DE1522775C - Device for aligning and contact copying of geometric patterns of a template on semiconductor wafer - Google Patents

Description

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The invention relates to a device to be in contact ', it is carried out while

Alignment and contact copying of minute geo- the two surfaces in adjacent, one-

metric patterns of a template lie on one another on separate levels. This is done under

existing pattern on the surface of a semi-microscopic observation, being usually a

conductor plate to make additional electrical sound- 5 high-performance stereo microscope is used to

processing components and electrodes on the sheet - the remote areas of the

chen to arrange, with a jig for both geometric patterns to control so

the leaflet, a frame to carry this ensures that the entire images

Jig, one also in the frame, both areas in complete correspondence

Scha- ίο attached under the jig with respect to right-angled and polar coordinates

bearing arrangement and a micro-adjustment mechanism.

direction to the jig in a Since the depth of field of a high performance microhorizontal Level in relation to the stencil skopes is relatively small - it is close to to be able to adjust precisely. about two to three thousandths of an inch - they have to

In the manufacture of transistors and micro-15 two levels to be observed (the level of the circuit arrangements, it is common to use electrodes stencil grid and the level of the flake and other microelectronic components for surface) exactly in parallel and with a very small transistor and microcircuit through Openings are kept spaced from each other (less than to evaporate or atomize the film a thousandth of an inch) so that the two over or layers are etched away, which previously 20 superposed, geometric patterns beneath the photochemically on the surface of such an enlargement with each other let compare. Closing semiconductor wafer or a plate applied must be borrowed funds to be provided after. In the case of a simple transistor, the two patterns are exactly superimposed to maintain up to four, in the case of a microcircuit set exact alignment, arrangement of about 25 individually applied photo-25 to enable a control of the two patterns, sensitive layers one after the other from the main - if they are transferred to a template in preparation for "" der.Kontaktkopie in order to transfer the final semiconductor mutual contact position,
to produce coating. Each stencil- Furthermore, the actual photographic pattern must be carried out while maintaining the utmost alignment- Transfer of the image from the stencil to the precision by contact copying onto the immediately 30 semiconductor wafer under conditions, previous pattern or element on the semi-photographic images of constant quality printed circuit board be transmitted. The individual allow, so that reproductions on one area can, for example, have dimensional limits, other leaflets can be produced, which do not exceed a few ten thousandths of an inch equally equal amounts are separated. The problems of moderate image quality of the reproduction achieved during production can easily be demonstrated. This requires a precise optical axis of the: During successive evaporation exposure lamp system, and the use of a capacitor on a microcircuit with equal exposure times. The latter assumes that a position with superimposed layers and a 40 that a uniform and constant sealing dielectric takes place between them, a rectangular position can be generated. In addition, it is emergency use, which has a size of about a thousand turns, during all phases of the contact copying part by two thousandths of an inch, without the process, the planes of the two surfaces thereby, the plates with one another or with one adjacent perpendicular to the axis of the microscope and the optic electrode may come into contact. 45 see axis to keep the lighting system.

The details of the patterns are usually on. An arrangement is already known to be used

the surface of highly polished, optically flat main - a contact copying process that photo-sensitive

stencils made of glass or reticulated glass

drawn, ■ etched or microphotographed. align as long as the two faces do not meet each other

Touch the 50 during photographic transfer to ensure that it is in alignment

Bring the basic pattern from the stencil to the surface in firm contact with one another. This

of the semiconductor die, the surfaces need to be in alignment, however, is particularly useful for copying

intimate contact to each other, to distort large areas and the achievable with them

or to exclude other deviations. Before setting accuracy is required for the production of trans-

the contact copy can take place, however, it is 55 sistors. or microcircuit arrangements inaccessible.

initially required, the two surfaces reaching one another.

align so that the superimposed It is therefore the object of the invention to provide a

Surface patterns correspond exactly to one another. To create a special device that allows precise alignment

Their care must be used to provide the template with an orientation pattern

pattern with the geometric areas that are already 60 stencil with respect to a corresponding

are arranged on the semiconductor wafer, in the patterned surface of a semiconductor wafer

Bring overlay. This alignment and the bringing of both surfaces into contact

takes place by relative displacement of the two upper exposures to produce a contact copy enabled

surfaces to each other, whereby this shift is not clear.

only along XY-65 positioned at right angles to one another. This object is achieved according to the invention by

Axes, but also takes place around a polar axis. a path on an inclined plane, through one

Since the exact alignment of the pattern is not on the inclined plane movable part, by

lets reach while the surfaces interlock a carriage that rests on the surface of the part

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is displaceable, through a self-aligning FIG. 21 a sectional view along the line 21-21

Ball joint clamping device, which the clamping of Fig. 19,

device in the carriage carries by a drive F i g. 22 is a sectional view taken along line 22-22

device to move the wedge up the inclined plane - Fig. 19,

close and through an exposure arrangement. 5 F i g. 23 is a sectional view taken along line 23-23

With the aid of the device according to the invention, FIG. 19,

it is possible to use the pattern of a stencil and the fig. Figure 24 is a sectional view taken along line 24-24

Surface of a semiconductor wafer exactly one on top of the other. 19, ■

to align them with one another, then put them in a close opposed position. Figure 25 is a sectional view taken along line 25-25

to lead mutual contact and then via io of FIG. 2,

to expose the whole area evenly. Figure 26 is a sectional view taken along line 26-26

The invention is illustrated below with reference to one of FIGS.

Embodiment explained in more detail. It shows F i g. 27 is a sectional view taken along line 27-27

F i g. 1 is a front elevation, partly in section, of one of FIGS. 26,

Template alignment and clamping device for 15 F i g. 28 is a sectional view taken along line 28-28

Alignment and contact copy of geometrical patterns Fig. 25,

ster on the surface of a semiconductor arrangement, Fig. 29 is a schematic circuit diagram of the electrical

FIG. 2 shows a plan view of the device.

long the line 2-2 of FIG. 1, Fig. 4a a sectional view along the line 4a-4a

F i g. 3 is a sectional view taken along line 3-3 20 of FIG. 4,

of Fig. 1, Fig. 9a a plan view of the leaflet and

F i g. Figure 4 is a sectional view taken along line 4-4 of the stencil pattern enlarged through a

of Fig. 1, partial image microscope.

F i g. 5 is a sectional view taken along line 5-5. In the drawings, like references

the F i g. 4, 25 characters on equal parts. The contact copy scheme

F i g. Figure 6 is a cross-sectional view taken along line 6-6 "Alignment Device" consists of a first

of Fig. 1, frame, indicated generally at A , one

F i g. 7 is a schematic side elevation showing the whole of the basic assembly B, consisting of a ·. leaning

generally the first step in the opera level for the vertical back and forth movement of a

tion sequence shows, and which the lifting device 3 ° semiconductor wafer in and out of surface contact

for the inclined plane, with a template M, a leaflet clamping

F i g. Fig. 8 is a schematic view showing the device C, a stencil support assembly D, second operation in the sequence of a micro-adjuster E, for the precise straight-line mechanism of the inclined plane wherein the linear adjustment of the leaflet jig clamps leaflets against the stencil is to align the 35 device in a horizontal plane, a microscope superposed surfaces in a parallel arrangement F, to compare the position of the Scha planes,. flower pattern in relation to the leaf pattern

F i g. 9 is a schematic view showing the third under high-power magnification, an exposure step in the work sequences, wherein the shutter assembly G and a drive device H for the surface of the leaf and leaf from one another automatically actuate the movement of the separator in the immediate vicinity of one another and Driving up the inclined plane. The first are and the planes are held parallel to each other. Steps in the sequence of operations can be made so that the patterns of the leaflet with respect to FIGS. 7, 8, 9 and 13 can best be seen. After exactly on the XY and polar axes with the template Fig. 7, the template M mounted in a holder can be aligned, 45 inserted into a support arrangement D , and by means of

10 is a sectional view taken along line 10-10 of a vacuum clamped in a reference plane;

the F i g. 3, V which the basic arrangement B of the inclined plane over-

Fig. Figure 11 is a sectional view taken along line 11-11. The leaflet W is by means of a vacuum

the F i g. 3-, "'on the head of a ball clamping device 70

F i g. 12 is a sectional view along line 12-12 50 clamped as a universal joint in cart 40

the F i g. 3, is supported. The carriage 40 can be mounted on a wedge 30

Fig. 13 is a perspective view of the shawl sliding in the horizontal direction. According to F1 g. 8 will

blonenhalterers, the wedge 30 by means of the drive device H the

F i g. 14 shows a sectional view taken along the line 14-14 of the inclined plane until the leaflet W of FIGS. 3, 55 comes into pressure contact with the stencil M.

15 is a sectional view taken along line 15-15 when the plane-parallel connection of the surfaces

of Fig. 14, 'is completed (the ball joint has self-aligning

Fig. 16 a sectional view along the line 16-16 device) a lowering device 7 pulls the wedge 30 automatically

of Fig. 14, downwardly by a small amount in the direction of

17 is an exploded perspective view 60 of the inclined plane base assembly so that the

an exposure housing and the associated stencil and leaf pattern are separated

Drive mechanism,, and now in directly adjacent parallel planes Fig. 18 is a sectional view taken along line 18-18 (see Fig. 9). The two patterns are now

of Fig. 2, by the micro-adjusting device E and the rotary

Fig. 19 is a sectional view taken along line 19-19 65 setting the carriage in accordance with

of Fig. 18,. . . '.' ,. ' other brought (see Fig. 13). After that, the

Fig. 20 shows a sectional view along the line 20-20 lowering / releasing, whereby the two samples tested on the opposite side of FIG. 19 are in pressure contact

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come together, through which the contact copy of the wedge 30 a strip-shaped magnet 33 is prepared. that is supported by the weight of the wedge. The frame A contains a solid foundation in the running rail 32 in sliding contact with the balls 25 in the form of a workbench which is intended to pull the sliding shoe 22. Immediately next to the complete contact copy alignment device 5 upper surface of the wedge 30 is horizontally next to hold the left at a comfortable, upper table level. Running rail 31 is a strip-shaped and the instrument is arranged against vibrations and impact magnet 34, which stabilize the wedge and the to it. As can be seen in FIGS. 1, 2 and 4, the balls 24 of the sliding shoe 21 between them, the base arrangement B, which in sliding contact with the vertically arranged path 17 essentially consists of the frame itself, rests on 10, the latter at right angles to the rail 16 the upper part of the workbench and can, if it is arranged. The strip-shaped magnets 33 desires to be attached thereto by conventional bolts. and 34 cooperate to prevent tilting of the base assembly B includes a large, cast wedge 30 when it is in the longitudinal pedestal 10 on which the rest of the device is mounted along the path of the inclined plane. A channel 20 of the inclined plane 15 is moved easily sliding by means of the intermediate extends in the longitudinal direction between a left ball sliding shoe,
and a right platform 12, 14 through the post-On the upper surface of the wedge 30, near -ment 10. Both the channel 20 and the upper of its rear edge, a stop 35 is attached (cf. surfaces of the platform 12 and 14 is mechanically Figs. 4 and 7). From the rear edge of the machined and ground in relation to one another, around 20 wedges 30 protrudes a hanging pin 36 attached to it, preparatory basic reference planes for the alignment, on which one end of a spiral spring 37 forms operations. is suspended, the other end of which is connected to an on-the-bottom of the channel 20 is connected to the side by hanging pin 41, which protrudes downward from other separate rails 16 and 18 by means of the carriage 40. As the F i g. 7 unscrewing 19 attached, which lets take in cylindrical 25 therein, normally pulls the tension of the recessed openings. The rails spiral spring 37 the carriage 40 in touch contact 16 and 18 rise from the front edge to the rear with the stop 35 on the wedge 30. In the front edge of the channel 20 at an angle of 10 °. Wall of the wedge 30 a pivot pin 38 is attached, the wedge 30 slides on the inclined plane protrudes horizontally from this and on its rails formed by the inclined plane in front of the rear wall 30 points.

. The pivot pin 38 is by means of a coil spring 39

do £ H is powered. The upper and lower surfaces of the wedge 30 with an arm 282 of the drive device H are ground and are bonded, whereby the rear wall of the wedge 30 is pressed lightly against a roller 281 one above the other so that they form an angle. As can be seen precisely from the inclination of the path of the oblique 35 in FIG. 4, a movement corresponds to plane 20. On the upper surface of the drive arm 100 from right to left the wedge 30 is slidably disposed a carriage 40, wedge slider 30 the path 20 of the inclined plane in which the leaflet clamping device carries. same direction upwards. The carriage 40 follows in order to reduce the friction during the back and forth strokes of the wedge until it comes into contact movement of the wedge within the path of 40 with a transversely extending part 100 of the inclined plane 20, are between the micro-adjustment device E got. From this lower running rails 31 and 32 of the wedge and the point in time, any further backward movement pulls the corresponding rails 16 and 18 ball sliding shoes of the wedge 30, the stop 35, provided against the force of 21 and 22 (see. Fig. 1, 4 and 5). The spring 37 out of contact with the carriage 40. When the sliding shoe 21 has an L-shaped cross-section 45 the advancing rear edge of the carriage 40 and has a pair of legs which are essentially perpendicular to one another in operative contact with the micro-adjustment device. Immediately device E is reached, of course, next to each end of the horizontal leg, further advancement of the wedge causes a simple plastic Augringe, in which balls are held rotatably along a pure, vertical 23 because of the carriage, whereas in a similar 5 "axis. Correspondingly, when the wedge 30 is mounted in close proximity to each end of the vertical by a small amount the channel 20 of the oblique legs, the carriage is arranged along a way balls 24 are arranged in Augringen, the pure vertical axis. Level is pulled down as long as the carriage 40

The sliding shoe 22 is an elongated, flat, drawn against the micro-adjusting device E and strip-shaped ball carrier and immediately contains 55 is held free from the stop 35,
next to each end rotatably mounted balls 25. As As can now be seen from FIGS. 1, 3, 4 and 12

the F i g. 4 can be seen, has the slide, the carriage 40 slides by means of a. Ball shoe 22 a carrier or sliding shoe 42 arranged between the balls 25 smoothly on the neten elongated slot 26, which is in operative connection with a guide pin 27 lying in a horizontal plane, the so from ^{6o of} the wedge 30. The sliding shoe 42 is a substantially protruding rail 28 that it limits the movement of the borrowed rectangular brass strip in the rotatable sliding shoe. An identical slot and four balls 43 are held near each corner, a guide pin arrangement, not shown, strip-shaped magnets 44 and 45 extending are also provided in connection with the horizontal of the front and rear edges of the carriage 40 leg of the slide shoe 21, whereby ⁶ 5 down and work with the weight of the entire movement on the rail 16 is limited. Papers chuck C together to the As can be FIGS. 1,2 and 5 take is to keep cars in good sliding contact on the top surface along the vertical wall of the right guide rail 30 of the wedge, wherein the sliding shoe 42

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lies in between. In reality, the magnet 44 is circular elements which are necessary for the operation of the front part of the carriage intended for the present invention. This is explained in "cart either against the wedge stop 35 or the detail in a subsequent part of the descrip ΛΓ-Achseneinstellteil the Mikroeinstellvorrichtung E environment. Nevertheless, to draw short remark here. The left edge of carriage 40 likewise has to be 5, that the Ball on an intermediate surface case a strip-shaped magnet 64, the flow of air "floats" when compressed air extends through its upper surface and the carriage inserted into the recess 68 by the hose 72 becomes in sliding contact with the inner edge of the Surface-to-surface friction of the longitudinally extending part 102 of the universal joint is reduced. Is held on the other hand adjusting device, E (Y-adjuster). Between io through the hose 71 vacuum to the ring-shaped y-axis adjusting part 102 and the left wall recess 68 is connected, the ball 7 (of the carriage 40 is extended in the vertical direction in every position it is in The universal joint of the strip-shaped spherical carrier 47 arranged in the shape of a universal joint had taken up, held, net, which carries longitudinally separated bearings, in which, rotatably arranged spheres 15 ball 70 is a washer by means of screws 74 73 i are. 'attached to an annular recess 76. In di

3, 4 and 12 show that the central zone of the disk 73 is a sintered one

Leaflet clamping device C has a stainless steel ball clamping set 78 pressed into it. The Einsat

housing 50, which has a lower, tubular 78 is porous and with respect to the upper surface,

Migen part 51 has which rotatably machined in a 20 of the disc and lapped flat. The disc

Pair of tapered roller bearings 52 and 53 is mounted. A 73 has a plurality of concentric grooves 77 on!

Retaining ring 54 and a lock nut 55 hold around the leaflet W with respect to the Einspannvor

to center both the roller bearings and the clamping housing direction. The under the disc 73 lic

fixed to the carriage 40. A pin 56 extends from the lower recess 76 forms a vacuum comb

an ear-shaped projection 57 downwardly provided on the circumference of the clamping housing 50 for sucking the leaflet W face-to-face. The. Contact with the upper surface of the disc dufc

Pin 56 is held in place by a helical spring 58 in the clock - the openings of the porous insert 78

clockwise brought into operative contact with the spindle. A connection 79 in the ball 70 connects di

an adjusting micrometer 60 for the polar axis. Chamber 76 with a pipe connection 81, the m;

On the upper surface of the carriage 40 in a ring-shaped 30 a vacuum source is connected (vg

like distance around the housing 50 is by means of screws Fig. 3 and 12).

ben 59 a nozzle 61 attached. To the nozzle 61 With further reference to the F i g. 12 ur.

around is the inner race of a single row Ku- with reference to Figs. 1 and 4 includes d

gellager 62 pressed. On the outer ring of the stencil support assembly is a bridge 80 which a

Bearing 62 slides a ring 64, which the micro 35 the platforms 12 and 14 of the base 10 bi

meter 60 carries. Is fixed between the hub of the ring 64 and the guide path 20 of the oblique

and the connecting piece 61 is a flat spring ring 65 spanned on the plane. A pair of plates 82 and 83, i

orderly. This spring ring 65 creates a friction against a cross bar 84 in the bridge 80

resistance for the micrometer 60 to the turning end are screwed, extend in the longitudinal direction;

Position of the clamping housing 50 by pushing 40 from its front to its rear part, wc

generated on the pin 56, which thereby counteracts the force of the win formed at a gap to the roof

Spring 58 on suspension pin 66 acts. At coarse so that a slot-shaped guide path 85 to the glc

Rotation setting uses the operator to pick up the stencil holder 90 formed

the micrometer 60 as a handle for turning the. The ones with a vacuum or suction line

Clamping housing 50 by the micrometer ring 45 connected channels 86 and 87 are of each side;

64 can slide over the connecting piece 61, whereby the drilled into the bridge 80 and end in ÖlTnungc

Friction of the flat spring ring 65 overcome in the roof of the path 85, which a Bczugebci

will. . represents that is parallel to the upper surface of the wedge?

As can easily be seen from FIG. 12, it is arranged.

the upper middle part of the clamping housing 50 has a 50 As FIG. 13 shows, the template!

concave, hemispherical surface 67 in the form of a holder.90 an overall rectangular shape. 1

Storage pan on. The bearing socket 67 is lapped and includes a pair of upwardly extending shoes

polished so that they have a universal joint to the lower 88 and 89, which are machined and parallel !.

support the entire hemispherical surface that is placed on the lower surface of the holder. Tuesday

Leaflet ball clamp device 70 forms. In the 55 central part of the holder 90 has a circular

The surface of the bearing socket is an annular opening 91 with a ve along its circumference

recess 68 incorporated, the sloping edge 92 running through an exit. The bevel ^c /

69 in connection with a flexible hose 71 is to reduce the probability of half-switching cr

which is connected to a vacuum line. Reduce effects. These are triggered whom

sen is. This becomes a light beam from the exposure arrangement through a V- ^{6 ° (not shown)}

vacuum pump evacuated. A second, not shown, through the opening 91 onto the stencil holder iv

Output connects the annular recess is directed. Spring clips 93 and 94 hold the optisc

68 with a second tube 72, see Fig. 3, the flat, transparent template M resiliently in (llei

is connected to a source of compressed air. The contact with the lower surface of the holder 90. liim

Hoses 71 and 72 are in the frame bracket 65, not shown torn alignment areas / .ugslinii

75 in conjunction with solenoid operated valves. the stencil is attached to the base of the holder

The frame bracket 75 also includes other patterns with reference to similar indications a

different pneumatic and electrical current of the template itself in relation to the opening '

centered. This means a preparatory alignment which ensures exact matching in the holder 90 for each subsequent template. In the bottom surface of the stencil holder 90, an annular recess 95 is also worked concentrically around the opening 91, which has a diameter which is smaller than the surface dimensions of the stencil M. The annular recess 95 serves as a vacuum clamping device for securely clamping the stencil in intimate surface contact with the holder 90. A channel 96 in the holder 90 connects the recess 95 to a longitudinally extending slot 97 in the upper surface of the shoulder 88. A shoulder 89 also has a longitudinally extending slot 98 in its upper surface . When the stencil holder 90 with the stencil M clamped thereon is inserted against the stop 99 at the rear in the sliding path 85, the slots 97 and 98 correspond to corresponding openings 86 and 87 in the roof of the sliding path 85. The actuation of associated valves, discussed below, causes the retainer 90 to be urged into intimate contact with the roof of the slide way 85 as a result of the force of the reduced pressure in the slots 97 and 98. The template M itself is in a secure clamping connection with the lower surface of the holder 90 because the reduced pressure acts in the recess 95 through the channel 96.

1, 3, 10 and 11 show that the micro-adjustment device E includes an L-shaped boom 101 which has the AT-Y-axis adjustment arms 100 and 102. The boom 101 has a machined and polished lower surface that is slidably supported by three single ball bearings 104, 105 and 106 located at the corners of a triangle on the upper surface of the pedestal 10 near the channel 20. At the front edge of the arm 100 a strip-shaped magnet 103 is attached, which the outer end of the arm down into contact with the. Ball 104 pulls, causing the boom to reciprocate. 101 on the spherical surfaces is prevented. On the rear wall of the Y-axis adjusting arm 102, a pair of vertically arranged feet or plates 107 and 108 separated from one another in the longitudinal direction are provided. At the foot of the arm 102, in addition to the plate 108, a third, vertically arranged plate is provided. As FIG. 3 shows, springs 111, 112 and 113 pull the plates 107 and 108 and 110 into contact with eccentrically arranged cams 120.

10, the adjustment arm 120 includes an annular ball bearing 114, the 'inner Race ring is mounted on a set screw 115 which is screwed into the platform 112 and out the rear part of which protrudes. An eccentric 116 on the outer. 114 bearing race is pressed, carries a second ball bearing 117 along its circumference. The circumference of the bearing 117 is therefore forced to come into contact with the plate 107 on the adjustment arm 102. The eccentric 116 is then an actuating finger 118 is attached, the end of which is rotatably coupled to one end of a connecting rod 119. The other end of the Connecting rod 119 is rotatable with the actuating finger 122 connected, which encloses the eccentric 123 on the adjusting arm 130. According to Fig. 11 is the Eccentric 123 attached to the outer edge of the annular ball bearing 124, which is perpendicular to a second ball bearing 126 is arranged.

The inner races of both ball bearings are carried by a threaded connector 125 that goes into the Platform 14 is screwed in and protrudes from this. Sitting on the circumference of the eccentric 123 an outer ball bearing 127, the outer race of which in the same way as the ball bearing 117 with the Plate 107 on the left-hand part brought into contact with plate 108 on Γ-axis adjusting arm 102 is. In this way, the eccentrics 116 and 123 produce a movement of the extension arm 101 in one Y direction (perpendicular with respect to the arrangement of FIG. 3). On the outer race of the ball bearing 126 an Af-axis adjusting eccentric 128 is pressed. The inner race of the ball bearing 129 is on the. Perimeter of the eccentric 128 attached so that its outer race against the plate 110 rests. A joint member is also seated on the eccentric 128 131 ,. to which an actuating finger 132 is connected, the outer end of which is rotatable with it one end of a cranesbill link 133 communicates. An extension 134 of a finger 132 is similarly rotatably connected to one end of a cork's bill link 135. the corresponding ends of links 133 and 135 are on the outer races of simple Ball bearing members 136 and 137 attached, which are vertically and freely rotating on a bolt 138. In this way, the ball bearing members 136 and 137 are between a finger piece 139 and a "Shoe" part 140 stored. The shoe 140 slides on a highly polished plate 145 which is mounted on the upper part of the platform 114. The lower Part of the shoe has an annular, flat back 141 that extends around a circumference Suction chamber 142 extends around. A drilled passage 143 in shoe 140 connects the suction chamber with a flexible hose 144, which is connected to a vacuum manifold via an adjustment shut-off valve is coupled, which is described in detail below.

An adjustment of the shoe 140 on the surface of the plate 145 causes a corresponding movement of the boom 101 in a horizontal plane on its support balls 104, 105 and 106. The eccentrics 116 and 123 lie on the plates 107 and 108 and generate a movement of the boom 101 in the Y-axis. The eccentric 128 acts against the plate 110 and moves the boom 101 in an Af direction. The arm 100 against which the carriage 40 is pulled by the magnet 34 transmits such ΛΓ motion to the carriage. Similarly, the carriage is in touching contact with a cylinder disposed in the middle between den'Plättchen 107 and 108 at the front part of the Z adjuster 102 is pulled approach 109, when the wedge is pulled up by the drive device H, the inclined plane. The Af movement of the boom 101 is correspondingly transmitted to the carriage 40. All of this takes place; when the surface of the leaflet W is arranged immediately next to the surface of the template M at a parallel distance. After the two patterns have been matched, the shoe 140 is sucked onto the surface of the plate 145 by the vacuum in the conduit 144. The agreement between the two patterns is retained. Then the

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tested samples returned in contact, angle lever 173 is rotatable on the upper end

so that the photosensitive surface of the blade is supported by a bolt 164 which is in a cantilever

Chen advertising influenced contact printing W is mounted 175 which extends rearwardly from the

with the lamp extending the exposure assembly central portion of the column 158. An arm of the win-

tion G is used. -. . 5 toggle lever 173 is rotatably attached to a pin 176

FIGS. 1, 2 and 4 show that the one that moves upwards from a flap 177 steers

Scanning arrangement F stretches a partial image stereo microscope; which on the right rear part of the

150 contains which cover plate 152 is fastened directly in a cover plate 152.

is hung above the template day arrangement. A chuck 178 is movable between the

The cover plate 152 is supported by large balls 153, the protruding arms of the angle levers 170 and 173

155 and 157, each inserted in columns 154, 156 and 158, whereby the cover plate 152 is syngelosed in three seats are applied to the movement of the slider 160 in a chronological manner, sliding in a horizontal plane. The pillars are closed at the corners of a three-.

Arranged angular plane, so that they are suspended on the cover plate 152 for a rotating cover plate 152 a fixed supporting disk 180 underneath is secured by shoulder screws 181 and Form order. The column 154 is held directly on the rear 182 at a distance below the middle part. the wärtigen part of the platform 12 attached. The column screws 181 and 182 extend through opening

156 is on the front part of the platform 12 in the openings in the cover plate 152 and are mounted in proximity to the channel 20. The column 158 is attached to the slave opening in the turntable 180 in-bridge support member 80/4 which screws over the 20. Springs 183 and 184, which the respective platform 14 is arranged. Screws are surrounded on the platform 12 and are pretensioned in such a way that a highly polished, hard plastic plate 146 is mounted between the turntable 180 and the top plate 152, the columns 154 and 156. The left press, whereby the turntable through a plate 146 is identical to the right plate 145 and swivel coupling 185 in a horizontal plane acts as a sliding support for a sliding piece 160, which 25 can be adjusted. In this regard, it is designed to be the 150 in microscope ^! AT-Y-Rich- it is particularly important to note that the centering is moved in the same way as the microscope 150 uses two objective lenses, which shoe 140 the carriage 40 via the micro-adjustment fronts have only a very shallow depth of field. Set in direction E. In parallelism between the microscope 150 corners of a triangle on the cover plate and the work piece (template M and sheet W) arranged in parallelism with the column spacing, the optical axes of the heads must be aligned with leveling screws 159. 'Screws the microscope perpendicular to the plane of the workpiece. The ends of these leveling screws are aligned, and during the entire scanning time in 159 abut the upper surface of the corresponding bearing balls 153, 155 and 157 held at a constant distance above, thus forming a 35. The horizontal reference plane of the cover plate means to adjust the cover plate in a plane parallel to 152 by means of the usual adjustment of the adjusting screw surface of the template M. ben 159 held on balls 153, 155 and 157.

At the central part of the column 154 is a bracket 161. Similarly, the turntable 180 is through

attached to a front bolt 162 and a usual adjustment of screws 181 and 182 over

rear bolt 164 carries. On the front bolt 40 the three-axis swivel joint 185 parallel to the deck

162 is a cuff block 165 arranged, the plate adjusted. .

The microscope 150 itself is designed to be cantilevered towards the front and a slide-out

Control rod 166 serves as an upper pivot joint. A casual 187 attached. Springs 186 bring the boom

Pivot bearing 167 resiliently connects the top of 187 in face-to-face contact with it

Control rod 166 with the inner part of the sleeve 45 a supporting work table 188. The boom 187

165 and allows the rod to pivot freely, slides on balls 189, which in the usual way between. An identical pivot bearing 168 is seen in a perpendicular sliding path on the Opening of the cover plate 152 is provided, and takes the supporting work table 188 and sliding on the boom the underlying part of the control rod are arranged. A micrometer screw 190 is on

166 on. A helical spring designed around the control rod 166 as a clamping device 99 on the upper part of the Aus compression spring is arranged between casual 187 so that the micrometer spindle inserted into the two pivot bearings 167 and 168 presses against a shoulder of the work table 188, and creates a sensitivity «. A third pivot bearing 169, which enables vertical adjustment or focusing, is rotatably disposed in the slide 160 of the microscope 150 with respect to the work piece and slidably takes the lower part of the 55 possible.

Control rod 166 open. '■ .j' ■. ' A pair of tapered pivot pins 192 and In this manner, the movement of the slide 193 extends from the top of the work piece 160 on the surface of the plate 146 to a table 188 outwardly. The tips of the Drehzapproportional reduced movement in AT-Y directions work with complementary pivot bearings on the cover plate 152. However, to ensure 60 inner ends of cylinder pieces .194 and 195 that the directional movement of the cover plate exactly together that on the underside the turntable to the directed movements of the slider 160 180 are fastened by screws 196. This is followed by a stabilization of the cover plate 152. In this way, the microscope 150 is required to be articulated with the rotation. In accordance with this, on the disk 180 is connected, with the lower surface of the rear bolt 164 rotatably arranged an angle lever 170 65 work table 180 against the center of an adjusting screw, one arm of which rests rotatably with a 198 , the short pin 171 in rotary connection with a shaft is connected, which stands up 199 , which extends downwardly from the turntable 180 from a cover flap 172. A second extends. On the sides of the microscope are

13 14

lighting housing 197 attached, which lamps The end of the lever 200 protrudes over the bridge

which directly through the objective lens luminaire 80 ^ 4 addition and has a head 201 for the

ten to the observation of the workpiece by the operator's right hand. In the

to lighten the eyepieces. Figs. 6 and 17 become a microscope operating lever

1, 2, 4 and 6 can be seen, 5 232 shown, which is intended to bring the microscope, that the microscope 150 directly over the channel 20 150 in and out of position. This is arranged in the rear so that the alignment of the template end of the lever 232, which can be seen in the right-hand part and the leaf pattern against one another under enlargement in FIG. 6, has a large ring (cf. FIG. 9 a ). So there is a bearing 233 , the inner race of which bears a rotation while the two patterns in pegs 234 that are separated from one another. The pivot pin 234 will lie next to one another through parallel planes which hold a locking screw 235 in a bearing 236 fixed-Kugeleinspannyorrichtung 70 by the micro, which is on the upper surface of the bridge adjusting device £ in the horizontal direction along beam 80 ^ 4 by means of conventional mounting screws 237 of the X- and Y-axis and is fixed by the rotary adjuster. The front end of the lever 232 is adjusted 60 about a polar axis until the alignment is completed at one end of a chuck connecting rod, that is, until the partial images of 238 are suspended, the upper end of which is hinged to the guide of two initially spaced apart parts of the end of an actuating arm 240 is to determine the template and the leaf pattern exactly above the rear edge of the microscope work table 188. After that the tested samples are consolidated. The middle part of the lever 232 carries a cam 242 for preparing the contact copy in contact 20, which is returned in an arched cam contact. In this state, the guide path 245 in the cylindrical surface of the microscope 150 is moved by a handle 200 around its rotary head 210. If the cam pivot pin 192 and 193 is forwardly out of the way roll 242 is pivoted in its lowest position 243 of the cam, whereby at the same time the exposure gate guide path 245 (the exposure device G direction G in a position above the stencil, and 25 is located outside of it Irradiation position), it is indeed pivoted at a distance that the microscope had previously occupied by the actuating lever 232- counterclockwise 150 . , rotates, causing the microscope 150 downward into its

6, 14, 15 and 17 show the structure of the scanning position is pivoted. In contrast to the exposure device G and its mechanical, the roller 242 moves up into the upper posi-coupling with the scanning device F and the 30 tion 244 of the cam guide path 245 when the stencil support device D. The exposure pre-exposure device G by the hand lever 200 includes direction G on the upper surface, located on the · shown in FIG. 17 in the counterclockwise direction in the Besieh a tunnel-shaped housing 204, gedreht- a leuchtungsposition (at which point flat, fan-shaped. plate 202. a Frontflächen- of the compartments 202 abuts against the stop 203, the mirror 206, which protrudes through clips 205 at an angle 35 from the right part of the bridge 80 ). If, on the other hand, the actuating lever 232 is held at 45 ° to the reference edge of the housing 204 , directs the light beam from the tunnel 207 downwards and rotated clockwise, the arm 240 swing through the plate opening 208 onto the template M and the microscope 150 upwards out of it Position The other edge of the housing 204 is by means of, as shown in Fig. 6, to make room for screws 209 attached to a rotating head 210 , whereby 40 for the tunnel housing 204 ,
through the tunnel 207 coaxially opposite one another. FIGS. 2, 3, 14 and 17 show that lying rotary head openings 211 and 212 on the rear part of the bridge 80 are made in a pair. The lower part of the rotating head 210 is vertically extending cantilever blocks 246 and 248 with a ring-shaped reduced extension 210 are fastened by means of long screws 247 . The arm, which has a slot 213 that extends 45 an inner surface of the boom block 246 has a ge over an angle of nearly 180 °. An arched surface 249 , in close proximity to boom 216, which has a semicircular flange to the outer wall of the rotating head 210 and 217 and a collar portion 218 , is coupled. The rotating head 210 is attached to the bridge 80 through a protruding tube 251 . The man lamp housing 250, which is arranged outside the block collar 218 through a slot 213 through an opening 252 , is attached to the block 246 and closed with a screw 220 on the middle part. Clamped at the focal point of the projection lens 255 of the shaft 219 . The upper end of a mercury lamp 254 or other shaft 219 is placed in the inner race of a spherical source of monochromatic light, so bearing 222 is pressed, the outer race of which sits in the bore 223 of a directed beam of light through the tube. The lower end of the shaft 219 55 251 is guided. The tube 251 is coaxial to the is by means of a screw 221, the head of which carries a tunnel 207 and the rotating head openings 211 and 212 washer 225 , aligned in the inner race of one when the compartments 202 are fastened by the lever ball bearing 224. The outer race of the 200 is pivoted into the "exposure" position. Ball bearing 224 is thereby in seat contact with the Der Fi g. 17 can be inferred that "the housed inside bottom surface in its bore 213 befind- 60 of the rotary head 210 to rotate a shutter 260 Toggle. Loan approach 214th The flange 217 of the is arranged, which is a pair of spaced at 216 UmAuslegers by bolts 226 catch on the bridge disposed tabs 256 and 257 having fixed 80 so that the rotary head 210 rotatably extending erstrekinnerhalb a further opening 217 by means ken of a disk 258 of downward in the bridge. screws 261 is a is scheibenförangcordnet. the hand lever 200 is miger by screw 65 approach 259 of the shutter 260 at the bottom ben 228 fixed to the bottom edge of the turning head restraint of a Maltese cross wheel 270th a fixed directly 214, and designed all BeHch- across the gap between tabs 256 tungsanordriung G in Position to bring. And 257 arranged, protruding edge 262 has

an indentation 263, which is intended to interact with the contact rollers of microswitches 320 "lock closed" and 322 "lock open", which are attached to the underside of a mounting plate 264. The mounting plate 264 is secured along one peripheral edge between the vertically disposed cantilever blocks 246 and 248 and is supported along the other edge on a pair of spaced bolts 265 and 266 that protrude from the bridge 80. A bearing block 268, in which the shaft 269 of the Geneva wheel 270 is rotatably mounted, is also fastened to the underside of the mounting plate 264 by screws 267. The Maltese cross wheel has 6 equally spaced slots 271, which extend radially towards the circumference, one slot at a time cooperating with an eccentrically mounted pin 272 which extends downward from a drive wheel 275. The shaft 273 of the drive wheel 275 is also rotatably mounted in the bearing block 268. Above the boom block 248, a shutter drive motor S is held above the mounting plate 264 by means of screws 64. A shaft 276 of the drive motor S is connected directly to the shaft 273 of the drive wheel 275 through a coupling bushing 277. As will be explained in detail below, the drive motor S, as soon as it is actuated, rotates the shutter 260 clockwise by means of the drive wheel 275 and the Maltese cross wheel 270, so that the tab 256 exposes the opening 212 and the directed beam of light from the Lamp 254 can be projected through tunnel 207. The motor S is then stopped. After a predetermined exposure period, the motor S rotates the shutter 260 clockwise again until the tab 257 closes the opening in a light-tight manner. The rotation of the shutter 260 occurs at a constant speed. The rear edge of the flap 256 and the front edge of the flap 257 open and close the openings from the same side. It should be noted that an "exposure" microswitch 316 and a "reclining microswitch 318 are attached to the underside of the mounting plate 264, the contact rollers of these microswitches being designed to slide along and with one inside the upper peripheral edge of the rotary head 210 provided. V-shaped slot 229 to come into operative connection. The role of the "exposure" microswitch 316 only coincides with this cutout 229 when the rotary head 210 has been rotated into its "exposure" position by the lever 200, whereas the role of the "reset microswitch 318" has the V -shaped cutout 229 only starts when the rotary head is rotated in order to bring the microscope 150 into the scanning position.

As can now be seen from FIGS. 18, 19 and 24, the drive device H contains a lever 280, the upper end of which is rotatably supported in a bearing block 290. A roller 281 at the lower end of the lever is pulled into contact with the rear sloping surface 29 of the wedge 30. The free end of a suspension pin 282, which extends downward from the lever 280, is connected to a drive spring 39, the other end of which is attached to the wedge neck 38. The fulcrum of the drive lever 280 is a shaft 283 which is rotatably mounted in the inner rings of ring bearings 284 and 285, the outer rings of which are pressed into corresponding eyes of the lever 280 and the bearing block 290. The rotational movement of the lever 280, which is caused by the drive cam 286, is translated into a horizontal reciprocating movement of the wedge 30. A roller 287 of the lever 280 rotatably mounted in an eye bearing 288 rests on the outer circumference of the drive cam 286. F i g. Figure 18 shows an auxiliary spring 298 resiliently biasing lever 280 in a clockwise direction to ensure that roller 287 remains in constant contact with and resiliently follows cam 286 as it rotates.

The cam 286 is attached to the hub of the transmission gear 291 by means of a spacer block 293 by screws 292 and a stiffening disk 294, whereby a lateral guide is effected. The wheel 291 is keyed onto the main camshaft 295 and is fastened to it by means of a locking screw 296. The transmission gear 291 meshes with a main drive gear 297 which is keyed onto the motor shaft 298 and is held thereon by a locking screw 299. * The housing of the drive motor Z is coupled to the main boom 290 by bolts 298, which in turn is attached to the bridge 80 by shoulder bolts 279.

19 and 20 to 23 show on the sides opposite the main drive cam 286 with respect to the main boom 290 on the main shaft 295 wedged cams 300, 302, 304 and 306 for automatically operating switches. The switching cams are separated from one another in the axial direction by cylindrical separating pieces 309 and are held on the shaft 295 between a central collar 311 and an end collar 313. The cam 300 actuates the drive motor and has a pair of V-shaped incisions 301 and 301a which are arranged separately from one another on the circumference and which interact with the motor microswitch 308. The cam 302 controls the shutter motor S and has an arcuate recess 303 into which the role of the shutter microswitch 310 falls. The cam 304 actuates the vacuum chucking of the leaflet W on the surface of the chuck 70 and has a V-shaped notch 305 which cooperates with the roll of the leaflet setting microswitch '312. The cam 306 has a nose 307 and actuates the cone-locking microswitch 314> whereby a vacuum is applied to the annular recess 68 along the circumference of the ball-clamping dome 67. The microswitches 308, 310, 312 and 314 are attached to the underside of the main support plate 315 which is mounted on top of the main boom 290. All cams 286, 302, 304 and 306 are rotated clockwise as shown in FIGS. 18 and 20 to 23 and each shown in the position of the contact copy. This means that the drive cam 286 is in a position in which the drive lever 280 is pivoted to the maximum of its counterclockwise rotation in order to convey the wedge 30 by the spring 39 up the path 20 of the inclined plane to its rearward position. The F i g. 29 shows

65. all cams mentioned in their "starting" position, which prepares the beginning of the work cycle.

The F i g. 25, 26, 27 and 28 show that a lowering device J includes an actuator 325,

209 623/69

which has a curved flank for cooperation with the rear surface 29 of the wedge 30. The actuator 325 rotates counterclockwise as shown in FIG. 25 can be seen until the flank 326 is in physical contact with the surface 29. Then it moves a predetermined amount to the left to move the part 30 slightly downwards against the force of the drive spring 39 along the path 20 of the inclined plane. The small amount that the wedge 30 moves down the inclined plane is sufficient to lower the carriage 40 slightly, bringing the top surface of the leaflet W just below the bottom surface of the template M , a thousandth of an inch apart or less.

The articulation end of the lowering actuator 325 is by means of a nut 323 and a locking ring 324 firmly against the shoulder of a socket

327 pressed. The bushing 327 slides rotatably on the circumference of an eccentric drum bushing 328, which on a shaft 329 is pressed, which is in a frame 330 fastened on the rear side of the pedestal 10 is stored. The outer surface of the eccentric drum

328 is out of round by about five thousandths of an inch with respect to the axis of shaft 329. At one end of shaft 329 a pulley 331 is attached which takes a few turns of a rope 332 attached to it so that a weight 333 can hang thereon. The other end of the rope 332 is attached to an eyelet bearing 334 pivotably mounted in an eccentric ring 335. The ring 335 is attached to a socket 336, which is fixed by means of an input. Adjusting screw 338 sits on the shaft 337 of a lowering motor / 2. A cam 340, which has a V-shaped cutout which interacts with the microswitches 342 and 344, is also attached to the shaft 337. Both the lowering motor 12 and the microswitches 342 and 344 are fastened to a cover 343 of a housing 345 resting on the floor behind the frame A.

A lowering swivel motor / 1 is also arranged on the cover 343 of the housing 345. On the wave 47 of the swivel motor sits a cam 346, its V-shaped cutout with the contact rollers cooperating by microswitches 348 and 350 which extend from cover 343 downwards. Means a lower eyelet, a rod 351 is rotatably carried by a pin 352 eccentrically in def Surface of the cam 346 is attached. The rod slides in a tube 354, the upper end of which is rotatable is connected at 353 to the lowering actuator 325. One on the middle part of the pole 351 screwed outer nut 355 comes into contact with the lower end of the tube 354, to raise it when the rod has reached the upper part of its stroke. The F i g. 25 can it can be seen that the rod 351 raises the lowering actuator 325 so that it the flank 326 in Pivoted clockwise out of contact with the wedge surface 29. If the pin 352 gets to the bottom of its rotary stroke, the rod 351 is lowered within the tube 354, whereby the nut 355 comes out of contact with the lower edge of the tube as soon as the flank 326 abuts the wedge surface 29. As soon as the lowering motor / 2 rotates, the actuating member 325 is then activated by actuating the eccentric drum 328, the pulley 331 and the rope 332 moved in the opposite direction to the left.

With reference to the circuit diagram of FIG. 29 A and 29 E, the operation of the construction described above will now be explained in detail. All the electrical circuit elements are shown zwisehen the 115-volt AC power supply lines Ll and L 2 in a cross-connecting switching scheme. A rim key correlates the location of the various coils, contacts, switches and motors with their sequence of operations. The various horizontal services are denoted by reference numerals which are located on the right-hand edge of FIGS. 29A and 29B in the vicinity of the supply line. Relays, motors and coils are shown by letters surrounded by a circle in the respective horizontal line. The relay contacts are marked with the same preceding letters as the relay coils themselves. In addition, all relay contacts that are shown as normally closed in the circuit diagram are underlined in the description. For example, the normally open contacts RS 2-1 in line 18 have no underlining, whereas the normally closed pair of contacts RS.2-1 in line 10 is underlined. All cams are shown in their starting or starting position.

After the supply lines L 1 and L 2 have been connected to 115 volts alternating current, the arrangement is put into operation by actuating the switch 360, "first operation" (line 6) arranged on the frame console 75. The switch bridges the contacts R 2-2 (line 5), whereby the relay R 2 (line 5) is energized, which keeps the contacts R 2-2 closed. The contacts R 2-1 (line 4) are also closed. However, a direct current from the 400 MFD capacitor is applied to the clamps of the drive motor Z (lines 8 and 9)., Via the contacts £ 1-1 (line 7) and the 7.5 MFD capacitor (line 8) . The motor Z is braked in a stop position as a result of a direct current charge from the transformer 361 and the directional conductor IiV 1199 (line 2), which is built up by the capacitors. The drive cam 286 is pivoted into a stop position in which, according to FIG. 18, the roller 287 rests in part 286A. The drive lever 280 is in its maximum position, which it has reached in the clockwise direction, whereby the wedge lies on the front part of the path 20 of the inclined plane. This "start" position, in which the aspiration of the leaflet W on the clamping device 70 is prepared, is shown in FIG. The carriage 40 has been pulled by the spring 37 into contact with the stop 35 towards the rear part of the wedge (cf. FIG. 4 A).

The template M previously aligned in its holder 90 and held there by the clips 93 and 94 is inserted into the sliding path 85 against the rear stop 99. The holder 90 is sucked onto the reference roof of the sliding path by means of a vacuum, which is continuously applied to the channels 86 and 87 through the suction line 147 connected to a vacuum pipe branching in the console 75.

At the same time, the template M is drawn through the channel 96 into direct contact with the lower surface of the holder 90.

A "manual-automatic" switch 362 (line 51),

19 20

which is in its closed position (automatic) by immediately applying a vacuum to the chamber 76, excited via the closed contacts of the and the leaflet W on the surface of the insert 78 microswitch 3.12, the roller of which is pressed into the V-shaped . At the same time, the evacuated cutout 305 of the leaflet locking cam 304 sucks chamber 66, the leaflet setting pins 148 collapsed against the leaflet vacuum magnet 364 5 of the biasing force of the flat spring 149 downwards. (Line 54). The magnet 364 actuates a con. Thus, the pins 148 are pulled under the face of the struc- tural valve 365 positioned around the jig 70 to prevent their contact vacuum to the stencil chamber below the insert 78 when the mer 76 is turned off. Then, the leaflets W is brought up to leaflets W in contact mit.ihr,
the clamping disk 73 of the ball is placed, whereby immediately before the leaf W touches the template the edges of the leaf the three setting pins 148, the nose 307 of the ball locking cam, which by flat springs 149 kens 306 the role of the microswitch 314 touches touched, directed. The ball locking magnet 366 (line and the circuit to magnet 366. 48) remains de-energized because the microswitch 314 is open -Part of the cam 306 is applied. In accordance with recess 68 from. As a result of the hose fitting, the valve 367 in the hose 71 is open, around 72 air is introduced into the annular vacuum to the annular recess 68 in the recess 68 under slight pressure. As a result, the ball clamping dome 67 can guide. The ball locking device 70 free in its universal clamping device 70 is therefore fixed. To note the binding device 67 slide so that it is self-aware that the energized magnets 364 and 366 will align when the leaflet W is in its "aligning vacuum from the respective tubes 81 and 71" position the stencil M is guided, switch off, and set that by their excitation reduced and the mutually contacting surfaces in a pressure or vacuum to the respective hoses on a common plane. Immediately thereafter it is closed. 25 passes the nose 307 of the ball locking cam 306

A foot switch arranged on the floor, the control role of the microswitch 314 to the 368 (line 27) is briefly actuated again by the operator through the control circuit to the ball fixing magnet 366, whereby the circuit to open. The ball 70 is opened in its self-aligning step relay RSL (line 27), so that the relay drops out in the clamping device border position again. If the foot switch 368 is raised, since the vacuum is in the ring-shaped Ausben, the circuit is taken to the stepping relay 68. It should be noted that the RSL via the normally closed contacts lever 280 in the wedge 30 cannot retract any further than the £ 3-1, the time-coupling contacts TC-2, the point at which the leaf setting switch 370 (Line 23) and the drive motor touches the template. Nevertheless, the microswitch lever 308 is closed, the role of which is pivoted slightly counterclockwise in the 35 280, and the incision 301 of the cam 300 has sunk. As shown in FIG. 18. When the roller 281, apart from contacts RS-1-2 (line 4) and RS-II (line 23), moves into contact with the wedge rear surface 29, both are closed. The relay R 1 (line 4) is, the drive spring 39 stretches slightly,
through the now closed contacts RS1-2 and Before the drive motor A is excited to complete the R2-1. Contact R 1-1 (line 7) closes, is braked by 40 first half of a revolution, that is, to apply supply current to the drive motor Z when the microswitch 308 in the recess and contact R 1-1 (line 7) opens, around the braking 301 Λί of the drive motor cam 300 has occurred, switch off direct current. The motor Z rotates it has already rotated about 135 °. The camshaft 295, and from then on the on-step relay RS-I rotate, is switched on again to move the drive cams 286 as well as the cams 300, 302, 45 into the previously "closed" contacts RS 1-1, RS 1-2 304 and 306. The lever 280 swivels in each case to open the clock lines 23 and 4. Relay R 1 opens clockwise and pulls the wedge 30 through the spring 39 now up the previously closed contacts R 1-1 into the inclined plane 20. The Lever 280 slows down line 7 in order to cut off the power supply to motor Z somewhat when its roller 287 is switched on with the first one. The previously open contacts £ 1-1 in concentric part 286 B of the cam surface in active line 7 also close again This happens when the carriage applies braking direct current to the field windings, against the elevation 109 on the Y-adjustment arm 102 of the "alignment" position in which the surface of the boom 101 in the micro-adjustment device E is at - Leaflet W with the area of the Template M in butts. In this state, the carriage 40 has been brought out of contact, as shown in FIG. 8 shown. Spring 37 is released, which causes contact with the 55 The locking cam 302 has moved into a position of the stop 35 on the wedge. The second demand, in which the role of microswitch 310 samung takes place when the carriage 40 has fallen from the wedge 30 into the arched recess 303, is pushed up so that the leaflet W is gently pushed through the relay R 3 (line 22) is switched on, comes into contact with the template M , the contacts R3-1 (line 30) close, around which that is when the cam follower 287 comes into operative connection with the cam relay RS 2 via the normally closed kenabsenken286C. To excite timing contacts TC-I. The con-

As soon as the drive motor Z with its rotation clocks RS 2-1 (line 19) close so that it has begun, the leaflet vacuum cam is lowering motor / 1 (line 21) via the microswitch 304 in a position in which the Role of the 350 is aroused. Immediately thereafter, the down microswitch 312 rotates out of the notch 305. The lowering cam 347 is lifted around the roller of the microswitch and is in operative connection with the cam surface to lift it out of its recess and its action has occurred. This will lift the circuit contacts into the "not" position. The cam to the leaflet vacuum magnet 364 is opened, token 346 continues to rotate until the roll of the microscale

ters 350 falls into that recess to open the circuit to the cam motor Jl. This half turn causes the rod 351 (Fig. -24) to lower, causing the boss 326 of the actuator 325 to "find" the surface of the wedge 30. The cam motor Jl is now excited about the "IVC" -layer of the microswitch 350 and the "7VO" position of the microswitch 344th The F i g. 25 it can be seen that in accordance therewith the pulley 31 is rotated by the cable 332, whereby the eccentric drum 328 rotates the actuator 325 to the left, so that the wedge 30 is moved down the inclined plane 20 by a small amount. The spring 37, however, holds the carriage 40 in biased contact with the X-adjustment arm 102 of the micro-adjustment device E. This slightly presses the carriage 40 into a pure vertical movement so that the surface of the leaflet W is in close proximity to the surface of the template M. . is separated, with the two surfaces in parallel, horizontal planes.

As soon as the cam 340 has been rotated half a revolution, the roller of the microswitch 344 falls into its V-shaped recess and lifts the contacts to the "NO" position, whereby the motor / 2 stops immediately. The separate bearings of the leaflet W and the template M are shown in FIG. 9 shown. For the most part, all surface alignment operations have therefore been carried out automatically after pressing the foot switch 368 .'-

The two patterns, which are clamped in parallel planes separated from one another, are now brought into correspondence with one another. The micromanipulator E positions the leaf W by means of the finger piece 139 and the "shoe" 140, the slides on the surface 145 along Af-Y axes, whereas the clamping device 70 is adjusted about a polar axis by means of the rotary adjuster 60. As can be seen from FIG It should be noted that the microscope 150 scans the template M by means of the slide 160 and the rod 166 to find the fine patterns.

When the matching of the two patterns is complete, the foot switch 360 is allowed to close after another brief lowering. The relay RS 2-2 (line 30) is now through the closed contacts .R 3-1 and the timing contacts TC.-! excited. As a result, all i? 5-2 contacts are now actuated again. It should be noted that they had previously been actuated by the excitation of the relay R 3 via the locking cam 302. All contacts RS2 are now returned to the position in which they are shown in FIG. 29 have been shown. It should be noted, however, that the second lowering of the foot switch 368 does not excite the drive motor Z, since the circuit to the relay RS-I is open, ie contact R 3-1 (line 27) is now open. The lowering motor 72 is now again via the microswitch 342, which is in its "not" position and via the contacts R £ Z-1 (line 10), which are now in their normally closed position, excited so that they over the line 18 are fed back to the line Ll. F i g. 25 shows that the cam 340 is rotated, whereby the pulley 331 and the eccentric drum 328 follow until the actuator 325 is moved to the right. When the recess in the cam 340 comes into operative connection with the role of the microswitch 342, the lowering motor / 2 is stopped. Then the cam motor / 1 is again excited via the “not” position of the cam switch 348, the “NO position of the cam switch 342 and the now closed contacts RS 2-1, which establish the connection to the line L1.

The cam 346 rotates half a turn until the microswitch 348 finds the recess in the cam and thereby falls back into its "iVC" position, which again opens the circuit to the cam motor / 1. During half a revolution of the cam motor / 1, the rod 351 and the nut 355 have raised the tube 354 so that it pivots the actuator 325 in a clockwise direction. Since the edge 326 is no longer in contact with the rear surface 29 of the wedge 30, the wedge 30 is again moved a small amount to the right, whereby the leaflet W rises in a purely vertical axis until it comes into contact with the Template M stands. The two patterns remain in the aligned state. The position fixing magnet 372 is also energized at this point in time in order to clamp the "shoe" 140 to the plate 145 by means of a vacuum.

Now by moving forward; of the hand lever 200 pivoted the microscope 150 out of its scanning position, and the rotary head .210 rotated so that the fan 202 comes into its operative position. The role of microswitch 316 (exposure) falls into V-shaped cutout 229 in the face of turret 210, and microswitch 318 (toggle) is in its "nothing" position. Via the again closed contacts R 3-3 (line 28), the microswitch 342, which is in its "iV5" position and via the normally closed contacts £ 52-2 via which the connection to the supply line Ll is established, the Exposure indicator lamp 371 is on. The time motor TM- (line 34) and the time coupling TC (line 31) excited. The shutter motor 5 (line 41) is switched on via the shutter opening switch 320, which is now in its "NC" position and which is connected to the supply line via the now closed microswitch 316 (exposure). As a result, the shutter 260 rotates one full revolution, so that the gap between the disks 256 and 257 now lies opposite the projection tube 251. The Maltese cross wheel 272 has been rotated by 60 ° by the drive wheel 275. The motor 5 stops when the roller of the microswitch 320 comes into operative connection with the projection 262, whereby the switch is moved into its "niece" position. As soon as this has happened, the microswitch 322 has fallen into its “ATC” position, since its roller has now reached the indentation 263.

At the same time, the timer motor TM has started to rotate and take its pointer with it via the timer clutch TC : after a predetermined time (0 to 15 seconds) has elapsed, the pointer hits the TM-1 contacts and

causes them to switch. Contact TM 1 (line 34) opens and contact 77V-1 (line 35) closes. The shutter motor 5 is switched on at the completion of the exposure circuit via the following circuit: microswitch 322, which is in its "iVC" position, TM-I switch (line 35), microswitch 316 (exposure) (line 34), which is in its "iVC" position and line Ll. The shutter 216 is rotated by the Geneva drive wheel 270 until the tab 257 is positioned directly in the path of the light beam. After the shutter 260 has been rotated through 60 °, the microswitch 322 comes into contact with the cam lug 262 of the shutter and is reset to its "not" position in order to switch off the shutter motor S after the second full revolution. It should be noted that the rear edge of the flap 256 always opens the shutter from the same side and that the flap 257 always closes the shutter from the same side. It should also be noted that braking direct current is applied to the shutter motor S via the 0.5 MFD capacitor (line 46) in order to stop the motor immediately if the alternating current is switched off.

Finally it should be noted that the contacts TM-2 (line 29). also. be closed when the timer TN has finished its cycle. Therefore, the step relay RS-I (line 27) is excited via the following circuit: microswitch 308, (in "NC" position, since the role has fallen into recess 301Λ), changeover switch 370, the now closed contacts TM-2, the closed contacts R 3-2, line L1. As a result, the drive motor Z automatically starts rotating again, since contact RS1-2 (line 3) has switched on relay Rl (line 4) and relay Rl has switched its contacts Sl-I and Sl-I in line 17. The cam 286 and all switching cams 300, 302, 304 and 306 turn clockwise again until the recess 301 in the drive motor cam switches the microswitch 308 to its "NC" position. The automatic work sequence described below takes place in order to return all elements to their "starting" positions.

The lever 280 pivots in a counterclockwise direction, whereby the roller 281 can drive the part 30 down the inclined plane and pull the carriage 40 back. The leaflet W is pulled out of contact with the template M. As soon as the wedge 30 is withdrawn sufficiently, the carriage can release itself from contact with the Y-adjuster 102 and, under the action of the spring 37, run against the stop 35. Finally, both the wedge and the carriage are in the positions shown in FIG. 7 are shown. Since the cam 304 is in the starting position, the role of the microswitch 312 has fallen into the recess 315, so that the vacuum supply is switched off. The paper that has just been exposed can now be removed and a new paper inserted for a new work sequence.

A pivoting of the hand lever 200 pivots the exposure device G out of the way and the microscope 150 back into its scanning position. The shutter microswitch 318 is returned to its "NC" position and switches the shutter motor S on via the microswitch 320, which is in its "not" position. This rotates until the role of microswitch 320 falls into slot 263. The shutter tab 256 in the rotary head 210 is now set in order to prepare for the next exposure cycle. With microswitch 316 (exposure) now in its "not" position, both timing coil TC and timer motor TM will eventually be turned off. This automatically resets the timer for the next ίο exposure of a new leaf.

Protection is only sought for the device within the scope of the claims.

Claims (9)

Patent claims: 1. Device for aligning and contact copying of minute geometric patterns a stencil on an existing pattern on the surface of a semiconductor wafer to create additional to arrange electrical circuit components and electrodes on the wafer, with a clamping device for the leaflet, a frame to carry this clamping device * " direction, one also in the frame, under the Clamping device attached template support arrangement and a micro-adjusting device in order to be able to adjust the clamping device precisely in a horizontal plane with respect to the template, characterized by a path on an inclined plane (B), by a wedge (30) that can be displaced on the inclined plane, by a carriage (40) slidable on the surface of the wedge, by a self-aligning ball joint jig (70) which carries the jig in the carriage, by a drive device (H) to pull the wedge up and through the inclined plane an exposure arrangement (G). 2. Apparatus according to claim 1, characterized by a lowering arrangement to the wedge (30) to move a predetermined small distance down the inclined plane in order to place the parallel surface planes of the template (M) and the leaflet (W) opposite one another at a distance from one another. 3. Device according to claims 1 and 2, characterized by a rotary adjustment device (C) to align the patterns with respect to each other about a polar axis. 4. Device according to one of claims 1 to 3, characterized in that the template support device (D) and the leaflet chuck (C) are vacuum actuated. 5. Device according to claims 1 to 4, characterized by. a microscope (150) for Enlargement of the geometric pattern. 6. Apparatus according to claim 5, characterized in that the microscope is a stereo microscope and has a split field. 7. Device according to claims 1 to 6, characterized by one provided with openings Tower (210) with a lamp and a closer (260) which is rotatably held in the tower is to the exiting through the tower opening light beam after a predetermined Interrupt the interval. 8. Device according to claims 1 to 7, characterized in that the closer (260) 709 673/69 a pair of circumferentially spaced tabs (256, 257) and drive means (5) for rotating the shutter (260) a predetermined distance in a direction until the first tab (256) moves past the opening (211) , and means for rotating the closer (260) again in the same direction until the second tab (257) is in line with the opening. 9. Device according to claims 1 to 8, characterized in that the movement input direction for the closer (260) comprises a Geneva drive (270) , an actuating device (302) to cause the motor (F) to one full revolution, the closer (260) moving through an angle sufficient to release the opening (211) , and a timer um.die motor (F) to cause a second full revolution to rotate the closer (260) by a second angle - sufficient to close the opening (211). ■ For this purpose 4 sheets of drawings