CN203203860U - Tetrafluoroethylene silicon rod etching device - Google Patents
Tetrafluoroethylene silicon rod etching device Download PDFInfo
- Publication number
- CN203203860U CN203203860U CN201320191697.6U CN201320191697U CN203203860U CN 203203860 U CN203203860 U CN 203203860U CN 201320191697 U CN201320191697 U CN 201320191697U CN 203203860 U CN203203860 U CN 203203860U
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- Prior art keywords
- corrosion
- handle
- sample
- basket
- rod
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 13
- 239000010703 silicon Substances 0.000 title claims abstract description 13
- 238000005530 etching Methods 0.000 title claims description 4
- -1 Tetrafluoroethylene silicon Chemical compound 0.000 title abstract description 7
- 238000005260 corrosion Methods 0.000 claims abstract description 35
- 230000007797 corrosion Effects 0.000 claims abstract description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 6
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical compound FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 238000013461 design Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 abstract description 9
- 239000007787 solid Substances 0.000 abstract description 9
- 239000012498 ultrapure water Substances 0.000 abstract description 9
- 239000000126 substance Substances 0.000 abstract description 6
- 239000002253 acid Substances 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
本实用新型涉及的一种四氟乙烯硅棒腐蚀装置。它包括：二个腐蚀槽，一个用来化学腐蚀，另一个用来腐蚀之后的高纯水清洗；一个样棒篮，用于将腐蚀好的样棒从化学腐蚀腐蚀槽中取出再放入高纯水清洗腐蚀槽中，再将高纯水清洗完成后的硅棒取出；底面全部设计为孔板，三个侧面从底部到高度2mm位置为孔板，上方为实板，孔密度10000个/m2，便于酸液和水液全部漏尽。样棒篮上设计提手，方便手动操作，提手为半圆棒，在侧面实板位置，提手高度6cm。经实际使用验证，其具有低损耗，使用寿命长，可操作性强等优点。
The utility model relates to a tetrafluoroethylene silicon rod corrosion device. It includes: two corrosion tanks, one for chemical corrosion, the other for high-purity water cleaning after corrosion; a sample rod basket, used to take out the corroded sample rods from the chemical corrosion tank and put them into high-purity water for cleaning and corrosion In the tank, take out the silicon rods after cleaning with high-purity water; the bottom surface is designed as an orifice plate, the three sides from the bottom to the height of 2mm are orifice plates, and the top is a solid plate with a hole density of 10,000 pcs/m 2 , which is convenient for acid Drain all water and liquid. A handle is designed on the sample rod basket, which is convenient for manual operation. The handle is a semi-circular rod, which is on the side of the solid plate, and the height of the handle is 6cm. It has been verified by actual use that it has the advantages of low loss, long service life and strong operability.
Description
一、技术领域1. Technical field
本实用新型涉及一种四氟乙烯硅棒腐蚀装置，是一种用于制备单晶检验棒之前腐蚀处理器具。The utility model relates to a tetrafluoroethylene silicon rod corrosion device, which is a corrosion processing tool used for preparing single crystal inspection rods.
二、背景技术2. Background technology
检测多晶硅成品特性必要将其制备为单晶硅。用于制备单晶检验棒的多晶套料硅棒必须要经过化学腐蚀清洗，洗去表面氧化层和附带金属杂质。其制备出的单晶检验棒才能较好的还原多晶成品的特性。目前就多晶硅套料的形状看，并没有专用的腐蚀器具。To test the properties of polysilicon finished products, it is necessary to prepare it as single crystal silicon. The polycrystalline nested silicon rods used to prepare single crystal inspection rods must be cleaned by chemical corrosion to remove the surface oxide layer and accompanying metal impurities. Only the single crystal inspection rod prepared by it can better restore the characteristics of the polycrystalline finished product. At present, as far as the shape of the polysilicon nesting material is concerned, there is no special etching device.
腐蚀器具要求材质要和腐蚀用酸不发生反应。目前有的水晶槽符合不与硝酸和氢氟酸反应的特点。但其缺点是造价高且材质精脆，容易碎裂，使用寿命短。腐蚀后的样棒要求要尽量短时间暴露在空气中以免造成氧化。但由于样品形状的特殊性现在并没有专门将腐蚀好的样品取出的器具，这样就加大了取出样棒的难度。所以根据样品的特点，设计一套样品腐蚀的专用器具是很必要的。Corrosive appliances require materials that do not react with the acid used for corrosion. At present, some crystal tanks meet the characteristics of not reacting with nitric acid and hydrofluoric acid. But its disadvantage is that the cost is high and the material is brittle, easy to break, and the service life is short. Corroded sample rods are required to be exposed to air for as short a time as possible to avoid oxidation. However, due to the particularity of the shape of the sample, there is no special tool for taking out the corroded sample, which increases the difficulty of taking out the sample rod. Therefore, according to the characteristics of the sample, it is necessary to design a set of special equipment for sample corrosion.
三、实用新型的内容3. Contents of utility models
本实用新型的目的是提供一种四氟乙烯硅棒腐蚀装置，其成本低，材质硬度大，使用寿命长，可操作性强。The purpose of the utility model is to provide a tetrafluoroethylene silicon rod corrosion device, which has low cost, high material hardness, long service life and strong operability.
本实用新型的目的是这样来实现的：一种四氟乙烯硅棒腐蚀装置，它包括：二个腐蚀槽和一个样棒篮组成，腐蚀槽为长方体结构，底面和四个侧面密封，上面敞开；样棒篮长方体结构，底面和三个侧面密封，上面和一个侧面敞开，样棒篮的底面全部为孔板，孔密度10000个/m2，样棒篮的三个侧面从底部到高度2mm位置为孔板，上方为实板；所述的样棒篮的实板为四氟乙烯材质，孔板为四氟乙烯材质，样棒篮上设计提手，提手为半圆棒，提手安装在侧面实板位置，提手高度6cm。The purpose of this utility model is achieved in this way: a tetrafluoroethylene silicon rod corrosion device, which includes: two corrosion tanks and a sample rod basket, the corrosion tank is a cuboid structure, the bottom surface and four sides are sealed, and the top is open ;The sample basket has a cuboid structure, the bottom surface and three sides are sealed, and the top and one side are open. The bottom surface of the sample basket is all orifice plates with a hole density of 10,000 pcs/m 2 . The three sides of the sample basket are from the bottom to a height of 2mm The position is the orifice plate, and the upper part is the solid plate; the solid plate of the sample rod basket is made of tetrafluoroethylene, the orifice plate is made of tetrafluoroethylene, and the handle is designed on the sample rod basket. The handle is a semi-circular rod, and the handle is installed At the position of the solid side panel, the height of the handle is 6cm.
本实用新型设计一种四氟乙烯硅棒腐蚀套装，经实际使用验证，其具有低损耗，使用寿命长，可操作性强等优点。The utility model designs a tetrafluoroethylene silicon rod corrosion suit, which has the advantages of low loss, long service life, strong operability and the like through practical use verification.
四、附图说明4. Description of drawings
附图1为本实用新型腐蚀槽的结构示意图。Accompanying
附图2为本实用新型样棒篮的结构示意图。Accompanying
其中：in:
1----腐蚀槽、2----样棒篮、3----孔板、4----提手、5----实板。1----corrosion tank, 2----sample rod basket, 3----orifice plate, 4----handle, 5----solid plate.
五、具体实施方式5. Specific implementation
下面结合附图及实施例来对本实用新型作进一步详细描述：The utility model is described in further detail below in conjunction with accompanying drawing and embodiment:
参照附图，本实用新型一种四氟乙烯硅棒腐蚀装置，它包括：二个腐蚀槽1和一个样棒篮2组成，腐蚀槽1为长方体结构，底面和四个侧面密封，上面敞开；样棒篮2长方体结构，底面和三个侧面密封，上面和一个侧面敞开，二个腐蚀槽一个用来化学腐蚀，另一个用来腐蚀之后的高纯水清洗。样棒篮2的底面全部为孔板3，孔密度10000个/m2，样棒篮2的三个侧面从底部到高度2mm位置为孔板3，上方为实板5，样棒篮2用于将腐蚀好的样棒从化学腐蚀腐蚀槽中取出再放入高纯水清洗腐蚀槽中，再将高纯水清洗完成后的硅棒取出所述的样棒篮2的实板5为四氟乙烯材质，孔板3为四氟乙烯材质，样棒篮2上设计提手，提手4为半圆棒，提手4安装在侧面实板位置，提手高度6cm。With reference to accompanying drawing, a kind of tetrafluoroethylene silicon rod corrosion device of the present utility model, it comprises: two
进行腐蚀操作的时候要在化学腐蚀腐蚀槽中加入混合酸，高纯水清洗腐蚀槽中加入高纯水。将待腐蚀套料样棒放入样棒篮中，再抓住提手将其整个放入加入混合酸的腐蚀槽中进行腐蚀操作。腐蚀完成后再抓住提手将其整个提出混合酸再放入高纯水清洗腐蚀槽中进行清洗。整个过程的液体都通过样棒篮底的侧面的孔板结构漏入或者漏出。When performing corrosion operations, add mixed acid to the chemical corrosion tank, and add high-purity water to the high-purity water cleaning tank. Put the sample rod of the nesting material to be corroded into the sample rod basket, and then grasp the handle and put it into the corrosion tank with mixed acid for corrosion operation. After the corrosion is completed, grab the handle and lift it out of the mixed acid and put it into a high-purity water cleaning corrosion tank for cleaning. The liquid in the whole process leaks in or out through the orifice structure on the side of the bottom of the sample rod basket.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320191697.6U CN203203860U (en) | 2013-04-03 | 2013-04-03 | Tetrafluoroethylene silicon rod etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320191697.6U CN203203860U (en) | 2013-04-03 | 2013-04-03 | Tetrafluoroethylene silicon rod etching device |
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| Publication Number | Publication Date |
|---|---|
| CN203203860U true CN203203860U (en) | 2013-09-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320191697.6U Expired - Fee Related CN203203860U (en) | 2013-04-03 | 2013-04-03 | Tetrafluoroethylene silicon rod etching device |
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| Country | Link |
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| CN (1) | CN203203860U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106530943A (en) * | 2017-01-03 | 2017-03-22 | 华南理工大学 | Copper-clad plate corrosion device |
| CN107014813A (en) * | 2017-05-24 | 2017-08-04 | 东北大学 | A kind of steel continuous casting billet solidifies arborescent structure detection method |
-
2013
- 2013-04-03 CN CN201320191697.6U patent/CN203203860U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106530943A (en) * | 2017-01-03 | 2017-03-22 | 华南理工大学 | Copper-clad plate corrosion device |
| CN107014813A (en) * | 2017-05-24 | 2017-08-04 | 东北大学 | A kind of steel continuous casting billet solidifies arborescent structure detection method |
| CN107014813B (en) * | 2017-05-24 | 2019-07-19 | 东北大学 | A kind of steel continuous casting billet solidification arborescent structure detection method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130918 Termination date: 20200403 |
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| CF01 | Termination of patent right due to non-payment of annual fee |