GB1290240A - - Google Patents
Info
- Publication number
- GB1290240A GB1290240A GB1290240DA GB1290240A GB 1290240 A GB1290240 A GB 1290240A GB 1290240D A GB1290240D A GB 1290240DA GB 1290240 A GB1290240 A GB 1290240A
- Authority
- GB
- United Kingdom
- Prior art keywords
- magnetic
- unit
- polepieces
- compensator
- flux
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 abstract 8
- 230000004907 flux Effects 0.000 abstract 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 2
- 238000010276 construction Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000005294 ferromagnetic effect Effects 0.000 abstract 1
- 239000003302 ferromagnetic material Substances 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 239000000696 magnetic material Substances 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Abstract
1290240 Electron beam electromagnetic focusing apparatus HITACHI Ltd 10 June 1970 [13 June 1969] 28237/70 Heading H1D A magnetic electron lens suitable for an electron microscope comprising polepieces 4 and 5 within an exciting coil 1<SP>1</SP> enclosed within a peripheral iron cover 1 and upper and lower magnetic path units 2 and 3 respectively has an adjustable magnetic piece 8, e.g. ferromagnetic in contact with the lower magnetic path unit 3 to centre the beam by compensating for effects of magnetic flux leakage. The polepieces are separated by a non-magnetic spacer 5<SP>1</SP> and the annular compensating piece 8 provides a path parallel to the magnetic path unit 3 for the magnetic flux B. Various alternative embodiments are given. In Fig. 3 (not shown) air gap (9) in unit 3 ensures most flux passes through compensator (10); in Fig. 4 (not shown), compensator (11) has a structure extending below as well as above unit 3 to prevent outward flow of flux in the air gap; and in Fig. 5 (not shown) the coil bobbin has an inner wall of non-magnetic material A 3 adjacent the polepieces and upper and lower portions of ferromagnetic material A 1 , A 2 , where the lower portion is adjustable by screws 7. Fig. 6 (not shown) discloses a further construction wherein a portion only of the lower surface of compensator (12) contacts unit 3.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5507769 | 1969-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1290240A true GB1290240A (en) | 1972-09-20 |
Family
ID=12988624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1290240D Expired GB1290240A (en) | 1969-06-13 | 1970-06-10 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3643191A (en) |
| GB (1) | GB1290240A (en) |
| NL (1) | NL147280B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4178094A (en) * | 1978-09-01 | 1979-12-11 | Xerox Corporation | Belt support and steering module |
| FR2491258A1 (en) * | 1980-09-29 | 1982-04-02 | Le N Proizv | Opto-electronic system for electron microscope - has lenses formed around single magnetic core with annular grooves |
| US4698611A (en) * | 1986-12-03 | 1987-10-06 | General Electric Company | Passive shimming assembly for MR magnet |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB680300A (en) * | 1950-02-23 | 1952-10-01 | Vickers Electrical Co Ltd | Improvements relating to magnetic electron lenses |
| US2637000A (en) * | 1951-02-15 | 1953-04-28 | Magnetic electron -lens |
-
1970
- 1970-06-10 GB GB1290240D patent/GB1290240A/en not_active Expired
- 1970-06-10 US US44935A patent/US3643191A/en not_active Expired - Lifetime
- 1970-06-11 NL NL707008534A patent/NL147280B/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NL7008534A (en) | 1970-12-15 |
| US3643191A (en) | 1972-02-15 |
| NL147280B (en) | 1975-09-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |