CN106009009A - Preparation method of organic ferroelectric film with high polarization intensity - Google Patents
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Abstract
本发明公开的具有高极化强度的有机铁电薄膜的制备方法,以PbTiO3纳米片和PVDF‑TrFE作为主要原料,首先将PVDF‑TrFE溶于四氢呋喃中,然后加入适量的PbTiO3纳米片得到悬浊液;通过超声波处理,使PbTiO3纳米片均匀地分散于溶液中,利用旋涂的方法将其旋涂在洁净的基底上均匀成膜,再在180℃下进行热处理。本发明制备工艺简单、过程易于控制,所制备的有机铁电薄膜具有取向的微纳结构,同时还具有优良的电学性能,剩余极化高达12.4μC/cm2。The preparation method of the organic ferroelectric film with high polarization disclosed by the present invention uses PbTiO3 nanosheets and PVDF - TrFE as the main raw materials, first dissolves PVDF-TrFE in tetrahydrofuran, and then adds an appropriate amount of PbTiO3 nanosheets to obtain Suspension liquid: PbTiO 3 nanosheets are uniformly dispersed in the solution by ultrasonic treatment, spin-coated on a clean substrate to form a uniform film by spin-coating, and then heat-treated at 180°C. The preparation process of the invention is simple and the process is easy to control, and the prepared organic ferroelectric thin film has an oriented micro-nano structure, and also has excellent electrical properties, and the residual polarization is as high as 12.4 μC/cm 2 .
Description
技术领域 technical field
本发明涉及一种有机铁电薄膜的制备方法,属于有机铁电高分子材料领域。 The invention relates to a method for preparing an organic ferroelectric thin film, belonging to the field of organic ferroelectric polymer materials.
背景技术 Background technique
传统的陶瓷材料具有非常高的铁电剩余极化,但是制备工艺复杂、易脆且铁电损耗较大。有机聚合物柔韧性好、铁电损耗低且易于加工。PVDF-TrFE(聚偏二氟乙烯-三氟乙烯)作为一类有机铁电可以广泛应用于能量捕获器、热释电红外探测器以及非挥发性存储器等,具有优良的电学性能和广阔的应用前景。与传统的无机钙钛矿相铁电材料相比,PVDF-TrFE的剩余极化较低(6 μC/cm2左右),限制了其在电子器件材料上的应用,因此,通过不同方法对PVDF-TrFE进行改性,提高其电学性能(介电、铁电、压电、热释电性能等),可以进一步拓宽PVDF-TrFE的应用领域。 Traditional ceramic materials have very high ferroelectric remanent polarization, but the preparation process is complex, brittle and ferroelectric loss is large. Organic polymers are flexible, have low ferroelectric losses, and are easy to process. PVDF-TrFE (polyvinylidene fluoride-trifluoroethylene), as a class of organic ferroelectrics, can be widely used in energy harvesters, pyroelectric infrared detectors and non-volatile memories, etc., with excellent electrical properties and wide applications prospect. Compared with traditional inorganic perovskite phase ferroelectric materials, the remanent polarization of PVDF-TrFE is low (about 6 μC/cm 2 ), which limits its application in electronic device materials. -TrFE is modified to improve its electrical properties (dielectric, ferroelectric, piezoelectric, pyroelectric properties, etc.), which can further broaden the application field of PVDF-TrFE.
PVDF-TrFE的自发极化强度接近6 μC/cm2,在室温下的铁电系数d33约为-38pm/V,并且由于其极好的生物兼容性,在能量获取和生物传感方面都有很大的潜在应用价值。目前对有PVDF-TrFE的改性研究有纳米限域法、极性溶剂法、模板法、外延生长等方法,但是这些方法虽然在一定程度上可以控制结构的取向,但是其电学性能并没有提高很多。 The spontaneous polarization of PVDF-TrFE is close to 6 μC/cm 2 , the ferroelectric coefficient d33 is about -38pm/V at room temperature, and due to its excellent biocompatibility, it has great potential in energy harvesting and biosensing. Great potential application value. At present, the research on the modification of PVDF-TrFE includes nano-confinement method, polar solvent method, template method, epitaxial growth and other methods, but although these methods can control the orientation of the structure to a certain extent, their electrical properties have not improved. a lot of.
发明内容 Contents of the invention
本发明的目的在于提供一种具有高极化强度的有机铁电薄膜的制备方法。 The object of the present invention is to provide a method for preparing an organic ferroelectric thin film with high polarization.
本发明的具有高极化强度的有机铁电薄膜制备方法,包括以下步骤: The method for preparing an organic ferroelectric thin film with high polarization of the present invention comprises the following steps:
1) 将基底依次置于去离子水、丙酮、无水乙醇中超声清洗,烘干; 1) Place the substrate in deionized water, acetone, and absolute ethanol in order to ultrasonically clean and dry;
2) 将PVDF-TrFE溶于四氢呋喃,得到PVDF-TrFE的四氢呋喃溶液,PVDF-TrFE与四氢呋喃的质量/体积比为1/20; 2) Dissolving PVDF-TrFE in tetrahydrofuran to obtain a tetrahydrofuran solution of PVDF-TrFE, the mass/volume ratio of PVDF-TrFE to tetrahydrofuran is 1/20;
3) 将PbTiO3纳米片置于步骤2)所得的PVDF-TrFE的四氢呋喃溶液中, PbTiO3纳米片与PVDF-TrFE的四氢呋喃溶液的质量/体积比为0.2%-5.0%,搅拌,得到悬浊液; 3 ) Place the PbTiO nanosheets in the tetrahydrofuran solution of PVDF-TrFE obtained in step 2), the mass/volume ratio of the PbTiO nanosheets to the THF solution of PVDF-TrFE is 0.2%-5.0%, stir to obtain a suspension liquid;
4) 超声波处理步骤3)所得的悬浊液,使PbTiO3纳米片均匀地分散在PVDF-TrFE的四氢呋喃溶液中,静置20-40 min后,采用旋涂的方法将其旋涂到洁净的基底上,得到薄膜; 4) Ultrasonic treatment of the suspension obtained in step 3) to uniformly disperse the PbTiO 3 nanosheets in the tetrahydrofuran solution of PVDF-TrFE, and after standing for 20-40 min, spin-coat it onto a clean surface On the substrate, a thin film is obtained;
5) 将步骤4)所得到的薄膜真空干燥,于180℃热处理0.5-2h。 5) Vacuum-dry the film obtained in step 4), and heat-treat at 180°C for 0.5-2h.
本发明中,所述的基底可以是ITO或Si基底。 In the present invention, the substrate may be an ITO or Si substrate.
本发明中,所述的四氢呋喃、丙酮、无水乙醇的纯度均不低于化学纯。 In the present invention, the purity of tetrahydrofuran, acetone and absolute ethanol is not lower than chemical purity.
本发明中,所述的PbTiO3纳米片为单晶单畴结构。 In the present invention, the PbTiO 3 nanosheets have a single crystal single domain structure.
单晶单畴结构的PbTiO3纳米片可参考浙江大学博士论文——《钙钛矿铁电氧化物纳米结构的生长调控、微结构与性能研究,作者为钞春英》制备方法获得。 PbTiO 3 nanosheets with single crystal and single domain structure can be obtained by referring to the preparation method of the doctoral thesis of Zhejiang University - "Growth Regulation, Microstructure and Properties of Perovskite Ferroelectric Oxide Nanostructures, authored by Chao Chunying".
本发明制备工艺简单、过程易于控制,薄膜的厚度与静置时间和旋涂参数有关,所制备的有机铁电薄膜厚度在0.8 μm-1 μm,具有取向的微纳结构,同时还具有优良的电学性能,剩余极化高达12.4μC/cm2。 The preparation process of the present invention is simple, and the process is easy to control. The thickness of the film is related to the standing time and spin coating parameters. The prepared organic ferroelectric film has a thickness of 0.8 μm-1 μm, has an oriented micro-nano structure, and also has excellent Electrical properties, remanent polarization up to 12.4μC/cm 2 .
附图说明 Description of drawings
图1是实例1所制备的有机铁电薄膜的掠入射XRD图谱; Fig. 1 is the grazing incidence XRD pattern of the organic ferroelectric thin film prepared by example 1;
图2是实例1所制备的有机铁电薄膜的GIWAXS图; Fig. 2 is the GIWAXS figure of the organic ferroelectric film prepared by example 1;
图3是实例1所制备的有机铁电薄膜的AFM图; Fig. 3 is the AFM figure of the organic ferroelectric film prepared by example 1;
图4是实例1所制备的有机铁电薄膜的铁电性能图。 FIG. 4 is a diagram of the ferroelectric properties of the organic ferroelectric thin film prepared in Example 1. FIG.
具体实施方式 detailed description
以下结合实施例进一步说明本发明。 Below in conjunction with embodiment further illustrate the present invention.
实施例1 Example 1
1)将ITO基底依次在去离子水、丙酮、无水乙醇中超声清洗,然后利用红外灯烘干; 1) The ITO substrate was ultrasonically cleaned in deionized water, acetone, and absolute ethanol in sequence, and then dried by infrared lamps;
2) 将1g的PVDF-TrFE溶于20 mL四氢呋喃,得到PVDF-TrFE的四氢呋喃溶液; 2) Dissolve 1 g of PVDF-TrFE in 20 mL of tetrahydrofuran to obtain a tetrahydrofuran solution of PVDF-TrFE;
3) 将0.002g 的PbTiO3纳米片置于步骤2)所得的溶液中,PbTiO3纳米片与PVDF-TrFE的四氢呋喃溶液的质量/体积比为0.2%,搅拌,得到悬浊液; 3 ) Place 0.002g of PbTiO3 nanosheets in the solution obtained in step 2 ), the mass/volume ratio of PbTiO3 nanosheets and PVDF-TrFE tetrahydrofuran solution is 0.2%, stir to obtain a suspension;
4)超声波处理步骤3)所得的悬浊液,使PbTiO3纳米片均匀地分散在PVDF-TrFE的四氢呋喃溶液中,静置20 min后,将其旋涂(1500 rpm, 30 s)到洁净的ITO基底上,得到薄膜; 4) Ultrasonic treatment of the suspension obtained in step 3), so that the PbTiO 3 nanosheets were uniformly dispersed in the tetrahydrofuran solution of PVDF-TrFE, and after standing for 20 min, it was spin-coated (1500 rpm, 30 s) onto a clean surface. On the ITO substrate, a thin film is obtained;
5)将步骤4)所得到的薄膜真空干燥,于180℃热处理1h。 5) The film obtained in step 4) was vacuum-dried and heat-treated at 180° C. for 1 hour.
本例所制备的有机铁电薄膜的厚度为0.8 μm,其掠入射XRD图谱示于图1,GIWAXS图示于图2,由图1、图2可见,有机铁电薄膜具有取向的微纳结构。AFM图示于图3,由图3可见,得到的有机铁电薄膜由结晶良好的棒状晶体组成。通过Radiant的铁电测试仪测试,铁电性能图示于图4,由图可见剩余极化为12.4μC/cm2。 The thickness of the organic ferroelectric thin film prepared in this example is 0.8 μm, its grazing incidence XRD spectrum is shown in Figure 1, and the GIWAXS diagram is shown in Figure 2. It can be seen from Figure 1 and Figure 2 that the organic ferroelectric thin film has an oriented micro-nano structure . The AFM diagram is shown in Fig. 3, and it can be seen from Fig. 3 that the obtained organic ferroelectric thin film is composed of well-crystallized rod-shaped crystals. Tested by Radiant's ferroelectric tester, the ferroelectric performance diagram is shown in Figure 4, from which it can be seen that the remanent polarization is 12.4μC/cm 2 .
实施例2 Example 2
具体的工艺步骤与实施例1相同,区别在于步骤3)称取的PbTiO3纳米片为0.005g , PbTiO3纳米片与PVDF-TrFE的四氢呋喃溶液的质量/体积比为0.5%,步骤4)静置时间为40 min,步骤5)热处理时间为0.5小时。本例所制备的有机铁电薄膜的剩余极化为10μC/cm2。 The specific process steps are the same as in Example 1, the difference is that in step 3) the PbTiO 3 nanosheets weighed are 0.005 g, and the mass/volume ratio of PbTiO 3 nanosheets and PVDF-TrFE tetrahydrofuran solution is 0.5%, and step 4) statically The setting time is 40 min, and the heat treatment time of step 5) is 0.5 hour. The remanent polarization of the organic ferroelectric thin film prepared in this example is 10 μC/cm 2 .
实施例3 Example 3
具体的工艺步骤与实施例1相同,区别在于:采用Si基底,步骤3)称取的PbTiO3纳米片为0.0527g , PbTiO3纳米片与PVDF-TrFE的四氢呋喃溶液的质量/体积比为5.0%,步骤4)静置时间为30 min,步骤5)热处理时间为2小时,本例所制备的有机铁电薄膜的剩余极化为8μC/cm2。 The specific process steps are the same as in Example 1, the difference is that the Si substrate is used, and the PbTiO nanosheets weighed in step 3 ) are 0.0527g, and the mass/volume ratio of the PbTiO nanosheets and the tetrahydrofuran solution of PVDF-TrFE is 5.0% , step 4) standing time is 30 min, step 5) heat treatment time is 2 hours, the remanent polarization of the organic ferroelectric thin film prepared in this example is 8 μC/cm 2 .
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| CN106967009A (en) * | 2017-03-28 | 2017-07-21 | 广东工业大学 | A kind of borate ferroelectric thin film, its preparation method and application |
| CN108899415A (en) * | 2018-07-24 | 2018-11-27 | 电子科技大学 | A kind of curtain coating-polarization preparation method of flexibility ferro-electricity compound film |
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| CN109972136A (en) * | 2019-03-26 | 2019-07-05 | 浙江大学 | A kind of preparation method of oriented growth P (VDF-TrFE) film |
| CN112641534A (en) * | 2020-11-15 | 2021-04-13 | 南京大学 | Near-infrared super-vision flexible artificial retina and manufacturing method thereof |
| CN114171674A (en) * | 2021-11-16 | 2022-03-11 | 之江实验室 | Preparation method of organic-inorganic ferroelectric polymer composite film |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106967009A (en) * | 2017-03-28 | 2017-07-21 | 广东工业大学 | A kind of borate ferroelectric thin film, its preparation method and application |
| CN108899415A (en) * | 2018-07-24 | 2018-11-27 | 电子科技大学 | A kind of curtain coating-polarization preparation method of flexibility ferro-electricity compound film |
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| CN112641534A (en) * | 2020-11-15 | 2021-04-13 | 南京大学 | Near-infrared super-vision flexible artificial retina and manufacturing method thereof |
| CN114171674A (en) * | 2021-11-16 | 2022-03-11 | 之江实验室 | Preparation method of organic-inorganic ferroelectric polymer composite film |
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