CN109579728B - Speckle structure light projection module based on holographic waveguide - Google Patents
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Abstract
本发明涉及3D形貌测量领域。本发明提供一种基于全息波导的散斑结构光投影模组,包括全息波导单元、阵列激光光源、准直透镜和衍射光学元件,其中全息波导单元由全息光学元件与波导基底材料构成。全息光学元件作为耦合输入与输出调制器件,它将阵列激光光源发出的第一斑点图案调制为基底内的全反射波导传输,并在一定距离后耦合输出至准直透镜,衍射光学元件接收准直光束并将第一斑点图案复制扩展后形成高密度的散斑点阵照明,投影至待测场景。通过采用全息波导传输的方式能够将激光阵列光源与其他光学调制器件在空间上分离一定的距离,以便于为光源增加散热装置,在实现结构轻薄小型化设计的同时保证良好的散热特性。
The invention relates to the field of 3D topography measurement. The invention provides a speckle structure light projection module based on holographic waveguide, comprising a holographic waveguide unit, an array laser light source, a collimating lens and a diffractive optical element, wherein the holographic waveguide unit is composed of a holographic optical element and a waveguide base material. The holographic optical element is used as a coupling input and output modulation device. It modulates the first spot pattern emitted by the array laser light source into a total reflection waveguide transmission in the substrate, and couples it out to the collimating lens after a certain distance, and the diffractive optical element receives the collimation. The light beam replicates and expands the first speckle pattern to form a high-density speckle array illumination, which is projected onto the scene to be tested. By using holographic waveguide transmission, the laser array light source can be spatially separated from other optical modulation devices by a certain distance, so as to add a heat dissipation device to the light source, and to achieve a light, thin and miniaturized design while ensuring good heat dissipation characteristics.
Description
技术领域technical field
本发明涉及3D形貌测量领域,具体地涉及一种基于全息波导的散斑结构光投影模组。The invention relates to the field of 3D topography measurement, in particular to a speckle structured light projection module based on a holographic waveguide.
背景技术Background technique
3D形貌测量技术可采集场景中物体的深度坐标信息,为后端开发提供额外的数据处理自由度。随着移动终端器件与智能交互设备的普及,3D测量技术越来越成为新一代人机交互的核心技术,在工业检测、安防零售、体感游戏、移动支付和生物医学等方面都有着广泛的应用前景。3D topography measurement technology can collect depth coordinate information of objects in the scene, providing additional data processing freedom for back-end development. With the popularization of mobile terminal devices and intelligent interactive devices, 3D measurement technology has increasingly become the core technology of the new generation of human-computer interaction, and has a wide range of applications in industrial inspection, security retail, somatosensory games, mobile payment and biomedicine prospect.
散斑结构光技术是当前广泛采用的3D数据采集方案。它采用编码后随机、伪随机或规则排布的斑点光线簇作为光学探针,投射至空间场景,通过比对斑点位移量,由三角测量原理得到具体的场景深度信息。投影模组将预设的结构光模式投射至实际场景,是散斑结构光深度相机的硬件基础。通常模组包括激光光源、准直透镜和衍射光学元件(Diffractive Optical Element,DOE)。Speckle structured light technology is currently a widely used 3D data acquisition solution. It uses coded random, pseudo-random or regularly arranged speckle light clusters as optical probes, and projects them to the spatial scene. By comparing the speckle displacement, the specific scene depth information is obtained by the principle of triangulation. The projection module projects the preset structured light mode to the actual scene, which is the hardware basis of the speckle structured light depth camera. Usually the module includes a laser light source, a collimating lens and a diffractive optical element (Diffractive Optical Element, DOE).
随着深度感知技术在移动设备方面的应用愈加广泛,因此对于投影模组与深度相机的体积大小要求越来越高。结构紧凑轻薄的投影模组与深度相机成为领域内迫切的研究需求;另外,小型化的投影模组中由于其内的各个元件的安装和排布都较为紧凑,导致其又会面临光源散热的问题,严重制约了散斑投影模组的发展。With the wider application of depth perception technology in mobile devices, the requirements for the size of projection modules and depth cameras are getting higher and higher. Compact and thin projection modules and depth cameras have become an urgent research demand in the field; in addition, the miniaturized projection modules will face the heat dissipation of the light source due to the compact installation and arrangement of various components in them. This problem seriously restricts the development of speckle projection modules.
综上可知,在散斑结构光3D形貌测量中,如何设计出结构轻薄小型化且又便于进行光源散热的散斑投影模组成为当前亟待解决的技术问题之一。To sum up, in speckle structured light 3D topography measurement, how to design a speckle projection module with a light, thin and miniaturized structure and easy to dissipate heat from the light source has become one of the technical problems to be solved urgently.
发明内容SUMMARY OF THE INVENTION
本发明实施例的目的是提供一种基于全息波导的散斑结构光投影模组,使得散斑投影模组在满足结构轻薄小型化设计的同时还能够具有良好的散热特性。The purpose of the embodiments of the present invention is to provide a speckle structured light projection module based on a holographic waveguide, so that the speckle projection module can have good heat dissipation characteristics while satisfying the design of light, thin and miniaturized structure.
为了实现上述目的,本发明实施例一方面提供一种基于全息波导的散斑结构光投影模组,包括全息波导单元和用于发射对应第一斑点图案的激光光束的阵列光源,其中所述全息波导单元包括波导基底、第一全息光学元件和第二全息光学元件,所述第一全息光学元件贴合于所述波导基底的第一端,所述第二全息光学元件贴合于所述波导基底的第二端;其中,所述第二全息光学元件用于将所述阵列光源所发射的激光光束耦合接入至所述波导基底,所述激光光束能够在所述波导基底中进行波导传输,并通过所述第一全息光学元件输出。In order to achieve the above object, one aspect of the embodiments of the present invention provides a speckle structured light projection module based on a holographic waveguide, including a holographic waveguide unit and an array light source for emitting a laser beam corresponding to a first speckle pattern, wherein the holographic The waveguide unit includes a waveguide substrate, a first holographic optical element and a second holographic optical element, the first holographic optical element is attached to the first end of the waveguide substrate, and the second holographic optical element is attached to the waveguide the second end of the substrate; wherein, the second holographic optical element is used for coupling the laser beam emitted by the array light source into the waveguide substrate, and the laser beam can be transmitted in the waveguide substrate , and output through the first holographic optical element.
本发明实施例另一方面提供一种基于全息波导的散斑结构光投影模组,包括全息波导单元和用于发射对应第一斑点图案的激光光束的阵列光源,其中所述全息波导单元包括波导基底和第一全息光学元件,所述第一全息光学元件贴合于所述波导基底的第一端;其中,所述波导基底在所述第二端处的平面被切割成倾斜面,以通过所述倾斜面耦合待执行波导传输的激光光束,以使得所述激光光束能够在所述波导基底中进行波导传输,并通过所述第一全息光学元件输出。Another aspect of the embodiments of the present invention provides a speckle structured light projection module based on a holographic waveguide, including a holographic waveguide unit and an array light source for emitting a laser beam corresponding to a first speckle pattern, wherein the holographic waveguide unit includes a waveguide a substrate and a first holographic optical element, the first holographic optical element is attached to the first end of the waveguide substrate; wherein, the plane of the waveguide substrate at the second end is cut into an inclined plane to pass through The inclined surface couples a laser beam to be waveguided, so that the laser beam can be waveguided in the waveguide substrate and output through the first holographic optical element.
通过上述技术方案,提出了在散斑结构光投影模组中设置全息波导单元和阵列光源,全息波导单元包括波导基底、第一全息光学元件和第二全息光学元件,在位置布置方面,满足由阵列光源发出的激光光束经一端的第二全息光学元件耦入并能够在波导基底中进行波导传输以通过在波导基底另一端的第一全息光学元件输出。由此,通过波导传输可将光源与其他光学调制器件分离较长距离,并还能够允许为光源单独增加散热装置,在实现结构轻薄小型化设计的同时还能够具有非常良好的散热特性。Through the above technical solutions, it is proposed to set a holographic waveguide unit and an array light source in the speckle structured light projection module. The holographic waveguide unit includes a waveguide substrate, a first holographic optical element and a second holographic optical element. The laser beam emitted by the array light source is coupled in through the second holographic optical element at one end and can be waveguided in the waveguide substrate to be output through the first holographic optical element at the other end of the waveguide substrate. Therefore, the light source can be separated from other optical modulation devices by a long distance through waveguide transmission, and it is also possible to add a heat dissipation device for the light source separately.
本发明实施例的其它特征和优点将在随后的具体实施方式部分予以详细说明。Other features and advantages of embodiments of the present invention will be described in detail in the detailed description section that follows.
附图说明Description of drawings
附图是用来提供对本发明实施例的进一步理解,并且构成说明书的一部分,与下面的具体实施方式一起用于解释本发明实施例,但并不构成对本发明实施例的限制。在附图中:The accompanying drawings are used to provide a further understanding of the embodiments of the present invention, and constitute a part of the specification, and are used to explain the embodiments of the present invention together with the following specific embodiments, but do not constitute limitations to the embodiments of the present invention. In the attached image:
图1是本发明一实施例的基于全息波导的散斑结构光投影模组的结构原理示意图;1 is a schematic structural principle diagram of a speckle structured light projection module based on a holographic waveguide according to an embodiment of the present invention;
图2是本发明第一实施例的基于全息波导的散斑结构光投影模组的结构示意图;2 is a schematic structural diagram of a speckle structured light projection module based on a holographic waveguide according to the first embodiment of the present invention;
图3是本发明第二实施例的配置有全息透镜耦出的基于全息波导的散斑结构光投影模组的结构原理示意图;3 is a schematic structural principle diagram of a speckle structured light projection module based on a holographic waveguide coupled with a holographic lens according to a second embodiment of the present invention;
图4是本发明第三实施例的配置有复合型HOE耦出的基于全息波导的散斑结构光投影模组的结构原理示意图;4 is a schematic structural principle diagram of a speckle structured light projection module based on a holographic waveguide coupled with a composite HOE coupled out according to the third embodiment of the present invention;
图5是本发明第四实施例的配置有全息透镜耦入和全息光栅耦出的基于全息波导的散斑结构光投影模组的结构原理示意图;5 is a schematic structural principle diagram of a speckle structured light projection module based on a holographic waveguide configured with a holographic lens coupled in and a holographic grating coupled out according to the fourth embodiment of the present invention;
图6A是本发明第一实施例的配置有倾斜面耦合输入的基于全息波导的散斑结构光投影模组的结构原理示意图;6A is a schematic structural principle diagram of a speckle structured light projection module based on a holographic waveguide configured with an inclined plane coupling input according to the first embodiment of the present invention;
图6B是本发明第二实施例的配置有倾斜面耦合输入的基于全息波导的散斑结构光投影模组的结构原理示意图;6B is a schematic structural principle diagram of a speckle structured light projection module based on a holographic waveguide configured with an inclined plane coupling input according to the second embodiment of the present invention;
图6C是本发明第三实施例的配置有倾斜面耦合输入的基于全息波导的散斑结构光投影模组的结构原理示意图。6C is a schematic structural principle diagram of a speckle structured light projection module based on a holographic waveguide configured with an inclined plane coupling input according to the third embodiment of the present invention.
具体实施方式Detailed ways
以下结合附图对本发明实施例的具体实施方式进行详细说明。应当理解的是,此处所描述的具体实施方式仅用于说明和解释本发明实施例,并不用于限制本发明实施例。The specific implementations of the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific implementation manners described herein are only used to illustrate and explain the embodiments of the present invention, and are not used to limit the embodiments of the present invention.
如图1所示,本发明一实施例的基于全息波导的散斑结构光投影模组,包括阵列光源11和全息波导单元20,其中该阵列光源11能够发射对应第一斑点图案的激光光束,全息波导单元20包括波导基底13、第一全息光学元件201和第二全息光学元件202,第一全息光学元件201贴合于波导基底13的第一端,第二全息光学元件202贴合于波导基底13的第二端,且阵列光源11设置于波导基底13的第二端的上方,并且由阵列光源11所发出的激光光束能够经由第二全息光学元件202耦合接入波导基底13,激光光束能够在波导基底13中进行波导传输,并通过第一全息光学元件201输出;虽然图1示出了将阵列光源设置于波导基底的第二端的上方的示例,但可以理解的是,将阵列光源设置在其他位置,例如波导基底的下方等位置也是允许的,其可以是根据系统结构的设计而灵活调节。As shown in FIG. 1, a speckle structured light projection module based on holographic waveguide according to an embodiment of the present invention includes an
需说明的是,全息波导(Holographic Waveguide,HW)是采用全息光学元件(Holographic Optical Element,HOE)作为耦合输入或输出器件,将光线控制在玻璃或其他光学介质中进行波导传输的一种集成光学技术。其中HOE为使用全息干涉方法加工制作而成的光学元器件,其还可根据耦合功能要求制作成全息光栅或全息透镜的形式,贴合在玻璃或其他光学介质的表面。波导传输是光线在介质中以全反射(Total InternalReflection,TIR)的方式调制传导光信号的一种方式,使用这种方式能够高效率地将光学系统输入端与输出端的光轴偏移。It should be noted that the Holographic Waveguide (HW) is an integrated optical device that uses a holographic optical element (Holographic Optical Element, HOE) as a coupling input or output device to control light in glass or other optical media for waveguide transmission. technology. Among them, HOE is an optical component processed by holographic interference method, and it can also be made into the form of holographic grating or holographic lens according to the requirements of coupling function, and attached to the surface of glass or other optical medium. Waveguide transmission is a way in which light modulates a transmitted optical signal in a medium in the form of Total Internal Reflection (TIR), which can efficiently shift the optical axis between the input end and the output end of an optical system.
另外,由于散斑结构光投影模组需要对阵列光源所输出的对应第一斑点图案图案的光线进行调制,如准直调制和光栅衍射处理等,以能够输出符合期望和需求的散斑。在图1的散斑结构光投影模组中的第一全息光学元件201实现了将光在波导基底中的耦出,以及第二全息光学元件202实现了将光在波导基底中的耦入,以在波导基底中进行波导传输。需说明的是,在图1的散斑结构光投影模组中还可以是额外设置其他的光调制组件,以实现对光束的调制,此时可以优选将光调制组件设置在远离光源的第二端,也就是靠近第一光学元件201的位置,从而实现优秀的散热性能,具体细节也将在下文其他实施方式中展开。在本发明实施例中,通过引入全息波导单元20,利用光轴偏移的特性布置光源及其他光学元件,在实现散热功能的同时也不会增大模块的体积,保障了其结构的轻薄和小型化,能够广泛并较佳地应用于电子设备中。In addition, the speckle structured light projection module needs to modulate the light output by the array light source corresponding to the first speckle pattern, such as collimation modulation and grating diffraction processing, so as to be able to output speckles that meet expectations and requirements. The first holographic
虽然图1中所示出的第一全息光学元件201所贴合的第一端和第二全息光学元件202所贴合的第二端是设置在波导基底的同侧的,但可以理解的是,还可以是根据设计需要将第一全息光学元件201和第二全息光学元件202设置在波导基底的异侧;另需说明的是,阵列光源一侧也需要有全息光学元件的耦合调制,以形成波导传输,若不用全息光学元件耦合,则可以是将波导基底切割成斜面。可以理解的是,第一全息光学元件201和第二全息光学元件202的选型也可以是多样化的,例如其二者都可以是采用透射式全息光学元件和/或反射式全息光学元件;由此,允许灵活地排布系统元器件,以实现预期的散热效果。Although the first end of the first holographic
虽然图1给出的是采用透射式HOE设计的投影模组,但可以理解的是,本发明实施例中的模组依然可以采用反射式全息光学元件HOE,并相应地也仅需调整模组的组件位置即可。Although FIG. 1 shows a projection module designed with a transmissive HOE, it can be understood that the module in the embodiment of the present invention can still use a reflective holographic optical element HOE, and accordingly, only the module needs to be adjusted. component location.
为了保障光线在波导基底中良好的波导传输效果,可以是令激光光束在波导基底13中的按照预设的光线传播角度进行传输,以满足全反射条件,即:In order to ensure the good waveguide transmission effect of light in the waveguide substrate, the laser beam can be transmitted in the
其中,为预设的光线传播角度,为全反射角,n为波导基底的光学折射率。in, is the preset light propagation angle, is the total reflection angle, and n is the optical refractive index of the waveguide substrate.
如图2所示,本发明另一实施例的基于全息波导的散斑结构光投影模组,其中将部分光调制元件设置在远离光源的波导基体的另一端上,实现了良好的散热性能。具体的,基于全息波导的散斑结构光投影模组包括阵列光源11,它被排布设计成发光点源阵列,用于提供预设的第一斑点图案12形式的照明,其可以是采用垂直腔面激光发射器(VerticalCavity Surface Emitting Lasers,VCSEL),并将其设置为二维规则或随机排布的阵列光源,波长为940nm的红外光或者其他传输效率高的波长窗口;13为波导基底,由折射率为n的玻璃或其他光学介质材料制成;142为耦合输出HOE(Holographic Optical Element,全息光学元件),另外,该模组还可以包括耦合输入HOE141,耦合元件HOE仅为一层膜系,因此其体积轻薄便于小型化设计;15为准直透镜,用于将全息波导发出的光束调制为准直光束后射出,其可采用单透镜、组合透镜、微透镜阵列或菲涅尔透镜来实现;16为衍射光学元件DOE,用于接收第一斑点图案12,并复制扩展为第二斑点图案,形成大面阵的散斑光线簇,投影至实际待测场景中;17为待测场景物体;18为模组投影出的最终的第二斑点图案,以实现将第二斑点图案投射至待测场景物体。在本实施例中,通过波导传输将光源与其他光学调制器件分离一定距离,能够为光源单独增加散热装置,这非常有利于为系统整体散热。As shown in FIG. 2 , in the speckle structure light projection module based on holographic waveguide according to another embodiment of the present invention, some light modulation elements are arranged on the other end of the waveguide substrate away from the light source, so as to achieve good heat dissipation performance. Specifically, the speckle structured light projection module based on the holographic waveguide includes an
需说明的是,准直透镜15也可以放在耦合输入HOE 141之前,以耦合阵列光源所发射的激光光束,并将光源光束准直后再耦合进行波导传输。另外,可以是根据具体的系统设计方案灵活选择准直透镜15的位置与焦距,使其匹配完成准直功能。It should be noted that the collimating
如图3所示,本发明另一实施例的基于全息波导的散斑结构光投影模组,其包括阵列光源11,它被排布设计成发光点源阵列,用于提供预设的第一斑点图案12形式的照明;13为波导基底,由折射率为n的玻璃或其他光学介质材料制成;141为耦合输入HOE;143为带有透镜因子的HOE,它既有耦合输出的功能,同时也可以起到准直的作用,能够将激光光束调制为准直光束;16为DOE,用于接收第一斑点图案12,并将其复制扩展为第二斑点图案,形成大面阵的散斑光线簇,投影至待测场景中;17为场景物体;18为模组投影出的最终的第二斑点图案。As shown in FIG. 3, a speckle structured light projection module based on holographic waveguide according to another embodiment of the present invention includes an
与图2所示的实施例相比,图3中的耦合输出HOE 143为全息透镜式HOE(即全息透镜光学元件),其可以是通过采用平面波与球面波进行干涉加工而成的。由此,将准直透镜与耦合输出元件合并为一个调制器件,提高了系统的轻薄化程度,便于进行小型化投影模组设计。另外,图3中的准直透镜因子也可以添加在耦合输入HOE中,以上实施方式可以是根据系统设计要求而进行灵活调节。Compared with the embodiment shown in FIG. 2 , the coupling-out
如图4所示,本发明另一实施例的基于全息波导的散斑结构光投影模组,其采用了复合型的HOE元件144。其中,该散斑结构投影模组包括阵列光源11,它被排布设计成发光点源阵列,用于提供预设的第一斑点图案12形式的照明;13为波导基底,由折射率为n的玻璃或其他光学介质材料制成;141为耦合输入HOE;耦合输出HOE 144为兼具准直透镜与复制光栅的作用,且还可以作为耦合输出元件使用,其能够用于接收第一斑点图案12,并将其复制扩展为第二斑点图案,形成大面阵的散斑光线簇,投影至实际待测场景中;17为场景物体;18为模组投影出的最终的第二斑点图案。As shown in FIG. 4 , a speckle structured light projection module based on a holographic waveguide according to another embodiment of the present invention adopts a
与图3所示的实施例相比,图4中的耦合输出HOE 144为兼具准直透镜与复制光栅的作用的HOE,其既能够将激光光束调制为准直光束,又能够实现散斑图案的调制扩展。由此,将准直透镜、复制光栅与耦合输出元件合并为一个调制器件,提高了系统的轻薄化程度,便于进行小型化投影模组设计。Compared with the embodiment shown in FIG. 3 , the coupling-out
如图5所示,本发明另一实施例的基于全息波导的散斑结构光投影模组,其将准直透镜因子与复制光栅分开添加在耦合输入HOE与耦合输出HOE中。具体的,该基于全息波导的散斑结构光投影模组包括阵列光源11,它被排布设计成发光点源阵列,用于提供预设的第一斑点图案12形式的照明;13为波导基底,由折射率为n的玻璃或其他光学介质材料制成;145为具有准直透镜功能的耦合输入HOE;146为具有复制光栅功能的耦合输出HOE,用于接收第一斑点图案12,并将其复制扩展为第二斑点图案,形成大面阵的散斑光线簇,投影至实际待测场景中;17为场景物体;18为模组投影出的最终斑点图案。由此,能够实现更高的系统轻薄化程度,更加便于进行小型化投影模组设计。As shown in FIG. 5 , in the speckle structured light projection module based on holographic waveguide according to another embodiment of the present invention, the collimating lens factor and the replica grating are separately added to the coupling-in HOE and the coupling-out HOE. Specifically, the speckle structured light projection module based on holographic waveguide includes an
如图6A-6C所示,本发明另一实施例的基于全息波导的散斑结构光投影模组,由此可将玻璃基底切割为倾斜面,波导基底在所述第二端处的平面被切割成倾斜面,以通过所述倾斜面耦合待执行波导传输的激光光束,能够直接使用倾斜面耦合输入的方式代替耦合输入HOE,实现了对系统的能量利用效率的提高,并还节约了模块制造成本。具体的,如图6A所提供的基于全息波导的散斑结构光投影模组中,耦合输出HOE 142可以是仅具备耦合输出的功能,而由其一侧的准直透镜15实现准直作用并通过DOE 16来实现光束的调制复制作用;如图6B所提供的基于全息波导的散斑结构光投影模组中,耦合输出HOE 143可以是全息透镜光学元件,并通过DOE 16来实现光束的调制复制作用;如图6C所提供的基于全息波导的散斑结构光投影模组中,耦合输出HOE 143可以是兼具透镜功能和复制光栅功能的元件。更优选的,在该倾斜面上还可以镀有减反膜,由此增加耦合效率。关于图6A-6C所示的基于全息波导的散斑结构光投影模组中的部分组件可以参照上文实施例的相关描述,故在此便不再赘述。As shown in FIGS. 6A-6C , in the speckle structured light projection module based on holographic waveguide according to another embodiment of the present invention, the glass substrate can be cut into inclined planes, and the plane of the waveguide substrate at the second end is It is cut into an inclined surface, and the laser beam to be transmitted by the waveguide can be coupled through the inclined surface, and the coupling input of the inclined surface can be directly used instead of the coupling input HOE, which improves the energy utilization efficiency of the system and saves modules. manufacturing cost. Specifically, in the speckle structured light projection module based on holographic waveguide provided in FIG. 6A , the coupling-out
在一些优选实施方式中,耦合输入HOE和/或耦合输出HOE可以是通过激光干涉曝光加工制作而成的。由此,应用由激光干涉曝光加工制作而成的全息光学元件,相比于目前相关技术中应用基于刻蚀工艺的DOE设计的散斑结构,使得本实施例中散斑结构光投影模组采用了通过激光干涉曝光加工而成的全息光学元件,无鬼线干扰问题并减少了杂散背景光,并且相比于刻蚀工艺制作能够更加高效且成本更低。In some preferred embodiments, the coupling-in HOE and/or the coupling-out HOE may be fabricated by laser interference exposure processing. Therefore, compared with the speckle structure using the DOE design based on the etching process in the current related art, the speckle structure light projection module in this embodiment adopts the holographic optical element fabricated by laser interference exposure processing. The holographic optical element processed by laser interference exposure has no ghost line interference problem and reduces stray background light, and can be produced more efficiently and with lower cost than the etching process.
具体的,具有准直透镜功能的全息透镜HOE可以是通过平面波与球面波干涉制备而成的全息透镜。优选地,在加工过程中还可采用波前补偿技术而对干涉加工过程进行像差优化设计,以获得高成像质量的全息透镜。其中,全息透镜HOE的焦距与制备时所使用的球面波的坐标参数有关,因此可通过设定干涉球面波的相关参数控制全息透镜的焦距值,并在系统设计时进行匹配设计,达到高质量的准直效果。Specifically, the holographic lens HOE having the function of a collimating lens may be a holographic lens prepared by the interference of a plane wave and a spherical wave. Preferably, a wavefront compensation technology can also be used in the processing to optimize the aberration design of the interference processing, so as to obtain a holographic lens with high imaging quality. Among them, the focal length of the holographic lens HOE is related to the coordinate parameters of the spherical wave used in the preparation. Therefore, the focal length value of the holographic lens can be controlled by setting the relevant parameters of the interference spherical wave, and the matching design is carried out in the system design to achieve high quality. collimation effect.
具有光栅复制扩展功能的全息光栅HOE为采用对应波长的平面波经干涉制备而成的。优选地,为了使得投射模块在各个衍射级次所获得的散斑之间都能避免相互交叠,在制备方法中还可以是通过控制以定制光栅周期。具体的,可以是先获取能够令对应全息光学元件的多个衍射级次的散斑之间避免相互交叠的目标光栅周期,例如该目标光栅周期应可以是与阵列光源相匹配的能够令所输入的准直光束,输出在各衍射级次的(第二散斑图案)散斑之间避免相互交叠;然后,基于夹角周期模型和目标光栅周期,确定在激光干涉过程中两束干涉光束之间的夹角,其中该夹角周期模型包括干涉光束的夹角和光栅周期之间的关系。The holographic grating HOE with the function of grating replication and expansion is prepared by interference of plane waves of corresponding wavelengths. Preferably, in order to prevent the speckles obtained by the projection module from overlapping each other in each diffraction order, the grating period can also be customized by control in the preparation method. Specifically, the target grating period that can avoid overlapping between the speckles of multiple diffraction orders of the corresponding holographic optical element can be obtained first. For example, the target grating period should be matched with the array light source and can make all The input collimated beam is output to avoid overlapping between the (second speckle pattern) speckles of each diffraction order; then, based on the angle period model and the target grating period, it is determined that the two beams interfere during the laser interference process The angle between the beams, where the angle period model includes the relationship between the angle of the interfering beams and the grating period.
制备HOE的衍射级次位置由光栅方程决定:The position of the diffraction orders for the prepared HOE is determined by the grating equation:
其中,和分别为横向和竖向的衍射角度,m和n分别为横向和竖向的衍射级次,Δx与Δy分别为HOE在横向和竖向的光栅周期。为了实现在可探测的深度范围内,HOE在各个衍射级次上所复制的VCSEL斑点图案间应避免相互交叠,故可以是在HOE的加工中需控制干涉光束的夹角θ。in, and are the lateral and vertical diffraction angles, respectively, m and n are the lateral and vertical diffraction orders, respectively, and Δx and Δy are the horizontal and vertical grating periods of the HOE, respectively. In order to achieve a detectable depth range, the VCSEL spot patterns reproduced by the HOE in each diffraction order should avoid overlapping each other, so the angle θ of the interference beam needs to be controlled during the processing of the HOE.
由此,本发明实施例还提出夹角周期模型可以是满足以下条件:Therefore, the embodiment of the present invention also proposes that the included angle periodic model may satisfy the following conditions:
其中,Δ为目标全息光栅周期,λ为激光光束的波长,θ为干涉光束的夹角;由此,可以是通过控制干涉光束之间的夹角θ来控制全息光栅的光栅周期。Among them, Δ is the period of the target holographic grating, λ is the wavelength of the laser beam, and θ is the angle between the interfering beams; thus, the grating period of the holographic grating can be controlled by controlling the angle θ between the interfering beams.
另外,复合型HOE同时具有准直透镜和复制光栅的功能,其制备方法可以是通过复合制备技术,也就是可以分为两次曝光记录,以将透镜因子和光栅结构一起加工在同一片HOE上;由此,复合型HOE能够进一步优化模组,达到更加轻薄化设计的目的。In addition, the composite HOE has the functions of a collimating lens and a replica grating at the same time. The preparation method can be through the composite preparation technology, that is, it can be divided into two exposure records, so that the lens factor and the grating structure can be processed together on the same piece of HOE. As a result, the composite HOE can further optimize the module and achieve the purpose of lighter and thinner design.
耦入与耦出的两片HOE均为全息光栅,通过激光干涉曝光加工制作,两个干涉波前均为平面波,其干涉形成的光栅光场强度分布为:The two HOEs coupled in and out are both holographic gratings, which are fabricated by laser interference exposure. The two interference wavefronts are both plane waves, and the intensity distribution of the grating light field formed by the interference is:
I1=|exp(ik1·r)+exp(ik2·r)|2 I 1 =|exp(ik 1 ·r)+exp(ik 2 ·r)| 2
=2+2cos[(k1-k2)r]=2+2cos[(k 1 -k 2 )r]
式中,I1为干涉光场强度,i为虚数单位,k1和k2分别为两束平行光束的波矢量,r为光束的坐标系。In the formula, I 1 is the intensity of the interference light field, i is the imaginary unit, k 1 and k 2 are the wave vectors of the two parallel beams, respectively, and r is the coordinate system of the beam.
另一方面,具有全息透镜式全息透镜式HOE可以是通过采用平面波与球面波进行干涉加工,其干涉形成的光场强度为:On the other hand, the holographic lens HOE with holographic lens can be processed by interference between plane waves and spherical waves, and the intensity of the light field formed by the interference is:
式中,I2为干涉光场强度,i为虚数单位,k3和k4分别为平面波与球面波的波矢量,r为光束的坐标系。因此,所制作的准直透镜HOE的焦距与球面波的坐标参数有关,故可通过设定干涉球面波的相关参数控制所制备的准直透镜HOE的焦距值。In the formula, I 2 is the intensity of the interference light field, i is the imaginary unit, k 3 and k 4 are the wave vectors of the plane wave and the spherical wave, respectively, and r is the coordinate system of the beam. Therefore, the focal length of the prepared collimating lens HOE is related to the coordinate parameters of the spherical wave, so the focal length value of the prepared collimating lens HOE can be controlled by setting the relevant parameters of the interference spherical wave.
在一些实施方式中,全息光学元件HOE(包括耦入HOE和耦出HOE)制备所用的感光材料也还可以是阵列光源所发出的激光光束的波长下敏感的光敏材料,例如都可以是940nm。以及,全息光学元件HOE还可以是采用与阵列光源11所发出的激光光束的波长相对应的光束经干涉曝光加工制备而成的全息光栅;例如,当投影模组所用的光源采用波长940nm的红外激光器时,相应的HOE也需工作在相应的波长940nm条件下,因此HOE制备时干涉光束的波长也应相同。In some embodiments, the photosensitive material used in the preparation of the holographic optical element HOE (including the coupled-in HOE and the coupled-out HOE) can also be a photosensitive material sensitive to the wavelength of the laser beam emitted by the array light source, for example, both can be 940 nm. And, the holographic optical element HOE can also be a holographic grating prepared by interference exposure with a light beam corresponding to the wavelength of the laser beam emitted by the array
在本发明实施例中,提出了实现结构轻薄、小型化且又便于进行光源散热的散斑投影模组的多种设计实现方案。其中,第一种设计实现方案包括四个部分:第一部分为阵列光源,优选为VCSEL光源,以输出第一斑点图案;第二部分为全息波导单元,由玻璃或其他光学介质基底与作为耦入和耦出器件的两片HOE组成;第三部分为准直透镜,它将光源发出的激光光束调制为准直光束;第四部分为DOE,它接收第一斑点图案并将其复制扩展成为不相互重叠且斑点密度分布均匀的第二斑点图案,投射至待测场景物体上。In the embodiments of the present invention, various design and implementation schemes for realizing a speckle projection module with a light, thin, and miniaturized structure and easy to dissipate heat from the light source are proposed. Among them, the first design and implementation scheme includes four parts: the first part is an array light source, preferably a VCSEL light source, to output the first spot pattern; the second part is a holographic waveguide unit, which is coupled by a glass or other optical medium substrate and as a It is composed of two pieces of HOE coupled out of the device; the third part is a collimating lens, which modulates the laser beam emitted by the light source into a collimated beam; the fourth part is DOE, which receives the first spot pattern and replicates and expands it into a non-collimating beam. The second speckle patterns that overlap each other and have uniform speckle density distribution are projected onto the scene object to be tested.
为进一步提高系统的轻薄小型化程度,可将准直透镜设计成全息透镜式HOE贴合于波导介质基底上,作为耦合输出元件使用。因此第二种设计实现方案包括三个部分:第一部分为阵列光源,优选为VCSEL光源,以输出第一斑点图案;第二部分为全息波导单元,由玻璃或其他光学介质基底与作为耦入和耦出器件的两片HOE组成;第三部分为DOE,它接收第一斑点图案并将其复制扩展成为不相互重叠且斑点密度分布均匀的第二斑点图案,投射至待测场景物体上。In order to further improve the degree of lightness, thinness and miniaturization of the system, the collimating lens can be designed as a holographic lens type HOE, which is attached to the waveguide medium substrate and used as a coupling output element. Therefore, the second design and implementation scheme includes three parts: the first part is an array light source, preferably a VCSEL light source, to output the first spot pattern; the second part is a holographic waveguide unit, which is composed of a glass or other optical medium substrate and as a coupling and It consists of two pieces of HOE coupled out of the device; the third part is DOE, which receives the first speckle pattern and replicates and expands it into a second speckle pattern that does not overlap each other and has a uniform speckle density distribution, and projects it onto the object to be tested.
为更进一步提高系统的轻薄小型化程度,还可将准直透镜与DOE均设计成HOE贴合于波导介质基底上,作为耦合输出元件使用,或者将二者分别设计成耦合输入和输出功能的HOE使用。因此第三种设计实现方案包括两个部分:第一部分为VCSEL阵列光源,构成第一斑点图案;第二部分为全息波导单元,由玻璃或其他光学介质基底与作为耦入和耦出器件的两片HOE组成,接收第一斑点图案并将其复制扩展成为不相互重叠且斑点密度分布均匀的第二斑点图案,投射至待测场景物体上。In order to further improve the light, thin and miniaturized degree of the system, the collimating lens and DOE can also be designed so that the HOE is attached to the waveguide dielectric substrate and used as a coupling output element, or the two can be designed as coupling input and output functions respectively. HOE use. Therefore, the third design implementation scheme includes two parts: the first part is the VCSEL array light source, which forms the first spot pattern; the second part is the holographic waveguide unit, which is composed of a glass or other optical medium substrate and two coupling-in and coupling-out devices. It is composed of a sheet HOE, receives the first speckle pattern, replicates and expands it into a second speckle pattern that does not overlap with each other and has a uniform speckle density distribution, and projects it onto the scene object to be tested.
更优选的,耦出HOE既包含准直透镜因子也包含DOE调制结构,二者统一被设计成一片复合型的HOE,使得该复合型HOE同时具有准直透镜和复制扩展光栅的功能。关于该复合型HOE的制备,其可以是分为两次曝光记录而完成的,将透镜因子和DOE光栅结构一起加工在同一片HOE上,其具体加工可参考上面全新透镜光学元件和全息光栅光学元件的干涉曝光过程。More preferably, the coupling-out HOE includes both the collimating lens factor and the DOE modulation structure, both of which are designed as a composite HOE, so that the composite HOE has the functions of a collimating lens and a replica expansion grating. Regarding the preparation of the composite HOE, it can be divided into two exposure recordings. The lens factor and the DOE grating structure are processed together on the same HOE. For the specific processing, please refer to the above new lens optics and holographic grating optics. The interference exposure process of the element.
另外,当耦入HOE为全息透镜式HOE且耦出HOE包含有DOE光栅结构时,可以是将耦入HOE和耦出HOE分开制作。In addition, when the coupling-in HOE is a holographic lens type HOE and the coupling-out HOE includes a DOE grating structure, the coupling-in HOE and the coupling-out HOE may be fabricated separately.
以上三种设计实现方案中:为提高系统的能量利用效率,可将玻璃基底切割为倾斜面,直接使用倾斜面耦和输入的方式代替HOE。若第三种实现方案采用倾斜面耦入的方式,则需将准直透镜与DOE设计成一片复合型HOE,贴合在波导基底上作为统一的耦出功能器件使用。为提高系统的成像效果,还可进一步将上述倾斜玻璃基底面设计为自由曲面等面型,以优化系统像差。In the above three design implementation schemes: in order to improve the energy utilization efficiency of the system, the glass substrate can be cut into inclined planes, and the inclined plane coupling and input method can be directly used instead of HOE. If the third implementation scheme adopts the inclined surface coupling method, the collimating lens and the DOE need to be designed into a composite HOE, which is attached to the waveguide substrate and used as a unified coupling-out functional device. In order to improve the imaging effect of the system, the above-mentioned inclined glass substrate surface can be further designed as a free-form surface and the like to optimize the system aberration.
由此,在本发明实施例所提供的散斑投影模组中,其不仅具有结构紧凑轻薄、小型化设计程度高的优点,而且通过波导的传输功能可将光源与其他光学元件的光轴分离一定距离,为光源单独增加散热装置,有利于系统的整体散热设计。Therefore, in the speckle projection module provided by the embodiment of the present invention, it not only has the advantages of compact structure, light weight and high miniaturization design, but also can separate the light source from the optical axis of other optical elements through the transmission function of the waveguide. It is beneficial to the overall heat dissipation design of the system by adding a heat dissipation device for the light source at a certain distance.
以上结合附图详细描述了本发明实施例的可选实施方式,但是,本发明实施例并不限于上述实施方式中的具体细节,在本发明实施例的技术构思范围内,可以对本发明实施例的技术方案进行多种简单变型,这些简单变型均属于本发明实施例的保护范围。The optional embodiments of the embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the embodiments of the present invention are not limited to the specific details of the above-mentioned embodiments. A variety of simple modifications are made to the technical solution of the invention, and these simple modifications all belong to the protection scope of the embodiments of the present invention.
另外需要说明的是,在上述具体实施方式中所描述的各个具体技术特征,在不矛盾的情况下,可以通过任何合适的方式进行组合。为了避免不必要的重复,本发明实施例对各种可能的组合方式不再另行说明。In addition, it should be noted that each specific technical feature described in the above-mentioned specific implementation manner may be combined in any suitable manner under the circumstance that there is no contradiction. To avoid unnecessary repetition, various possible combinations are not further described in this embodiment of the present invention.
此外,本发明实施例的各种不同的实施方式之间也可以进行任意组合,只要其不违背本发明实施例的思想,其同样应当视为本发明实施例所公开的内容。In addition, various implementations of the embodiments of the present invention may also be combined arbitrarily, as long as they do not violate the ideas of the embodiments of the present invention, they should also be regarded as the contents disclosed in the embodiments of the present invention.
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