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MX2012010733A - Materiales con base de calcogenuro y métodos mejorados para elaborar dichos materiales. - Google Patents

Materiales con base de calcogenuro y métodos mejorados para elaborar dichos materiales.

Info

Publication number
MX2012010733A
MX2012010733A MX2012010733A MX2012010733A MX2012010733A MX 2012010733 A MX2012010733 A MX 2012010733A MX 2012010733 A MX2012010733 A MX 2012010733A MX 2012010733 A MX2012010733 A MX 2012010733A MX 2012010733 A MX2012010733 A MX 2012010733A
Authority
MX
Mexico
Prior art keywords
precursor
cigs
resulting
chalcogen
sub
Prior art date
Application number
MX2012010733A
Other languages
English (en)
Inventor
Robert T Nilsson
Jennifer E Gerbi
Marc G Langlois
Original Assignee
Dow Global Technologies Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Global Technologies Llc filed Critical Dow Global Technologies Llc
Publication of MX2012010733A publication Critical patent/MX2012010733A/es

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/167Photovoltaic cells having only PN heterojunction potential barriers comprising Group I-III-VI materials, e.g. CdS/CuInSe2 [CIS] heterojunction photovoltaic cells
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623Sulfides, selenides or tellurides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3464Sputtering using more than one target
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5846Reactive treatment
    • C23C14/5866Treatment with sulfur, selenium or tellurium
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/127Active materials comprising only Group IV-VI or only Group II-IV-VI chalcogenide materials, e.g. PbSnTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/16Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/169Thin semiconductor films on metallic or insulating substrates
    • H10F77/1694Thin semiconductor films on metallic or insulating substrates the films including Group I-III-VI materials, e.g. CIS or CIGS
    • H10P14/203
    • H10P14/22
    • H10P14/3436
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)

Abstract

La presente invención proporciona estrategias para la elaboración de materiales foto-absorbentes CIGS de calidad alta a partir de películas precursoras que incorporan una cantidad sub-estequiométrica de calcógeno(s). El calcógeno(es) se incorpora en la película precursora de CIGS por medio de sub-crepitar con uno o más de otros constituyentes del precursor. El endurecimiento opcional también pude practicarse para convertir el precursor en una forma cristalina de calcopirita más deseable en el caso en que todo o una porción del precursor tenga otra constitución. Los precursores resultantes generalmente son sub-estequiométricos con respecto al calcógeno y tienen características electrónicas muy deficientes. La conversión de estos precursores en CIGS que foto-absorben material por medio del tratamiento de calcogenización ocurren con contenido de vacío interfacial dramáticamente reducido. El material CIGS resultante despliega excelente adhesión con otros estratos en los dispositivos fotovoltaicos resultantes. La migración de Ga también se reduce de manera dramática, y las películas resultantes tienen perfiles Ga optimizados en la porción superior o inferior de la película que mejoran la calidad de los dispositivos fotovoltaicos elaborados utilizando las películas.
MX2012010733A 2010-03-17 2011-03-14 Materiales con base de calcogenuro y métodos mejorados para elaborar dichos materiales. MX2012010733A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31484010P 2010-03-17 2010-03-17
PCT/US2011/028324 WO2011115894A1 (en) 2010-03-17 2011-03-14 Chalcogenide-based materials and improved methods of making such materials

Publications (1)

Publication Number Publication Date
MX2012010733A true MX2012010733A (es) 2012-12-17

Family

ID=43975196

Family Applications (2)

Application Number Title Priority Date Filing Date
MX2012010733A MX2012010733A (es) 2010-03-17 2011-03-14 Materiales con base de calcogenuro y métodos mejorados para elaborar dichos materiales.
MX2012010732A MX2012010732A (es) 2010-03-17 2011-03-14 Estructuras de película delgada basadas en calcógeno fotoelectrónicamente activo que incorporan los estratos.

Family Applications After (1)

Application Number Title Priority Date Filing Date
MX2012010732A MX2012010732A (es) 2010-03-17 2011-03-14 Estructuras de película delgada basadas en calcógeno fotoelectrónicamente activo que incorporan los estratos.

Country Status (10)

Country Link
US (4) US8969720B2 (es)
EP (2) EP2548217B1 (es)
JP (2) JP5837564B2 (es)
KR (2) KR101761098B1 (es)
CN (2) CN102893370B (es)
BR (2) BR112012023255A2 (es)
MX (2) MX2012010733A (es)
SG (2) SG184088A1 (es)
TW (2) TW201201397A (es)
WO (2) WO2011115894A1 (es)

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JP7070946B2 (ja) * 2017-04-19 2022-05-18 中建材硝子新材料研究院集団有限公司 薄膜太陽電池用層構造を製造するための方法
CN108305906B (zh) * 2018-02-08 2019-09-03 北京铂阳顶荣光伏科技有限公司 太阳能电池吸收层的制备方法和太阳能电池的制备方法
CN108493768A (zh) * 2018-04-10 2018-09-04 中国科学院半导体研究所 脊型波导结构激光器p型电极的制备方法
CN110649121A (zh) * 2018-06-11 2020-01-03 北京铂阳顶荣光伏科技有限公司 一种太阳能电池吸收层及其制备方法、太阳能电池
KR102295733B1 (ko) * 2018-08-09 2021-08-31 한양대학교 에리카산학협력단 광전기화학 구조체 및 그 제조 방법, 그리고 광전기화학 소자.
KR102665745B1 (ko) * 2018-11-01 2024-05-14 한국전자통신연구원 반도체 소자 및 이의 제조 방법
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Also Published As

Publication number Publication date
US8969720B2 (en) 2015-03-03
SG184088A1 (en) 2012-10-30
KR101761098B1 (ko) 2017-07-25
US20150179860A1 (en) 2015-06-25
WO2011115894A1 (en) 2011-09-22
US8993882B2 (en) 2015-03-31
EP2548217B1 (en) 2017-04-19
CN102893370A (zh) 2013-01-23
US20110226336A1 (en) 2011-09-22
KR20130016281A (ko) 2013-02-14
JP5956418B2 (ja) 2016-07-27
SG184087A1 (en) 2012-10-30
TW201139716A (en) 2011-11-16
WO2011115887A1 (en) 2011-09-22
BR112012023397A2 (pt) 2016-06-07
TWI510664B (zh) 2015-12-01
CN102893370B (zh) 2015-12-16
CN102893371A (zh) 2013-01-23
JP2013522159A (ja) 2013-06-13
JP2013522910A (ja) 2013-06-13
TW201201397A (en) 2012-01-01
US20110253219A1 (en) 2011-10-20
JP5837564B2 (ja) 2015-12-24
KR20130016283A (ko) 2013-02-14
MX2012010732A (es) 2013-04-03
CN102893371B (zh) 2016-09-28
EP2548218A1 (en) 2013-01-23
US9911887B2 (en) 2018-03-06
EP2548217A1 (en) 2013-01-23
US20170263797A1 (en) 2017-09-14
BR112012023255A2 (pt) 2016-05-17

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