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CN114899306A - A low temperature polarized system - Google Patents

A low temperature polarized system Download PDF

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CN114899306A
CN114899306A CN202210460539.XA CN202210460539A CN114899306A CN 114899306 A CN114899306 A CN 114899306A CN 202210460539 A CN202210460539 A CN 202210460539A CN 114899306 A CN114899306 A CN 114899306A
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module
polarization
electrode
polarized
voltage
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CN114899306B (en
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梁万国
冯新凯
陈怀熹
张新彬
古克义
李广伟
黄玉宝
邓亦斐
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Fujian Cas Ctl Photonics Tech Co ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/04Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/04After-treatment of single crystals or homogeneous polycrystalline material with defined structure using electric or magnetic fields or particle radiation
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/355Non-linear optics characterised by the materials used
    • G02F1/3551Crystals

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Abstract

The invention relates to a low-temperature polarization system, which comprises a refrigeration module, a constant-temperature module, a temperature regulation module, a reversal control module and a high-pressure module, wherein the refrigeration module is connected with the constant-temperature module through a pipeline; the refrigeration module is communicated with the constant temperature module; the temperature adjusting module is respectively connected with the refrigerating module and the constant temperature module; the reversing module is placed in the constant temperature module and comprises a reversing clamp and a polarizing electrode, the polarizing electrode is arranged in the reversing clamp, the reversing clamp is used for fixing a crystal to be polarized, and the polarizing electrode has a periodic structure matched with the crystal to be polarized; the high-voltage module is used for applying polarization voltage to the inversion module; the reversing module, the reversing control module and the high-voltage module are connected with each other pairwise, the reversing control module receives charge signals from the reversing module, and whether the high-voltage module is triggered to apply polarization voltage to a polarization electrode of the reversing module or not is judged automatically according to the charge signals.

Description

一种低温极化系统A low temperature polarized system

技术领域technical field

本发明涉及铁电晶体极化领域,具体涉及一种低温极化系统。The invention relates to the field of ferroelectric crystal polarization, in particular to a low temperature polarization system.

背景技术Background technique

周期极化磷酸氧钛钾(periodically poled KTP,简称PPKTP)是一种非自然存在的人工晶体,它具有很高的永久性损伤阈值,在室温下运行光折变效应不明显,非线性系数高等优点,广泛用于波长的高效转换。Periodically poled potassium titanyl phosphate (periodically poled KTP, referred to as PPKTP) is an unnatural intraocular lens with a high permanent damage threshold, no obvious photorefractive effect at room temperature, and high nonlinear coefficient. Advantages, widely used in efficient conversion of wavelengths.

PPKTP是极具竞争力的新型短波长光源的核心器件,由于双折射相位匹配存在玻应廷走离效应,限制了非线性转换效率的提高,准相位匹配不存在这样的缺点,它可以在整个晶体长度上实现非临界匹配,因此其相互作用长度不受限制,并且可以获得在晶体的透过范围内整个光谱的谐波输出。PPKTP is the core device of a very competitive new type of short-wavelength light source. Due to the Boying walk-off effect of birefringence phase matching, the improvement of nonlinear conversion efficiency is limited. Quasi-phase matching does not have such a disadvantage. The non-critical matching is achieved over the crystal length, so the interaction length is not limited, and the harmonic output of the entire spectrum in the transmission range of the crystal can be obtained.

目前,主要采用高压电场极化技术获得PPKTP晶体,但是由于磷酸氧钛钾(KTP)晶体本身含有金属离子K,因此具有一定的导电性,从而使高压电场极化PPKTP的成品率很低,或者根本无法极化。公开号为US20030102441A1的美国发明专利公开了一种利用扫描力显微镜(SFM)实施的扫描探针装置在KTP上形成极化结构的技术方案,其中揭示了在170K低温条件下能够降低KTP的导电率,然而其通过扫描探针装置在KTP上逐个形成极化结构的方式对于生产PPKTP来说效率极其低下。At present, the high-voltage electric field polarization technology is mainly used to obtain PPKTP crystal, but since potassium titanyl phosphate (KTP) crystal itself contains metal ion K, it has a certain conductivity, so that the yield of high-voltage electric field polarization PPKTP is very low, or Can't be polarized at all. The United States Patent for Invention Publication No. US20030102441A1 discloses a technical solution for forming a polarized structure on KTP using a scanning force microscope (SFM) scanning probe device, which discloses that the conductivity of KTP can be reduced at a low temperature of 170K , however, its way of forming polarized structures one by one on KTP by scanning probe device is extremely inefficient for producing PPKTP.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提供一种低温极化系统,一方面可降低快离子介电晶体材料的电导率,使之与普通介电晶体的电导率相当,另一方面能高效生产周期性极化晶体。The purpose of the present invention is to provide a low-temperature polarization system, which on the one hand can reduce the electrical conductivity of fast ion dielectric crystal materials to make it comparable to that of ordinary dielectric crystals, and on the other hand can efficiently produce periodically polarized crystals .

为实现上述目的,本发明通过如下技术方案实现:To achieve the above object, the present invention is achieved through the following technical solutions:

本发明提供一种低温极化系统,包括制冷模块、恒温模块、温度调节模块、反转模块、反转控制模块和高压模块;所述制冷模块与恒温模块相互连通;所述温度调节模块分别与制冷模块以及恒温模块连接;所述反转模块放置于恒温模块中,所述反转模块包括反转夹具和极化电极,极化电极设置于反转夹具内,所述反转夹具用于固定待极化晶体,所述极化电极具有与待极化晶体相匹配的周期性结构;所述高压模块用于向反转模块施加极化电压;所述反转模块、反转控制模块和高压模块两两相互连接,反转控制模块接收来自反转模块中的电荷信号,并根据电荷信号自动判断是否触发高压模块向反转模块的极化电极施加极化电压。The invention provides a low-temperature polarization system, comprising a refrigeration module, a constant temperature module, a temperature adjustment module, an inversion module, an inversion control module and a high-voltage module; the refrigeration module and the constant temperature module are communicated with each other; the temperature adjustment module is respectively connected with The refrigeration module and the constant temperature module are connected; the inversion module is placed in the constant temperature module, and the inversion module includes a reversal clamp and a polarized electrode, and the polarized electrode is arranged in the inversion clamp, and the inversion clamp is used for fixing The crystal to be polarized, the polarized electrode has a periodic structure matching the crystal to be polarized; the high-voltage module is used to apply a polarization voltage to the inversion module; the inversion module, the inversion control module and the high-voltage The modules are connected to each other, and the inversion control module receives the charge signal from the inversion module, and automatically judges according to the charge signal whether to trigger the high-voltage module to apply a polarization voltage to the polarization electrodes of the inversion module.

进一步地,所述极化电极设置于待极化晶体的两侧;两侧的极化电极至少有一侧具有周期性结构。Further, the polarized electrodes are arranged on both sides of the crystal to be polarized; at least one side of the polarized electrodes on both sides has a periodic structure.

进一步地,所述极化电极为金属电极或液体电极中的任意一种。Further, the polarized electrode is any one of a metal electrode or a liquid electrode.

进一步地,所述金属电极包括导电区、绝缘液体以及第一O型圈,所述导电区设置于待极化晶体表面,所述导电区可根据极化需求设置为周期性结构或平面结构,所述绝缘液体浸没整个导电区101并密封在第一O型圈内;所述绝缘液体包括绝缘油以及均匀散布在绝缘油中的防冻颗粒;所述绝缘油为矿物绝缘油、合成绝缘油和植物油中的任意一种或几种,所述防冻颗粒为聚酰亚胺颗粒、聚酰胺酰亚胺颗粒、超高分子量聚乙烯颗粒中的任意一种或几种;Further, the metal electrode includes a conductive area, an insulating liquid and a first O-ring, the conductive area is disposed on the surface of the crystal to be polarized, and the conductive area can be set to a periodic structure or a planar structure according to polarization requirements, The insulating liquid immerses the entire conductive area 101 and is sealed in the first O-ring; the insulating liquid includes insulating oil and antifreeze particles evenly dispersed in the insulating oil; the insulating oil is mineral insulating oil, synthetic insulating oil and Any one or more of vegetable oils, and the antifreeze particles are any one or more of polyimide particles, polyamideimide particles, and ultra-high molecular weight polyethylene particles;

进一步地,所述液体电极包括绝缘区、导电液体以及第二O型圈,所述绝缘区设置于待极化晶体表面,所述绝缘区可根据极化需求设置为周期性结构或长条镂空结构,所述导电液体浸没整个绝缘区并密封在第二O型圈内;所述导电液体包括液氮以及均匀散布在液氮中的金属纳米颗粒,所述金属纳米颗粒为Au纳米颗粒、Ag纳米颗粒、Al纳米颗粒、Cu纳米颗粒中的任意一种或几种。Further, the liquid electrode includes an insulating area, a conductive liquid and a second O-ring, the insulating area is arranged on the surface of the crystal to be polarized, and the insulating area can be set as a periodic structure or a long hollow according to polarization requirements. structure, the conductive liquid immerses the entire insulating area and is sealed in the second O-ring; the conductive liquid includes liquid nitrogen and metal nanoparticles uniformly dispersed in the liquid nitrogen, the metal nanoparticles are Au nanoparticles, Ag nanoparticles Any one or several of nanoparticles, Al nanoparticles, and Cu nanoparticles.

进一步地,所述恒温模块的工作温度为-150到-100摄氏度。Further, the working temperature of the constant temperature module is -150 to -100 degrees Celsius.

进一步地,所述反转控制模块包括积分器以及与积分器连接的比较器,积分器连接于极化电极,比较器连接于高压模块,所述积分器用于对所述极化电极上的电荷进行积分,所述比较器设置有电荷预设值。Further, the inversion control module includes an integrator and a comparator connected with the integrator, the integrator is connected to the polarized electrode, and the comparator is connected to the high-voltage module, and the integrator is used for the charge on the polarized electrode. Integration is performed, the comparator is set with a preset charge value.

进一步地,所述高压模块包括波形发生器以及与波形发生器电连接的高压放大器,所述波形发生器包括触发器,所述高压放大器包括电极引线,所述电极引线连接于极化电极。Further, the high-voltage module includes a waveform generator and a high-voltage amplifier electrically connected to the waveform generator, the waveform generator includes a trigger, and the high-voltage amplifier includes an electrode lead connected to the polarized electrode.

进一步地,所述高压放大器施加的极化电压为1-25KV/mm。Further, the polarization voltage applied by the high-voltage amplifier is 1-25KV/mm.

进一步地,所述待极化晶体为铁电晶体,所述铁电晶体包括KTP、SLT、LN中的任意一种。Further, the crystal to be polarized is a ferroelectric crystal, and the ferroelectric crystal includes any one of KTP, SLT, and LN.

本发明具有如下有益效果:The present invention has the following beneficial effects:

1、本发明提供一种低温极化系统,通过低温极化方法降低了快离子介电晶体材料的电导率,同时,通过制冷模块、恒温模块、温度调节模块、反转模块、反转控制模块和高压模块相互配合,实现了生产周期性极化晶体的自动化,大大提高了周期性极化晶体的生产效率。1. The present invention provides a low-temperature polarization system, which reduces the electrical conductivity of the fast ion dielectric crystal material through a low-temperature polarization method, and at the same time, through a refrigeration module, a constant temperature module, a temperature adjustment module, an inversion module, and an inversion control module. It cooperates with the high-voltage module to realize the automation of the production of periodically polarized crystals, and greatly improves the production efficiency of periodically polarized crystals.

2、本发明对反转模块做了大量优化,实现了在低温环境下使用金属电极或液体电极对待极化晶体的极化,特别是在-150摄氏度至-100摄氏度环境下对待极化晶体的极化。2. The invention has made a lot of optimization on the inversion module, and realized the polarization of the polarized crystal using metal electrodes or liquid electrodes in a low temperature environment, especially the polarized crystal in the environment of -150 degrees Celsius to -100 degrees Celsius. polarization.

3、本发明通过积分器与比较器的配合,实现了极化的自动化,自动化成本低,效率高。3. The present invention realizes the automation of polarization through the cooperation of the integrator and the comparator, with low automation cost and high efficiency.

4、本发明的恒温模块结构简单,制冷效果好,并通过计算机与多种传感器的配合,实现了自动恒温的技术效果。4. The constant temperature module of the present invention has a simple structure and good cooling effect, and realizes the technical effect of automatic constant temperature through the cooperation of the computer and various sensors.

附图说明Description of drawings

附图1是本发明的低温极化系统的整体结构示意图;Accompanying drawing 1 is the overall structure schematic diagram of the low temperature polarization system of the present invention;

附图2是本发明的恒温腔室的整体结构示意图;Accompanying drawing 2 is the overall structure schematic diagram of the constant temperature chamber of the present invention;

附图3是本发明反转模块中反转电极的周期性结构在待反转电极上侧的结构示意图;3 is a schematic structural diagram of the periodic structure of the inversion electrode in the inversion module of the present invention on the upper side of the electrode to be inverted;

附图4是本发明反转模块中反转电极的周期性结构在待反转电极下侧的结构示意图;4 is a schematic structural diagram of the periodic structure of the inversion electrode in the inversion module of the present invention on the lower side of the electrode to be inverted;

附图5是本发明反转模块中反转电极的周期性结构在待反转电极两侧的结构示意图。FIG. 5 is a schematic structural diagram of the periodic structure of the inversion electrode in the inversion module of the present invention on both sides of the electrode to be inverted.

图中附图标记表示为:The reference numbers in the figure are indicated as:

1、液氮罐体;2、液氮抽泵;3、流量计;4、第一加热器;5、计算机;6、控制电路;7、用户界面;8、恒温腔室;81、外腔壁;82、外腔;83、内腔;84、开口;9、反转夹具;10、极化电极;101、导电区;102、绝缘液体;103、第一O型圈;104、绝缘区;105、导电液体;106、第二O型圈;11、温度传感器;12、压力传感器;13、第二加热器;14、氮气阀;15、积分器;16、比较器;17、波形发生器;18、高压放大器;19、电极引线;20、触发器。1. Liquid nitrogen tank; 2. Liquid nitrogen pump; 3. Flow meter; 4. First heater; 5. Computer; 6. Control circuit; 7. User interface; 8. Constant temperature chamber; 81. External cavity wall; 82, outer cavity; 83, inner cavity; 84, opening; 9, reversing clamp; 10, polarized electrode; 101, conductive area; 102, insulating liquid; 103, first O-ring; 104, insulating area ; 105, conductive liquid; 106, second O-ring; 11, temperature sensor; 12, pressure sensor; 13, second heater; 14, nitrogen valve; 15, integrator; 16, comparator; 17, waveform generation 18. High voltage amplifier; 19. Electrode lead; 20. Trigger.

具体实施方式Detailed ways

下面结合附图和具体实施例来对本发明进行详细的说明。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

如图1所示,本发明提供一种低温极化系统,包括制冷模块、恒温模块、温度调节模块、反转模块、反转控制模块和高压模块;所述制冷模块与恒温模块相互连通;所述温度调节模块分别与制冷模块以及恒温模块连接,温度调节模块可获取恒温模块实时的温度检测结果,并根据获得的温度检测结果及时调节制冷模块的制冷效果;所述反转模块放置于恒温模块中,所述反转模块包括反转夹具9和极化电极10,所述反转夹具9用于固定待极化晶体,所述极化电极10具有与待极化晶体相匹配的周期性结构;所述高压模块用于向反转模块施加极化电压;所述反转模块、反转控制模块和高压模块两两相互连接,反转控制模块接收来自反转模块中的电荷信号,并根据电荷信号判断是否触发高压模块向反转模块的极化电极10施加极化电压。As shown in FIG. 1, the present invention provides a low-temperature polarization system, including a refrigeration module, a constant temperature module, a temperature adjustment module, an inversion module, an inversion control module and a high-voltage module; the refrigeration module and the constant temperature module are communicated with each other; The temperature adjustment module is respectively connected with the refrigeration module and the constant temperature module, and the temperature adjustment module can obtain the real-time temperature detection result of the constant temperature module, and adjust the cooling effect of the refrigeration module in time according to the obtained temperature detection result; the inversion module is placed in the constant temperature module , the reversing module includes a reversing fixture 9 and a polarizing electrode 10, the reversing fixture 9 is used to fix the crystal to be polarized, and the polarizing electrode 10 has a periodic structure that matches the crystal to be polarized The high-voltage module is used to apply a polarized voltage to the inversion module; the inversion module, the inversion control module and the high-voltage module are connected to each other, and the inversion control module receives the charge signal from the inversion module, and according to The charge signal determines whether to trigger the high-voltage module to apply a polarization voltage to the polarization electrode 10 of the inversion module.

具体地,所述制冷模块包括顺次连接的液氮罐体1、液氮抽泵2和流量计3,用于向恒温模块输送液氮,所述液氮抽泵2包括第一加热器4,所述第一加热器4用于加热液氮抽泵2,防止液氮抽泵2因冻结而无法抽取液氮;Specifically, the refrigeration module includes a liquid nitrogen tank 1 , a liquid nitrogen pump 2 and a flow meter 3 that are connected in sequence to deliver liquid nitrogen to the constant temperature module, and the liquid nitrogen pump 2 includes a first heater 4 , the first heater 4 is used to heat the liquid nitrogen pump 2 to prevent the liquid nitrogen pump 2 from being unable to extract liquid nitrogen due to freezing;

所述恒温模块包括恒温腔室8、温度传感器11、压力传感器12、第二加热器13和氮气阀14,用于对反转模块提供恒温环境,所述恒温腔室8由外到内包括外腔壁81、外腔82和内腔83,所述外腔壁81上设置有开口84,所述液氮罐体1通过开口84与外腔82连通,所述外腔82用于接收来自制冷模块的液氮,所述内腔83用于放置反转模块,所述温度传感器11设置于内腔83中,用于监测内腔83的温度,所述压力传感器12和第二加热器13设置于外腔82中,压力传感器12用于监测外腔82内部的压力,第二加热器13用于加热外腔82内的液氮以调节恒温腔室8的温度,所述氮气阀14设置于外腔壁81上,当外腔82内的压力超过一定值时,可通过所述氮气阀14进行泄压;进一步地,所述的恒温腔室8的温度控制在-150到-100摄氏度之间,即恒温模块的工作温度为-150到-100摄氏度;The constant temperature module includes a constant temperature chamber 8, a temperature sensor 11, a pressure sensor 12, a second heater 13 and a nitrogen valve 14, which are used to provide a constant temperature environment for the inversion module. The cavity wall 81, the outer cavity 82 and the inner cavity 83, the outer cavity wall 81 is provided with an opening 84, the liquid nitrogen tank 1 communicates with the outer cavity 82 through the opening 84, and the outer cavity 82 is used to receive the cooling The liquid nitrogen of the module, the inner cavity 83 is used to place the inversion module, the temperature sensor 11 is arranged in the inner cavity 83 to monitor the temperature of the inner cavity 83, the pressure sensor 12 and the second heater 13 are arranged In the outer chamber 82, the pressure sensor 12 is used to monitor the pressure inside the outer chamber 82, the second heater 13 is used to heat the liquid nitrogen in the outer chamber 82 to adjust the temperature of the thermostatic chamber 8, and the nitrogen valve 14 is arranged at On the outer cavity wall 81, when the pressure in the outer cavity 82 exceeds a certain value, the pressure can be released through the nitrogen valve 14; further, the temperature of the thermostatic chamber 8 is controlled between -150 and -100 degrees Celsius. time, that is, the working temperature of the constant temperature module is -150 to -100 degrees Celsius;

所述温度调节模块包括计算机5和控制电路6,所述计算机5分别电连接温度传感器11、压力传感器12以及流量计3,接收来自温度传感器11、压力传感器12以及流量计3的信号,以便掌握恒温腔室8内的液氮情况,所述计算机5还电连接于恒温腔室8内的第二加热器13以及控制电路6,控制电路6连接于液氮抽泵2、第一加热器4以及氮气阀14,计算机5通过第二加热器13调节恒温腔室8的温度,计算机5通过控制电路6实现对液氮抽泵2、第一加热器4以及氮气阀14的控制,具体地,计算机5通过控制电路6控制液氮抽泵2的液氮抽取量,计算机5通过控制电路6控制第一加热器4以保证液氮抽泵2的正常工作,计算机5通过控制电路6控制氮气阀14以保证外腔82内的压力正常;The temperature adjustment module includes a computer 5 and a control circuit 6. The computer 5 is electrically connected to the temperature sensor 11, the pressure sensor 12, and the flow meter 3, respectively, and receives signals from the temperature sensor 11, the pressure sensor 12, and the flow meter 3, so as to grasp the The situation of liquid nitrogen in the constant temperature chamber 8, the computer 5 is also electrically connected to the second heater 13 and the control circuit 6 in the constant temperature chamber 8, and the control circuit 6 is connected to the liquid nitrogen pump 2, the first heater 4 And the nitrogen valve 14, the computer 5 regulates the temperature of the constant temperature chamber 8 through the second heater 13, and the computer 5 realizes the control of the liquid nitrogen pump 2, the first heater 4 and the nitrogen valve 14 through the control circuit 6, specifically, The computer 5 controls the liquid nitrogen extraction amount of the liquid nitrogen pump 2 through the control circuit 6, the computer 5 controls the first heater 4 through the control circuit 6 to ensure the normal operation of the liquid nitrogen pump 2, and the computer 5 controls the nitrogen valve through the control circuit 6. 14 to ensure that the pressure in the outer cavity 82 is normal;

所述反转模块包括反转夹具9和极化电极10,极化电极10设置于反转夹具9内,反转夹具9用于固定待极化晶体,极化电极10用于将极化电压施加至待极化晶体相应位置,从而实现对待极化晶体的极化,所述极化电极10设置于待极化晶体的两侧;所述待极化晶体为铁电晶体,所述铁电晶体包括KTP、SLT、LN中的任意一种;The reversing module includes a reversing fixture 9 and a polarizing electrode 10. The polarizing electrode 10 is arranged in the reversing fixture 9. The reversing fixture 9 is used to fix the crystal to be polarized, and the polarizing electrode 10 is used to convert the polarization voltage. Applied to the corresponding position of the crystal to be polarized, so as to realize the polarization of the crystal to be polarized, the polarizing electrodes 10 are arranged on both sides of the crystal to be polarized; the crystal to be polarized is a ferroelectric crystal, and the ferroelectric Crystal includes any one of KTP, SLT, LN;

进一步地,如图3-5所示,两侧的极化电极10至少有一侧具有周期性结构,所述极化电极10为金属电极或液体电极中的任意一种。当极化电极10为金属电极时,所述极化电极10包括导电区101、绝缘液体102以及第一O型圈103,所述导电区101设置于待极化晶体表面,所述导电区101可根据极化需求设置为周期性结构或平面结构,所述绝缘液体102浸没整个导电区101并密封在第一O型圈103内;所述导电区101由导电金属材料制成,所述导电金属材料可以是Al、Au、Ag、Cr、Cu、Ni、Pd、Ta、Mo、W、Ta中的任意一种或几种,优选为AuCr;所述绝缘液体102包括绝缘油以及均匀散布在绝缘油中的防冻颗粒;所述绝缘油为矿物绝缘油、合成绝缘油和植物油中的任意一种或几种,所述防冻颗粒为聚酰亚胺颗粒、聚酰胺酰亚胺颗粒、超高分子量聚乙烯颗粒中的任意一种或几种,所述防冻颗粒可降低绝缘液体102的冰点,使绝缘液体102在-150到-100摄氏度之间能够保持液态。当极化电极10为液体电极时,所述极化电极10包括绝缘区104、导电液体105以及第二O型圈106,所述绝缘区104设置于待极化晶体表面,所述绝缘区104可根据极化需求设置为周期性结构或长条镂空结构,所述导电液体105浸没整个绝缘区104并密封在第二O型圈106内;所述绝缘区104由绝缘材料制成,所述绝缘材料为聚酰胺酰亚胺、超高分子量聚乙烯中的任意一种或几种,所述导电液体105包括液氮以及均匀散布在液氮中的金属纳米颗粒,该导电液体105在-150到-100摄氏度之间能够保持液态,所述金属纳米颗粒为Au纳米颗粒、Ag纳米颗粒、Al纳米颗粒、Cu纳米颗粒中的任意一种或几种;Further, as shown in FIGS. 3-5 , at least one side of the polarized electrodes 10 on both sides has a periodic structure, and the polarized electrodes 10 are any one of metal electrodes or liquid electrodes. When the polarizing electrode 10 is a metal electrode, the polarizing electrode 10 includes a conductive area 101 , an insulating liquid 102 and a first O-ring 103 , the conductive area 101 is disposed on the surface of the crystal to be polarized, and the conductive area 101 It can be set as a periodic structure or a plane structure according to polarization requirements, the insulating liquid 102 is immersed in the entire conductive area 101 and sealed in the first O-ring 103; the conductive area 101 is made of conductive metal material, and the conductive The metal material can be any one or more of Al, Au, Ag, Cr, Cu, Ni, Pd, Ta, Mo, W, Ta, preferably AuCr; the insulating liquid 102 includes insulating oil and is uniformly dispersed in the Antifreeze particles in insulating oil; the insulating oil is any one or more of mineral insulating oil, synthetic insulating oil and vegetable oil, and the antifreeze particles are polyimide particles, polyamideimide particles, ultra-high Any one or several of the molecular weight polyethylene particles, the antifreeze particles can reduce the freezing point of the insulating liquid 102, so that the insulating liquid 102 can remain liquid at temperatures between -150 and -100 degrees Celsius. When the polarizing electrode 10 is a liquid electrode, the polarizing electrode 10 includes an insulating area 104, a conductive liquid 105 and a second O-ring 106. The insulating area 104 is disposed on the surface of the crystal to be polarized, and the insulating area 104 It can be set as a periodic structure or a long hollow structure according to polarization requirements, the conductive liquid 105 is immersed in the entire insulating area 104 and sealed in the second O-ring 106; the insulating area 104 is made of insulating material, the The insulating material is any one or more of polyamideimide and ultra-high molecular weight polyethylene. The conductive liquid 105 includes liquid nitrogen and metal nanoparticles uniformly dispersed in the liquid nitrogen. The conductive liquid 105 is at -150 A liquid state can be maintained between -100 degrees Celsius, and the metal nanoparticles are any one or more of Au nanoparticles, Ag nanoparticles, Al nanoparticles, and Cu nanoparticles;

所述反转控制模块包括积分器15以及与积分器15连接的比较器16,积分器15连接于极化电极10,比较器16连接于高压模块,所述积分器15用于对所述极化电极10上的电荷进行积分,所述比较器16设置有电荷预设值,用于比较积分器15的电荷积分结果与电荷预设值之间的大小,并根据比较结果判断是否向高压模块发送启动命令或重启命令,所述高压模块接收到反转控制模块的启动命令或重启命令后能对反转模块施加极化电压;进一步地,所述反转控制模块连接于计算机5,可通过计算机5设置反向控制模块施加极化电压的触发条件,具体地,所述反转控制模块的比较器16连接于计算机5,可通过所述计算机5设置所述比较器16的电荷预设值;The inversion control module includes an integrator 15 and a comparator 16 connected to the integrator 15. The integrator 15 is connected to the polarized electrode 10, and the comparator 16 is connected to the high-voltage module. The electric charge on the integrator 10 is integrated, and the comparator 16 is provided with a preset electric charge value, which is used to compare the magnitude of the electric charge integration result of the integrator 15 and the electric charge preset value, and judge whether to send the electric charge to the high-voltage module according to the comparison result. Sending a start command or a restart command, the high-voltage module can apply a polarized voltage to the inversion module after receiving the start command or restart command of the inversion control module; further, the inversion control module is connected to the computer 5, which can be The computer 5 sets the trigger condition for the inversion control module to apply the polarization voltage. Specifically, the comparator 16 of the inversion control module is connected to the computer 5, and the pre-set value of the electric charge of the comparator 16 can be set by the computer 5 ;

所述高压模块包括波形发生器17以及与波形发生器17电连接的高压放大器18,所述波形发生器17包括触发器20,所述高压放大器18包括电极引线19,所述电极引线19连接于极化电极10,当触发器20向波形发生器17发送触发命令后,波形发生器17产生脉冲波形发送至高压放大器18中,高压放大器18将脉冲波形进行放大产生极化电压,极化电压通过电极引线19施加到极化电极10上,从而完成对待极化晶体的一次;所述波形发生器17还连接于所述比较器16,波形发生器17接收到比较器16的启动命令或重启命令后,波形发生器17产生脉冲波形发送至高压放大器18中,高压放大器18将脉冲波形进行放大产生极化电压,极化电压通过电极引线19施加到极化电极10上,从而对待极化晶体进行多次极化,对待极化晶体的极化效果进行进一步的完善;进一步地,所述高压放大器18施加的极化电压为1-25KV/mm。The high-voltage module includes a waveform generator 17 and a high-voltage amplifier 18 electrically connected to the waveform generator 17, the waveform generator 17 includes a trigger 20, the high-voltage amplifier 18 includes an electrode lead 19, and the electrode lead 19 is connected to the For the polarization electrode 10, after the trigger 20 sends a trigger command to the waveform generator 17, the waveform generator 17 generates a pulse waveform and sends it to the high-voltage amplifier 18, and the high-voltage amplifier 18 amplifies the pulse waveform to generate a polarization voltage. The electrode lead 19 is applied to the polarized electrode 10, thereby completing the crystal to be polarized once; the waveform generator 17 is also connected to the comparator 16, and the waveform generator 17 receives the start command or restart command of the comparator 16 Then, the waveform generator 17 generates a pulse waveform and sends it to the high-voltage amplifier 18. The high-voltage amplifier 18 amplifies the pulse waveform to generate a polarization voltage, and the polarization voltage is applied to the polarization electrode 10 through the electrode lead 19, so that the crystal to be polarized is processed After multiple polarizations, the polarization effect of the crystal to be polarized is further improved; further, the polarization voltage applied by the high-voltage amplifier 18 is 1-25KV/mm.

本发明的低温极化系统的使用方法与工作原理:The use method and working principle of the low temperature polarization system of the present invention:

本发明的低温极化过程主要涉及控温过程和极化过程:将待极化晶体放置到恒温模块中,用户通过温度调节模块控制制冷模块和恒温模块,从而实现待极化晶体的环境温度的控制与调节;当待极化晶体的环境温度达到预定条件后,用户通过反转控制模块控制高压模块向反转模块施加极化电压,从而完成对待极化晶体的极化。进一步地,温度调节模块包括计算机5,所述计算机5包括用户界面7,用户可通过用户界面7设置恒温模块的恒温值;进一步地,计算机5连接至反向控制模块,用户可在计算机5上设置反向控制模块施加极化电压的触发条件。The low-temperature polarization process of the present invention mainly involves a temperature control process and a polarization process: the crystal to be polarized is placed in the constant temperature module, and the user controls the refrigeration module and the constant temperature module through the temperature adjustment module, so as to realize the ambient temperature of the crystal to be polarized. Control and adjustment; when the ambient temperature of the crystal to be polarized reaches a predetermined condition, the user controls the high-voltage module to apply a polarization voltage to the inversion module through the inversion control module, thereby completing the polarization of the to-be-polarized crystal. Further, the temperature adjustment module includes a computer 5, and the computer 5 includes a user interface 7, and the user can set the constant temperature value of the constant temperature module through the user interface 7; further, the computer 5 is connected to the reverse control module, and the user can Set the trigger condition for the reverse control module to apply the polarization voltage.

具体地,在控温过程中,用户通过计算机5的用户界面7输入需要的极化温度,计算机5通过控制电路6控制液氮抽泵2抽取液氮罐体1里的液氮,液氮在计算机5的控制下输送至恒温腔室8中。在输送液氮过程中,计算机5可控制第一加热器4对液氮抽泵2进行加热,从而防止液氮抽泵2因冻结而无法抽取液氮;液氮被输送至恒温腔室8的外腔82内,由温度传感器11实时监测外腔82内的温度,计算机5通过第二加热器13对外腔82内的液氮进行加热,从而调节恒温腔室8内的恒温值。进一步地,计算机5还能调节外腔82内的压力,具体地,计算机5通过压力传感器12可实时获得外腔82内的压力值,通过流量计3能控制液氮的输送速度以及输送总量,通过可控制电路6控制氮气阀14的开闭,因此,计算机结合压力传感器12的数据,通过流量计3和氮气阀14合理控制外腔82内的氮气总量,从而实现对外腔82内压力的调节。Specifically, in the temperature control process, the user inputs the required polarization temperature through the user interface 7 of the computer 5, and the computer 5 controls the liquid nitrogen pump 2 to extract the liquid nitrogen in the liquid nitrogen tank 1 through the control circuit 6, and the liquid nitrogen is It is transported to the constant temperature chamber 8 under the control of the computer 5 . In the process of delivering liquid nitrogen, the computer 5 can control the first heater 4 to heat the liquid nitrogen pump 2, thereby preventing the liquid nitrogen pump 2 from being unable to extract liquid nitrogen due to freezing; the liquid nitrogen is transported to the constant temperature chamber 8 In the outer cavity 82 , the temperature in the outer cavity 82 is monitored in real time by the temperature sensor 11 , and the computer 5 heats the liquid nitrogen in the outer cavity 82 through the second heater 13 to adjust the constant temperature value in the constant temperature chamber 8 . Further, the computer 5 can also adjust the pressure in the outer cavity 82. Specifically, the computer 5 can obtain the pressure value in the outer cavity 82 in real time through the pressure sensor 12, and can control the conveying speed and the total amount of liquid nitrogen through the flow meter 3. , the opening and closing of the nitrogen valve 14 is controlled by the controllable circuit 6. Therefore, the computer combines the data of the pressure sensor 12 to reasonably control the total amount of nitrogen in the outer cavity 82 through the flow meter 3 and the nitrogen valve 14, so as to realize the pressure in the outer cavity 82. adjustment.

当待极化晶体的环境温度达到预定条件后,可对待极化晶体进行极化,具体地,用户通过触发器20启动波形发生器17产生脉冲波形,脉冲波形信号经由高压放大器18放大,放大后的脉冲波形信号依次通过电极引线19、反转夹具9加到极化电极10上,从而完成待极化晶体(如KTP)的一次极化。待极化晶体往往需要进行多次极化才能得到高质量的极化晶体,因此,在完成第一次极化后,还需要反转控制模块产生多次脉冲信号对待极化晶体进行多次极化。本发明在完成第一次极化后,通过积分器15、比较器16对反转模块里的电荷进行积分比较处理,若处理结果小于预设值,则向波形发生器17发送重启信号,再次产生脉冲波形,若处理结果大于预设值,则极化过程结束。进一步的,计算机5连接至反向控制模块,用户可在计算机5的用户界面7上设置所述预设值。When the ambient temperature of the crystal to be polarized reaches a predetermined condition, the crystal to be polarized can be polarized. Specifically, the user starts the waveform generator 17 through the trigger 20 to generate a pulse waveform, and the pulse waveform signal is amplified by the high-voltage amplifier 18. The pulse waveform signal of 10 is applied to the polarized electrode 10 through the electrode lead 19 and the reversal clamp 9 in turn, thereby completing the primary polarization of the crystal to be polarized (such as KTP). The crystal to be polarized often needs to be polarized multiple times to obtain a high-quality polarized crystal. Therefore, after the first polarization is completed, it is necessary to invert the control module to generate multiple pulse signals to perform multiple polarizations of the crystal to be polarized. change. In the present invention, after the first polarization is completed, the integrator 15 and the comparator 16 are used to integrate and compare the charges in the inversion module. If the processing result is less than the preset value, a restart signal is sent to the waveform generator 17, and the A pulse waveform is generated, and if the processing result is greater than the preset value, the polarization process ends. Further, the computer 5 is connected to the reverse control module, and the user can set the preset value on the user interface 7 of the computer 5 .

以上所述仅为本发明的实施例,并非因此限制本发明的专利范围,凡是利用本发明说明书内容所作的等效结构或等效流程变换,或直接或间接运用在其他相关的技术领域,均同理包括在本发明的专利保护范围内。The above descriptions are only the embodiments of the present invention, and do not limit the scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description of the present invention, or directly or indirectly applied in other related technical fields, will not limit the scope of the invention. Similarly, it is included in the scope of patent protection of the present invention.

Claims (10)

1. A cryogenic polarization system, comprising: the device comprises a refrigeration module, a constant temperature module, a temperature regulation module, a reverse control module and a high-pressure module; the refrigeration module is communicated with the constant temperature module; the temperature adjusting module is respectively connected with the refrigerating module and the constant temperature module; the inversion module is placed in the constant temperature module and comprises an inversion clamp (9) and a polarization electrode (10), the polarization electrode (10) is arranged in the inversion clamp (9), the inversion clamp (9) is used for fixing a crystal to be polarized, and the polarization electrode (10) is provided with a periodic structure matched with the crystal to be polarized; the high-voltage module is used for applying polarization voltage to the inversion module; the reversing module, the reversing control module and the high-voltage module are connected with each other pairwise, the reversing control module receives charge signals from the reversing module, and whether the high-voltage module is triggered to apply polarization voltage to a polarization electrode (10) of the reversing module or not is judged automatically according to the charge signals.
2. A cryogenic polarization system as claimed in claim 1, wherein: the polarization electrodes (10) are arranged on two sides of the crystal to be polarized; at least one side of the polarized electrodes (10) on both sides has a periodic structure.
3. A cryogenic polarization system as claimed in claim 2, wherein: the polarizing electrode (10) is any one of a metal electrode or a liquid electrode.
4. A cryogenic polarization system as claimed in claim 3, wherein: the metal electrode comprises a conductive area (101), insulating liquid (102) and a first O-ring (103), wherein the conductive area (101) is arranged on the surface of a crystal to be polarized, the conductive area (101) can be arranged into a periodic structure or a planar structure according to polarization requirements, and the insulating liquid (102) submerges the whole conductive area (101) and is sealed in the first O-ring (103); the insulating liquid (102) comprises insulating oil and antifreeze particles uniformly dispersed in the insulating oil; the insulating oil is any one or more of mineral insulating oil, synthetic insulating oil and vegetable oil, and the anti-freezing particles are any one or more of polyimide particles, polyamide-imide particles and ultra-high molecular weight polyethylene particles.
5. A cryogenic polarization system as claimed in claim 3, wherein: the liquid electrode comprises an insulating area (104), conducting liquid (105) and a second O-shaped ring (106), the insulating area (104) is arranged on the surface of the crystal to be polarized, the insulating area (104) can be arranged into a periodic structure or a strip hollow structure according to polarization requirements, and the conducting liquid (105) is immersed in the whole insulating area (104) and sealed in the second O-shaped ring (106); the conductive liquid (105) comprises liquid nitrogen and metal nanoparticles uniformly dispersed in the liquid nitrogen, wherein the metal nanoparticles are any one or more of Au nanoparticles, Ag nanoparticles, Al nanoparticles and Cu nanoparticles.
6. A cryogenic polarization system according to any one of claims 1 to 5, wherein: the working temperature of the constant temperature module is-150 to-100 ℃.
7. A cryogenic polarization system according to any one of claims 1 to 5, wherein: the inversion control module comprises an integrator (15) and a comparator (16) connected with the integrator (15), the integrator (15) is connected to the polarizing electrode (10), the comparator (16) is connected to the high-voltage module, the integrator (15) is used for integrating charges on the polarizing electrode (10), and the comparator (16) is provided with a preset charge value.
8. A cryogenic polarization system according to any one of claims 1 to 5, wherein: the high voltage module comprises a waveform generator (17) and a high voltage amplifier (18) electrically connected with the waveform generator (17), the waveform generator (17) comprises a trigger (20), the high voltage amplifier (18) comprises an electrode lead (19), and the electrode lead (19) is connected to the polarizing electrode (10).
9. A cryogenic polarization system according to any one of claims 1 to 5, wherein: the polarization voltage applied by the high-voltage amplifier (18) is 1-25 KV/mm.
10. A cryogenic polarization system according to any one of claims 1 to 5, wherein: the crystal to be polarized is a ferroelectric crystal, and the ferroelectric crystal comprises any one of KTP, SLT and LN.
CN202210460539.XA 2022-04-28 2022-04-28 Low-temperature polarization system Active CN114899306B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1784793A (en) * 2003-05-08 2006-06-07 松下电器产业株式会社 Electric switch and storage device using same
JP2010073941A (en) * 2008-09-19 2010-04-02 Fdk Corp Polarization method of piezoelectric body and polarizing apparatus therefor
US20130153813A1 (en) * 2010-07-27 2013-06-20 Youtec Co. Ltd. Poling treatment method, plasma poling device, piezoelectric substance, and manfacturing method therefor
CN111063792A (en) * 2019-12-06 2020-04-24 湖南嘉业达电子有限公司 High-temperature air polarization processing equipment for atomizing sheet
WO2021051844A1 (en) * 2019-09-20 2021-03-25 南开大学 Lithium niobate having p-type nanowire region or n-type nanowire region and preparation method therefor, and method for converting carrier type thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1784793A (en) * 2003-05-08 2006-06-07 松下电器产业株式会社 Electric switch and storage device using same
JP2010073941A (en) * 2008-09-19 2010-04-02 Fdk Corp Polarization method of piezoelectric body and polarizing apparatus therefor
US20130153813A1 (en) * 2010-07-27 2013-06-20 Youtec Co. Ltd. Poling treatment method, plasma poling device, piezoelectric substance, and manfacturing method therefor
WO2021051844A1 (en) * 2019-09-20 2021-03-25 南开大学 Lithium niobate having p-type nanowire region or n-type nanowire region and preparation method therefor, and method for converting carrier type thereof
CN111063792A (en) * 2019-12-06 2020-04-24 湖南嘉业达电子有限公司 High-temperature air polarization processing equipment for atomizing sheet

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