CN106197781B - Film vector sensor and film deformation sensor - Google Patents
Film vector sensor and film deformation sensor Download PDFInfo
- Publication number
- CN106197781B CN106197781B CN201610704607.7A CN201610704607A CN106197781B CN 106197781 B CN106197781 B CN 106197781B CN 201610704607 A CN201610704607 A CN 201610704607A CN 106197781 B CN106197781 B CN 106197781B
- Authority
- CN
- China
- Prior art keywords
- layer
- film
- vector
- elastic body
- elastomer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 claims abstract description 46
- 229920001971 elastomer Polymers 0.000 claims description 85
- 239000000806 elastomer Substances 0.000 claims description 85
- 239000010408 film Substances 0.000 claims description 77
- 239000010409 thin film Substances 0.000 claims description 46
- 239000004433 Thermoplastic polyurethane Substances 0.000 claims description 17
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 17
- 239000000945 filler Substances 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 230000036772 blood pressure Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 210000003811 finger Anatomy 0.000 description 4
- 210000001367 artery Anatomy 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 210000001015 abdomen Anatomy 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000011895 specific detection Methods 0.000 description 1
- 210000003813 thumb Anatomy 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention provides a film vector sensor and a film deformation sensor, and belongs to the technical field of sensors. The film vector sensor comprises a vector detection part, wherein the vector detection part comprises two insulated first film elastic body layers, a first resistance elastic body layer and a first lead layer are arranged between the two first film elastic body layers, and the first resistance elastic body layer is of a cross-shaped strip structure; four first conductive ends are arranged in the first lead layer and are respectively connected with four end points of the cross-shaped strip structure in a one-to-one correspondence mode. The film vector sensor can realize the detection of the vector of the pressure and the magnitude of the pressure; can be implanted into the skin structure of the robot, so that the robot can sense parameters such as the pressure, the direction and the like. In addition, the film deformation sensor can be implanted into a human body, and can record the change conditions of blood pressure and heart rate in real time.
Description
Technical Field
The invention belongs to the field of sensors, and particularly relates to a film vector sensor and a film deformation sensor.
Background
The traditional MEMS sensor has very small resistance value change caused by angle change and has higher requirement on a circuit; in addition, the conventional MEMS sensor has low accuracy and cannot detect the vector direction of pressure. In addition, since the conventional robot does not have a sensor for a skin structure, the robot cannot sense pressure or a direction of the pressure.
Disclosure of Invention
The technical problem solved by the invention is as follows: providing a film-like vector sensor capable of measuring a pressure direction; and a film deformation sensor that can detect a deformation signal.
The technical scheme adopted by the invention for solving the technical problems is as follows: a film vector sensor comprises a vector detection part, wherein the vector detection part comprises two insulating first film elastic body layers, a first resistance elastic body layer and a first lead layer are arranged between the two first film elastic body layers, the first resistance elastic body layer is of a cross-shaped belt-shaped structure, and the cross-shaped belt-shaped structure is provided with A, B, C and D four end points; wherein, A, C two endpoints are respectively located at the up-and-down opposite positions of the cross belt structure, B, D two endpoints are respectively located at the left-and-right opposite positions of the cross belt structure; four first conductive ends are arranged in the first lead layer and are respectively connected with four end points of the cross-shaped strip structure in a one-to-one correspondence mode.
Further, the method comprises the following steps: the pressure detection part comprises two insulated second film elastic body layers, two second lead layers are arranged between the two second film elastic body layers, and each second lead layer is internally provided with a second conductive end; and a second resistance elastic body layer is arranged between the two second lead layers, and two side surfaces of the second resistance elastic body layer are respectively connected with the second conductive ends on the corresponding sides.
Further, the method comprises the following steps: the vector detection unit and the pressure detection unit are stacked, the center of the first resistive elastic layer and the center of the second resistive elastic layer overlap each other in the thickness direction of the thin film vector sensor, and the first thin film elastic layer and the second thin film elastic layer on the side of the vector detection unit in contact with the pressure detection unit are the same thin film elastic layer.
Further, the method comprises the following steps: and a weight body is arranged on the outer surface of one side or two sides of the thickness direction of the thin film vector sensor, and the center of the weight body is overlapped with the center of the second resistance elastic body layer along the thickness direction of the thin film vector sensor.
Further, the method comprises the following steps: first wires penetrating out of the film vector sensor are respectively arranged in the first wire layers, and each first conductive end is respectively connected with one first wire; when the pressure detection part is arranged, second wires penetrating out of the film vector sensor are arranged in the second wire layer, and each second conductive end is connected with one second wire.
Further, the method comprises the following steps: the first film elastomer layer is a layer of thermoplastic polyurethane elastomer; the first resistance elastomer layer is a layer of thermoplastic polyurethane elastomer containing resistance filler; when the pressure detection part is arranged, the second film elastomer layer is a layer of thermoplastic polyurethane elastomer; the second resistive elastomer layer is a layer of thermoplastic polyurethane elastomer containing resistive filler.
Further, the method comprises the following steps: the film vector sensor is integrally in a round or square sheet structure, and the thickness of the film vector sensor is 0.1-5 mm; the thickness of each first thin film elastomer layer is 10um-1mm, and the thickness of each first resistance elastomer layer is 10um-1 mm; when the pressure detection portion is provided, the thickness of each second thin film elastomer layer is 10um to 1mm, and the thickness of each second resistance elastomer layer is 10um to 1 mm.
The film vector sensor has the beneficial effects that: the direction vector of the pressure can be measured by the vector detection part, and the magnitude value of the pressure can be measured by the pressure detection part; thus, the vector of the pressure and the magnitude of the pressure are detected. In addition, the sensor can be made very thin by adopting a specific material, so that the skin structure of the robot can be made, and the robot can sense parameters such as the pressure, the direction and the like.
In addition, the invention also provides a film deformation sensor which comprises two insulating third film elastic body layers, wherein a third resistance elastic body layer and a third lead layer are arranged between the two third film elastic body layers, the third resistance elastic body layer is in a linear strip structure, and the linear strip structure is provided with E, F two end points; the third conductor layer comprises two third conductive ends, and the two third conductive ends are respectively connected with two end points of the linear strip structure in a one-to-one correspondence mode.
Further, the method comprises the following steps: the third film elastomer layer is a layer of thermoplastic polyurethane elastomer; the third resistance elastomer layer is a layer of thermoplastic polyurethane elastomer containing resistance filler; the third resistance elastic body layer and the third thin film elastic body layer on one side are located on the same layer, and two third conductive ends on the third resistance elastic body layer are located at two ends of the third thin film elastic body layer respectively.
Further, the method comprises the following steps: the two third thin film elastomer layers are also in a straight-line strip-shaped structure, and the size of the third thin film elastomer layer is matched with that of the third resistance elastomer layer; the length of the film deformation sensor is 5mm, the width of the film deformation sensor is 0.8mm, and the thickness of the film deformation sensor is 0.3 mm.
The film deformation sensor has the beneficial effects that: it can be measured whether a deformation occurs in the portion between the two third conductive terminals. Moreover, the film deformation sensor of the invention can be made very small and can be implanted into the human body, for example, beside an arterial blood vessel, by adopting a material with biocompatibility, so that the change of the blood pressure and the heart rate can be recorded in real time.
Drawings
FIG. 1 is a schematic cross-sectional view of a vector detection unit;
fig. 2 is a schematic structural diagram of the counterweight body arranged on the basis of fig. 1;
FIG. 3 is a schematic diagram of the structure of FIG. 1 after the layers are spread;
FIG. 4 is a schematic sectional view of the pressure detecting section;
FIG. 5 is a schematic diagram of the structure of FIG. 4 after the layers are spread;
FIG. 6 is a schematic cross-sectional view of the vector detecting section and the pressure detecting section when they are arranged in a stacked manner;
FIG. 7 is a schematic diagram of the structure of FIG. 6 after the layers are spread;
FIG. 8 is a schematic cross-sectional view of a thin-film deformation sensor;
FIG. 9 is a front view of a thin film deformation sensor;
FIG. 10 is a schematic diagram of the structure of the film deformation sensor after each layer is laid flat and unfolded;
FIG. 11 is an equivalent circuit diagram of a first resistive elastomer layer;
FIG. 12 is a schematic view of a direction vector of a pressing force;
FIG. 13 is a schematic illustration of a film deformation sensor for measuring arterial signals;
labeled as: the vector detection unit 1, the first film elastic body layer 11, the first resistive elastic body layer 12, the first wire layer 13, the first conductive end 14, the first wire 15, the pressure detection unit 2, the second film elastic body layer 21, the second resistive elastic body layer 22, the second wire layer 23, the second conductive end 24, the second wire 25, the film deformation sensor 3, the third film elastic body layer 31, the third resistive elastic body layer 32, the third wire layer 33, the third conductive end 34, the weight 4, and the artery 5.
Detailed Description
The invention is further described with reference to the following figures and detailed description. In the present invention, the first thin-film elastic layer 11, the second thin-film elastic layer 21, and the third thin-film elastic layer 31 are all thin-film elastic layers, and may be made of the same material. Similarly, the same description is applied to the resistive elastomer layer, the wiring layer and the conductive terminal.
As shown in fig. 1 to 3, a film vector sensor according to the present invention includes a vector detecting portion 1, the vector detecting portion 1 including two insulating first film elastomer layers 11, a first resistive elastomer layer 12 and a first wire layer 13 being disposed between the two first film elastomer layers 11, the first resistive elastomer layer 12 having a "cross" strip structure having four ends A, B, C and D; wherein, A, C two endpoints are respectively located at the up-and-down opposite positions of the cross belt structure, B, D two endpoints are respectively located at the left-and-right opposite positions of the cross belt structure; four first conductive ends 14 are arranged in the first wire layer 13, and the four first conductive ends 14 are respectively connected with four end points of the cross-shaped strip structure in a one-to-one correspondence manner.
The vector detection part can realize the vector detection of the force, and the specific detection principle refers to the following drawings 11 and 12: due to the first resistance bombThe sex body layer 12 has a cross-shaped strip structure, and the elastic body layer has resistance characteristics and certain elasticity, so that the elastic body layer is deformed after being stressed, and the corresponding resistance value is changed accordingly. Specifically, as shown in fig. 11, the first resistive elastomer layer 12 is equivalent to the resistance connection relationship shown in fig. 11; if it is assumed that when a force that causes a slight displacement of the surface to the upper right corner is applied to the surface of the first thin-film elastomer layer 11 on the sensor side, R1 will decrease as the corresponding resistive elastomer layer is compressed, and R3 will increase as the corresponding resistive elastomer layer is stretched; in the process, a voltage value V is applied between the two points A, CACThen measuring the voltage value V at the point B or the point DB＝VACThe displacement state in the vertical direction can be known by the change of R3/(R1+ R3) before and after the application of force; similarly, by applying a voltage V between two points B, DBDThen measuring the voltage value V of the point A or the point CA＝VBDThe displacement state in the horizontal direction can be known by the change of R4/(R2+ R4) before and after the application of force; thus, by knowing the above VBAnd VAThen, the vector direction of the force application can be obtained as shown in fig. 12; the specific angle θ is tan θ ═ VB/VA(ii) a In addition, the magnitude of the force applied in the direction can be obtained
Where λ is a specific coefficient that is related to the first resistive elastomer layer 12 and can be obtained by experiment.
In addition, as shown in fig. 4 and 5, the present invention may further be provided with a pressure detecting part 2, wherein the pressure detecting part 2 includes two insulating second film elastomer layers 21, two second lead layers 23 are disposed between the two second film elastomer layers 21, and a second conductive terminal 24 is disposed in each second lead layer 23; a second resistive elastomer layer 22 is provided between the two second wire layers 23, and both side surfaces of the second resistive elastomer layer 22 are connected to the second conductive terminals 24 on the corresponding sides, respectively. The pressure detecting part 2 functions to detect a positive pressure applied to the thin film vector sensor; the detection principle is as follows: when pressure is applied to the surface of one of the second thin film elastic body layers 21 of the pressure detection portion 2, the second resistive elastic body layer 22 is stressed, so that the thickness is reduced, and the resistance value is correspondingly reduced; at this time, the pressure can be obtained by measuring the resistance change between the second conductive terminals 24 on both sides.
Of course, when the vector detection section 1 and the pressure detection section 2 are combined as described above, they may be stacked in layers as shown in fig. 6 and 7; the first thin-film elastic layer 11 and the second thin-film elastic layer 21 on the side where the vector detection unit 1 and the pressure detection unit 2 are in contact with each other may be the same thin-film elastic layer; in this case, there are actually only three thin film elastomer layers 21 within the entire sensor. By combining the vector detection section 1 and the pressure detection section 2, it is achieved that the vector direction of the applied force on the sensor surface and the magnitude of the pressure in the thickness direction are measured simultaneously.
In addition, the present invention may further include a weight 4 provided on an outer surface of one or both sides in the thickness direction of the thin film vector sensor, wherein a center of the weight 4 overlaps a center of the second resistive elastomer layer 22 in the thickness direction of the thin film vector sensor. By providing the corresponding weight 4, in combination with the weight characteristics of the weight 4, a certain force can be applied to the thin film vector sensor by the weight 4 when the state of the sensor changes, for example, when the speed changes, and thus the thin film vector sensor can be used as an acceleration sensor.
In addition, in general, it is necessary to connect the corresponding conductive ends on the first wire layer 13 and the second wire layer 23 to an external circuit to realize the detection of the electrical signals; for example, in the equivalent circuit diagram of fig. 11, in order to apply a voltage and detect the voltage value at the corresponding conducting terminal, the corresponding conducting terminal needs to be connected to an external power source or a voltmeter; for this purpose, the invention further arranges first wires 15 penetrating out of the film vector sensor in the first wire layer 13, and each first conductive end 14 is connected with one first wire 15; when the pressure detection part 2 is arranged, second lead wires 25 penetrating out of the film vector sensor are arranged in the second lead layer 23, and each second conductive end 24 is connected with one second lead wire 25; therefore, when needed, the corresponding conductive end is communicated with an external circuit only through the corresponding lead.
More specifically, the present invention preferably adopts the following arrangement for the materials of the thin-film elastomer layer and the resistive elastomer layer: the first film elastomer layer 11 is a layer of thermoplastic polyurethane elastomer (TPU); the first resistive elastomer layer 12 is a layer of thermoplastic polyurethane elastomer containing resistive filler; when the pressure detection portion 2 is provided, the second film elastomer layer 21 is a layer of thermoplastic polyurethane elastomer; the second resistive elastomer layer 22 is a layer of thermoplastic polyurethane elastomer containing a resistive filler. The thermoplastic polyurethane elastomer (TPU) is selected, mainly, the material can be conveniently made into a film structure with the thickness of several uM to several mm, generally, the thickness of each film elastomer layer and the thickness of each resistance elastomer layer can be about 10uM-1mm, and thus, the thickness of the finally obtained sensor can be very thin. For example, the film vector sensor of the present invention can have a thickness of about 0.1mm to 5 mm. In addition, the resistance elastomer layer needs to be added with certain resistance filler, so that the resistance elastomer layer has certain specific resistance; meanwhile, the layer material has certain elasticity, so that the layer material can be deformed when stressed, and the corresponding resistance value can be changed along with the deformation, so that the corresponding deformation condition can be obtained by measuring the change of the resistance.
The typical application of the film vector sensor of the invention can be used in a finger mouse, for example, the size of the film vector sensor is made into the size of a finger thumb, the thickness is about 3mm-5mm, and then the film vector sensor can sense the operations of sliding, pressing and the like of fingers by adhering to the finger belly part of an early finger. In addition, the film vector sensor can also be used in robot skin, for example, the film vector sensor is made into a sheet shape with the diameter of about 2-5mm, and then a plurality of film vector sensors are arranged in the skin layer of the robot at intervals of about 3-5mm, so that the skin of the robot has the capability of sensing pressure and the vector direction of the pressure.
As shown in fig. 8 to 10, the present invention also provides a film deformation sensor comprising two insulating third film elastomer layers 31, a third resistive elastomer layer 32 and a third wire layer 33 being disposed between the two third film elastomer layers 31, the third resistive elastomer layer 32 having a "in-line" strip structure with E, F two ends; the third conductive layer 33 includes two third conductive ends 34, and the two third conductive ends 34 are respectively connected to two end points of the "straight" strip structure in a one-to-one correspondence manner.
The film deformation sensor described above is similar in structure to the vector detection section 1 in the film vector sensor according to the present invention, except that the resistive elastomer layer of the "cross" strip structure is replaced with a resistive elastomer layer of a "straight" strip structure; thus, when the film deformation sensor is subjected to a force, the resistance value between the third conductive terminals 34 at the two ends of the film deformation sensor changes, so that the corresponding model can be measured.
Similarly, the third thin film elastomer layer 31, the third resistive elastomer layer 32, the third wire layer 33 and the third conductive terminal 34 may be made of the same material and have the same structural characteristics as the first thin film elastomer layer 11, the first resistive elastomer layer 12, the first wire layer 13 and the first conductive terminal 14.
In addition, in the above-described film deformation sensor, it is also possible to adopt an arrangement in which, as shown in fig. 10, the third resistive elastomer layer 32 is located at the same layer as the third film elastomer layer 31 on the one side, and the two third conductive terminals 34 on the third resistive elastomer layer 32 are located at both ends of the third film elastomer layer 31, respectively.
One typical use of the membrane deformation sensor 3 described in the present invention is for implantation adjacent an artery 5 of a human body; as shown in fig. 13, when the artery 5 contracts or expands, the film deformation sensor 3 can be bent, so that corresponding signals can be obtained by measuring the third conductive ends 34 at the two ends, and further, the change of the blood pressure and the heart rate can be recorded in real time, and of course, corresponding data can be sent to a receiving terminal in a wireless communication mode. Further, a specific structure and size of the film deformation sensor 3 may be set as follows: the two third thin-film elastomer layers 31 are also in a "straight" strip configuration, and the size of the third thin-film elastomer layer 31 matches the size of the third resistive elastomer layer 32; the length of the film deformation sensor is 5mm, the width of the film deformation sensor is 0.8mm, and the thickness of the film deformation sensor is 0.3 mm.
Claims (6)
1. A thin film vector sensor, characterized by: the vector detection device comprises a vector detection part (1), wherein the vector detection part (1) comprises two insulating first thin film elastic body layers (11), a first resistance elastic body layer (12) and a first lead layer (13) are arranged between the two first thin film elastic body layers (11), the first resistance elastic body layer (12) is of a cross-shaped belt-shaped structure, and the cross-shaped belt-shaped structure is provided with A, B, C and D four end points; wherein, A, C two endpoints are respectively located at the up-and-down opposite positions of the cross belt structure, B, D two endpoints are respectively located at the left-and-right opposite positions of the cross belt structure; the pressure detection device is characterized in that four first conductive ends (14) are arranged in the first lead layer (13), the four first conductive ends (14) are respectively connected with four end points of the cross-shaped strip structure in a one-to-one correspondence mode, the pressure detection device also comprises a pressure detection part (2), the pressure detection part (2) comprises two layers of insulated second film elastic body layers (21), two layers of second lead layers (23) are arranged between the two layers of second film elastic body layers (21), and a second conductive end (24) is respectively arranged in each layer of second lead layer (23); and a second resistance elastic body layer (22) is arranged between the two second lead layers (23), and two side surfaces of the second resistance elastic body layer (22) are respectively connected with second conductive ends (24) on the corresponding sides.
2. The thin film vector sensor of claim 1, wherein: the vector detection unit (1) and the pressure detection unit (2) are layered and stacked, and the center of the first resistive elastomer layer (12) and the center of the second resistive elastomer layer (22) overlap in the thickness direction of the film vector sensor, and the first film elastomer layer (11) and the second film elastomer layer (21) on the side of the vector detection unit (1) in contact with the pressure detection unit (2) are the same layer of film elastomer.
3. The thin film vector sensor of claim 1, wherein: a weight body (4) is arranged on the outer surface of one side or two sides of the thickness direction of the thin film vector sensor, and the center of the weight body (4) is overlapped with the center of the second resistance elastic body layer (22) along the thickness direction of the thin film vector sensor.
4. The thin film vector sensor of any one of claims 1 to 3, wherein: first wires (15) penetrating out of the film vector sensor are respectively arranged in the first wire layer (13), and each first conductive end (14) is respectively connected with one first wire (15); when the pressure detection part (2) is arranged, second leads (25) penetrating out of the film vector sensor are arranged in the second lead layer (23), and each second conductive end (24) is connected with one second lead (25).
5. The thin film vector sensor of any one of claims 1 to 3, wherein: said first film elastomer layer (11) is a layer of thermoplastic polyurethane elastomer; the first resistive elastomer layer (12) is a layer of thermoplastic polyurethane elastomer containing resistive filler; when the pressure detection part (2) is arranged, the second film elastomer layer (21) is a layer of thermoplastic polyurethane elastomer; the second electrically resistive elastomer layer (22) is a layer of thermoplastic polyurethane elastomer containing an electrically resistive filler.
6. The thin film vector sensor of claim 5, wherein: the film vector sensor is integrally in a round or square sheet structure, and the thickness of the film vector sensor is 0.1-5 mm; each first thin film elastomer layer (11) has a thickness of 10um-1mm, and each first resistive elastomer layer (12) has a thickness of 10um-1 mm; when the pressure detection section (2) is provided, the thickness of each second thin-film elastomer layer (21) is 10um-1mm, and the thickness of each second resistive elastomer layer (22) is 10um-1 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610704607.7A CN106197781B (en) | 2016-08-23 | 2016-08-23 | Film vector sensor and film deformation sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610704607.7A CN106197781B (en) | 2016-08-23 | 2016-08-23 | Film vector sensor and film deformation sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106197781A CN106197781A (en) | 2016-12-07 |
| CN106197781B true CN106197781B (en) | 2020-03-27 |
Family
ID=57524251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610704607.7A Active CN106197781B (en) | 2016-08-23 | 2016-08-23 | Film vector sensor and film deformation sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106197781B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202126319U (en) * | 2011-06-05 | 2012-01-25 | 蚌埠高灵传感系统工程有限公司 | Sensor integrated with strain resistors and elastic element |
| JP2013084118A (en) * | 2011-10-07 | 2013-05-09 | Tokai Rubber Ind Ltd | Input interface device |
| JP2014085306A (en) * | 2012-10-26 | 2014-05-12 | Shinshu Univ | Flexible-contact type four-axle load measuring system |
| CN204007957U (en) * | 2014-03-18 | 2014-12-10 | 安润普有限公司 | A flexible sensor and pressure testing device |
| CN204576454U (en) * | 2014-01-13 | 2015-08-19 | 苹果公司 | Temperature compensated transparent force sensor with flexible layer |
| WO2015143307A1 (en) * | 2014-03-20 | 2015-09-24 | The University Of Akron | Flexible tactile sensors and method of making |
| DE102014205825A1 (en) * | 2014-03-28 | 2015-10-01 | Contitech Ag | Flexible sensor arrangement for detecting a pressure distribution |
| CN105675183A (en) * | 2015-12-31 | 2016-06-15 | 汕头超声显示器技术有限公司 | A mechanical sensor board |
| CN206095473U (en) * | 2016-08-23 | 2017-04-12 | 苏州理欧电子科技有限公司 | Level sensor and film deformation sensor are vowed to film |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5198608B2 (en) * | 2010-03-18 | 2013-05-15 | 韓国標準科学研究院 | Flexible force or pressure sensor array using semiconductor strain gauge, method for manufacturing the flexible force or pressure sensor array, and force or pressure measuring method using the flexible force or pressure sensor array |
| CN105387927A (en) * | 2015-11-23 | 2016-03-09 | 南京邮电大学 | Novel flexible vibration sensor |
-
2016
- 2016-08-23 CN CN201610704607.7A patent/CN106197781B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202126319U (en) * | 2011-06-05 | 2012-01-25 | 蚌埠高灵传感系统工程有限公司 | Sensor integrated with strain resistors and elastic element |
| JP2013084118A (en) * | 2011-10-07 | 2013-05-09 | Tokai Rubber Ind Ltd | Input interface device |
| JP2014085306A (en) * | 2012-10-26 | 2014-05-12 | Shinshu Univ | Flexible-contact type four-axle load measuring system |
| CN204576454U (en) * | 2014-01-13 | 2015-08-19 | 苹果公司 | Temperature compensated transparent force sensor with flexible layer |
| CN204007957U (en) * | 2014-03-18 | 2014-12-10 | 安润普有限公司 | A flexible sensor and pressure testing device |
| WO2015143307A1 (en) * | 2014-03-20 | 2015-09-24 | The University Of Akron | Flexible tactile sensors and method of making |
| DE102014205825A1 (en) * | 2014-03-28 | 2015-10-01 | Contitech Ag | Flexible sensor arrangement for detecting a pressure distribution |
| CN105675183A (en) * | 2015-12-31 | 2016-06-15 | 汕头超声显示器技术有限公司 | A mechanical sensor board |
| CN206095473U (en) * | 2016-08-23 | 2017-04-12 | 苏州理欧电子科技有限公司 | Level sensor and film deformation sensor are vowed to film |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106197781A (en) | 2016-12-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101811214B1 (en) | Flexible pressure sensor using an amorphous metal, and flexible bimodal sensor for simultaneously sensing pressure and temperature | |
| US9415517B2 (en) | Tactile array sensor | |
| KR101985065B1 (en) | Stretchable electrically-conductive circuit and manufacturing method therefor | |
| CN110531863B (en) | Flexible touch glove based on super-capacitor sensing principle and preparation method thereof | |
| CN111051834A (en) | Capacitive and tactile sensor and related sensing method | |
| CN205163046U (en) | A flexible electron skin for detecting body shows temperature | |
| CN107850497A (en) | The method and sensor of pressure-sensing are carried out based on electric signal caused by the redistribution by the moving iron in piezoelectricity sheath | |
| GB2445760A (en) | A flexible pressure sensor | |
| CN206291983U (en) | A kind of electronic skin for touch detection | |
| CN108731856A (en) | Flexible touch sensation sensor | |
| CN106255946A (en) | Touch sensor and wristband type universal serial device | |
| US10918156B2 (en) | Pressure detection sensor and pressure detection insole including same | |
| CN110095223A (en) | A kind of pressure sensor | |
| US10615794B1 (en) | Capacitive sensor | |
| CN112067174A (en) | Flexible capacitive touch sensor array | |
| US12055449B2 (en) | Flexible sensor | |
| Rocha et al. | Soft-matter sensor for proximity, tactile and pressure detection | |
| FI128328B (en) | A force and/or pressure sensor with at least two layers of electrodes | |
| US11553753B2 (en) | Pressure sensing insole | |
| CN206095473U (en) | Level sensor and film deformation sensor are vowed to film | |
| CN118092646A (en) | Multimodal flexible film sensors and patches for brain-computer interfaces | |
| US20170234673A1 (en) | Pliable pressure-sending fabric | |
| CN106197781B (en) | Film vector sensor and film deformation sensor | |
| KR102417498B1 (en) | Sensor for detecting pressure and insol of sensing pressure including the same | |
| CN210199703U (en) | A flexible tactile glove based on supercapacitive sensing principle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |