, a stage 23 that moves along the guide groove 22 in the Y arrow direction and the counter-Y arrow direction is provided. The stage 23 places the green sheet 18 having the carrier film 19 attached to the back surface before firing on the top surface thereof.

  A rubber heater H as a heating means is disposed on the upper surface 23a of the stage 23. The green sheet 18 placed on the stage 23 is heated to a predetermined temperature by the rubber heater H. The green sheet 18 placed on the stage 23 is positioned and fixed with respect to the stage 23 and transports the green sheet 18 in the Y arrow direction and the counter-Y arrow direction.

  As shown in FIG. 3, a gate-type guide member 25 is installed on the base 21 so as to straddle a direction orthogonal to the Y arrow direction (X arrow direction). On the upper side of the guide member 25, an ink tank 26 extending in the direction of the arrow X is disposed. The ink tank 26 stores the metal ink F (see FIG. 5) as a liquid, and the stored metal ink F is applied to a liquid droplet discharge head (hereinafter simply referred to as a discharge head) 30 as discharge means at a predetermined pressure. Supply. The metal ink F supplied to the ejection head 30 is ejected from the ejection head 30 toward the green sheet 18 as droplets Fb (see FIG. 5).

As the metal ink F, a dispersion metal ink in which metal fine particles as conductive fine particles, for example, metal fine particles having a particle size of several nm are dispersed in a solvent can be used.
Examples of the metal fine particles used in the metal ink F include gold (Au), silver (Ag), copper (Cu), aluminum (Al), palladium (Pd), manganese (Mn), titanium (Ti), and tantalum ( In addition to materials such as Ta) and nickel (Ni), these oxides and superconductor fine particles are used. The particle diameter of the metal fine particles is preferably 1 nm or more and 0.1 μm or less. If it is larger than 0.1 μm, the discharge nozzle N of the discharge head 30 may be clogged. On the other hand, if it is smaller than 1 nm, the volume ratio of the dispersant to the metal fine particles increases, and the ratio of the organic matter in the resulting film becomes excessive.

The dispersion medium is not particularly limited as long as it can disperse the metal fine particles and does not cause aggregation. For example, in addition to an aqueous dispersion medium, alcohols such as methanol, ethanol, propanol, butanol, etc., n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, Hydrocarbon compounds such as tetrahydronaphthalene, decahydronaphthalene, cyclohexylbenzene, and polyols such as ethylene glycol, diethylene glycol, triethylene glycol, glycerin, 1,3-propanediol, polyethylene glycol, ethylene glycol dimethyl ether, ethylene glycol diethyl ether , Ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene Glycol methyl ethyl ether, 1,2-dimethoxyethane, bis (2-methoxyethyl) ether, ether compounds such as p-dioxane, propylene carbonate, γ-butyrolactone, N-methyl-2-pyrrolidone, dimethylformamide, dimethyl Examples include polar compounds such as sulfoxide, cyclohexanone, and ethyl lactate. Among these, water, alcohols, hydrocarbon-based compounds that are oil-based dispersion media, and ether-based compounds are used in terms of the dispersibility of the fine particles, the stability of the dispersion, and the ease of application to the droplet discharge method. More preferable examples of the dispersion medium include water and hydrocarbon compounds that are oil-based dispersion media.

  The guide member 25 is formed with a pair of upper and lower guide rails 28 extending in the X arrow direction over substantially the entire width in the X arrow direction. A carriage 29 is attached to the pair of upper and lower guide rails 28. The carriage 29 is guided by the guide rail 28 and moves in the X arrow direction and the counter X arrow direction.

  A support plate 29A provided on the lower side of the carriage 29 is disposed in parallel with the stage 23, and a droplet discharge head 30 is attached to the support plate 29A. As shown in FIG. 4, the droplet discharge head 30 includes a head substrate 31 fixed to the support plate 29A so as to extend in the Y direction, and a head fixed to the head substrate 31 so as to extend in the Y direction. Main body 30A.

  The head substrate 31 is positioned and fixed to the support plate 29A. That is, as shown in FIG. 5, in the droplet discharge head 30, the discharge head main body 30A is passed through the through hole 32 penetrating the support plate 29A from the upper surface 29Aa of the support plate 29A, and the discharge head main body 30A is supported by the support plate 29A. It protrudes from the lower surface 29Ab. Then, with the ejection head body 30A protruding from the lower surface 29Ab of the support plate 29A, the upper surface 29Aa of the support plate 29A and the head substrate 31 are fixedly fixed, whereby the droplet ejection head 30 is supported and fixed to the support plate 29A. The Accordingly, the droplet discharge head 30 moves in the X direction together with the carriage 29.

  As shown in FIG. 5, the discharge head main body 30A is provided with a nozzle plate 33 on the lower side thereof. The lower surface (nozzle forming surface 33a) of the nozzle plate 33 is formed substantially parallel to the upper surface (drawing surface 18a) of the green sheet 18. The nozzle plate 33 holds the distance (platen gap) between the nozzle forming surface 33a and the drawing surface 18a at a predetermined distance (for example, 600 μm) when the green sheet 18 is positioned immediately below the ejection head 30.

  In FIG. 4, on the nozzle forming surface 33a, a nozzle row composed of a plurality of nozzles N arranged along the direction of the arrow Y is formed. In the nozzle row, 180 nozzles N are formed per inch.

  In FIG. 5, a supply tube 30 </ b> T is connected to the upper side of the discharge head 30. The supply tube 30T is disposed so as to extend in the Z arrow direction, and supplies the metal ink F from the ink tank 26 to the ejection head 30.

  On the upper side of each nozzle N, a cavity 34 communicating with the supply tube 30T is formed. The cavity 34 accommodates the metal ink F from the supply tube 30T and supplies the metal ink F to the corresponding nozzle N.

  A vibration plate 35 is attached to the upper side of the cavity 34 to vibrate in the vertical direction and expand and contract the volume in the cavity 34. A piezoelectric element PZ corresponding to the nozzle N is disposed on the upper side of the diaphragm 35. The piezoelectric element PZ contracts and expands in the vertical direction to vibrate the diaphragm 35 in the vertical direction. The vibration plate 35 that vibrates in the vertical direction causes the metal ink F to be ejected from the corresponding nozzle N as a droplet Fb of a predetermined size. The discharged droplet Fb flies in the direction opposite to the arrow Z of the corresponding nozzle N and lands on the drawing surface 18 a of the green sheet 18.

  Then, the green sheet 18 and the discharge head 30 move relative to each other in the surface direction of the drawing surface 18a, and a plurality of droplets Fb from the nozzle N land on the drawing surface 18a to draw the liquid wiring pattern PL on the drawing surface 18a. To do.

  At this time, the droplet Fb of the metal ink F that has landed on the drawing surface 18a does not penetrate into the green sheet 18 and remains as a droplet on the drawing surface 18a because the green sheet 18 is liquid repellent. . The droplet Fb remaining on the drawing surface 18a evaporates a part of the solvent or the dispersion medium from the surface side. At this time, since the green sheet 18 is heated by the rubber heater H, evaporation of the solvent or the dispersion medium is promoted.

  The droplet Fb of the metal ink F that has landed on the green sheet 18 thickens from the outer edge of the surface as it dries, that is, the solid content (particle) concentration in the outer peripheral portion is faster than the central portion and reaches the saturated concentration. Therefore, it thickens from the outer edge of the surface. The droplet Fb of the metal ink F with thickened outer edge stops its own wetting and spreading along the surface direction of the green sheet 18 (pinning). Even when the pinned droplet Fb of the metal ink F is fixed to the green sheet 18 and repeatedly hit, it is fixed to the green sheet 18 and the outer diameter of the droplet Fb does not change. , It is not attracted to the next droplet Fb. As a result, a high-definition liquid wiring pattern PL can be formed.

  Further, since the temperature of the green sheet 18 is heated to a predetermined drawing temperature, the liquid wiring pattern PL is thickened by evaporation of part of the dispersion medium so that wetting and spreading along the drawing surface 18a is suppressed. It has become.

  If the predetermined drawing temperature becomes excessively high, the carrier film 19 and the green sheet 18 are thermally deformed, and the landing accuracy of the droplets Fb is impaired. Therefore, the predetermined drawing temperature is, for example, 40 ° C. to 80 ° C., and is appropriately selected according to the composition of the green sheet 18 and the composition of the metal ink F so that the landing accuracy of the droplet Fb can be sufficiently secured. .

  Then, when the liquid wiring pattern PL is formed on the drawing surface 18a of the green sheet 18 by the droplet discharge device 20, the process proceeds to a drying step, and the liquid wiring pattern PL is changed to a dry wiring pattern. Thereafter, the LTCC multilayer substrate 11 is manufactured by laminating and pressing a plurality of green sheets 18 having a dry wiring pattern, and firing the press-bonded body at once.

Next, effects of the embodiment configured as described above will be described below.
(1) According to the above embodiment, when making a kneaded product that becomes the green sheet 18 by kneading the glass ceramic powder and the binder resin with the dispersion medium, the fluorosurfactant was added and kneaded. Therefore, the green sheet 18 made by molding the kneaded product becomes liquid repellent. As a result, the droplet Fb discharged from the discharge head 30 and landing on the green sheet 18 does not penetrate into the green sheet 18 but remains as a droplet on the drawing surface 18a, and is evaporated and dried on the drawing surface 18a. Thus, a fine wiring pattern with the metal ink F can be drawn on the drawing surface 18a.

  (2) Moreover, according to the above embodiment, the liquid repellency of the green sheet 18 is such that the glass-ceramic powder and the binder resin are kneaded with a dispersion medium to form a kneaded product that becomes the green sheet 18. It can be easily expressed simply by adding an activator and kneading. Therefore, it is not necessary to individually perform the surface treatment for making the surface liquid-repellent for each of the completed green sheets as in the prior art. As a result, the liquid repellent green sheet 18 can be produced efficiently.

In addition, you may change the said embodiment as follows.
In the above embodiment, the glass ceramic powder and the binder resin are kneaded with the dispersion medium, and when the kneaded product is made, a fluorosurfactant is added and kneaded to make the kneaded product that becomes the green sheet 18. Then, the green sheet 18 made from the kneaded material was made to be liquid repellent to repel the droplet Fb of the metal ink F.

This may be performed by replacing the binder resin itself with a fluorine-based resin.
Also in this case, the green sheet 18 becomes liquid repellent to repel the droplet Fb of the metal ink F, and a high-definition wiring pattern can be formed. Similarly to the above-described embodiment, since it is not necessary to individually perform surface treatment for making the surface liquid-repellent for each of the completed green sheets, the liquid-repellent green sheet 18 is not necessary. Can be produced efficiently.

  Moreover, since the binder resin itself is a fluororesin that exhibits liquid repellency, there is no need to add a special material that exhibits liquid repellency when kneading, so the number of kneading materials can be reduced, and material management is easy. And the kneading time can be shortened.

  In the above embodiment, the glass ceramic powder and the binder resin are kneaded with the dispersion medium, and when the kneaded product is made, a fluorosurfactant is added and kneaded to make the kneaded product that becomes the green sheet 18. This may be first kneaded with a binder resin and a fluorosurfactant, and then glass glass powder may be added and kneaded to produce a green sheet.

Sectional drawing which shows a circuit module. Sectional drawing explaining a green sheet. The perspective view of a droplet discharge device. The perspective view seen from the downward direction of a droplet discharge head. The principal part sectional side view of a droplet discharge head.

Explanation of symbols

  F: Metallic ink, Fb: Liquid droplets, PL: Liquid wiring pattern, 11: Ceramic multilayer substrate, 18: Green sheet, 18a: Drawing surface, 20: Liquid droplet ejection device, 30: Liquid droplet ejection head.

Claims (5)

Ceramic particles and binder resin are kneaded together with a dispersion medium to produce a kneaded product. The kneaded product is formed into a sheet shape, and liquid droplets containing conductive fine particles are ejected onto the sheet surface by ejection means. A green sheet on which a liquid wiring pattern is drawn,
A green sheet in which a fluorine-based surfactant is kneaded in addition to the ceramic particles and the binder resin. Ceramic particles and binder resin are kneaded together with a dispersion medium to produce a kneaded product. The kneaded product is formed into a sheet shape, and liquid droplets containing conductive fine particles are ejected onto the sheet surface by ejection means. A green sheet on which a liquid wiring pattern is drawn,
A green sheet characterized in that the binder resin is a fluorine-based resin. In the green sheet according to claim 1 or 2,
The green sheet, wherein the conductive fine particles contained in the liquid are metal fine particles. Ceramic particles and binder resin are kneaded together with a dispersion medium to produce a kneaded product. The kneaded product is formed into a sheet shape, and liquid droplets containing conductive fine particles are ejected onto the sheet surface by ejection means. A method for producing a green sheet on which a liquid wiring pattern is drawn,
A method for producing a green sheet, comprising adding a fluorine-based surfactant to the binder resin and the ceramic particles, and kneading together with a dispersion medium to form the kneaded product. Ceramic particles and binder resin are kneaded together with a dispersion medium to produce a kneaded product. The kneaded product is formed into a sheet shape, and liquid droplets containing conductive fine particles are ejected onto the sheet surface by ejection means. A method for producing a green sheet on which a liquid wiring pattern is drawn,
A method for producing a green sheet, wherein the binder resin is a fluororesin, and the fluororesin and the ceramic particles are kneaded together with a dispersion medium to form the kneaded product.

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