MX2012010733A - Materiales con base de calcogenuro y métodos mejorados para elaborar dichos materiales. - Google Patents
Materiales con base de calcogenuro y métodos mejorados para elaborar dichos materiales.Info
- Publication number
- MX2012010733A MX2012010733A MX2012010733A MX2012010733A MX2012010733A MX 2012010733 A MX2012010733 A MX 2012010733A MX 2012010733 A MX2012010733 A MX 2012010733A MX 2012010733 A MX2012010733 A MX 2012010733A MX 2012010733 A MX2012010733 A MX 2012010733A
- Authority
- MX
- Mexico
- Prior art keywords
- precursor
- cigs
- resulting
- chalcogen
- sub
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
- H10F10/167—Photovoltaic cells having only PN heterojunction potential barriers comprising Group I-III-VI materials, e.g. CdS/CuInSe2 [CIS] heterojunction photovoltaic cells
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5866—Treatment with sulfur, selenium or tellurium
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/127—Active materials comprising only Group IV-VI or only Group II-IV-VI chalcogenide materials, e.g. PbSnTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
- H10F77/169—Thin semiconductor films on metallic or insulating substrates
- H10F77/1694—Thin semiconductor films on metallic or insulating substrates the films including Group I-III-VI materials, e.g. CIS or CIGS
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- H10P14/203—
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- H10P14/22—
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- H10P14/3436—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
Abstract
La presente invención proporciona estrategias para la elaboración de materiales foto-absorbentes CIGS de calidad alta a partir de películas precursoras que incorporan una cantidad sub-estequiométrica de calcógeno(s). El calcógeno(es) se incorpora en la película precursora de CIGS por medio de sub-crepitar con uno o más de otros constituyentes del precursor. El endurecimiento opcional también pude practicarse para convertir el precursor en una forma cristalina de calcopirita más deseable en el caso en que todo o una porción del precursor tenga otra constitución. Los precursores resultantes generalmente son sub-estequiométricos con respecto al calcógeno y tienen características electrónicas muy deficientes. La conversión de estos precursores en CIGS que foto-absorben material por medio del tratamiento de calcogenización ocurren con contenido de vacío interfacial dramáticamente reducido. El material CIGS resultante despliega excelente adhesión con otros estratos en los dispositivos fotovoltaicos resultantes. La migración de Ga también se reduce de manera dramática, y las películas resultantes tienen perfiles Ga optimizados en la porción superior o inferior de la película que mejoran la calidad de los dispositivos fotovoltaicos elaborados utilizando las películas.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31484010P | 2010-03-17 | 2010-03-17 | |
| PCT/US2011/028324 WO2011115894A1 (en) | 2010-03-17 | 2011-03-14 | Chalcogenide-based materials and improved methods of making such materials |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MX2012010733A true MX2012010733A (es) | 2012-12-17 |
Family
ID=43975196
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MX2012010733A MX2012010733A (es) | 2010-03-17 | 2011-03-14 | Materiales con base de calcogenuro y métodos mejorados para elaborar dichos materiales. |
| MX2012010732A MX2012010732A (es) | 2010-03-17 | 2011-03-14 | Estructuras de película delgada basadas en calcógeno fotoelectrónicamente activo que incorporan los estratos. |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MX2012010732A MX2012010732A (es) | 2010-03-17 | 2011-03-14 | Estructuras de película delgada basadas en calcógeno fotoelectrónicamente activo que incorporan los estratos. |
Country Status (10)
| Country | Link |
|---|---|
| US (4) | US8969720B2 (es) |
| EP (2) | EP2548217B1 (es) |
| JP (2) | JP5837564B2 (es) |
| KR (2) | KR101761098B1 (es) |
| CN (2) | CN102893370B (es) |
| BR (2) | BR112012023255A2 (es) |
| MX (2) | MX2012010733A (es) |
| SG (2) | SG184088A1 (es) |
| TW (2) | TW201201397A (es) |
| WO (2) | WO2011115894A1 (es) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170236710A1 (en) * | 2007-09-05 | 2017-08-17 | Ascent Solar Technologies, Inc. | Machine and process for continuous, sequential, deposition of semiconductor solar absorbers having variable semiconductor composition deposited in multiple sublayers |
| WO2011150290A2 (en) * | 2010-05-26 | 2011-12-01 | The University Of Toledo | Photovoltaic structures having a light scattering interface layer and methods of making the same |
| JP4937379B2 (ja) * | 2010-06-11 | 2012-05-23 | 昭和シェル石油株式会社 | 薄膜太陽電池 |
| KR101504343B1 (ko) * | 2010-10-15 | 2015-03-20 | 한국전자통신연구원 | 화합물 반도체 태양전지의 제조방법 |
| ES2620286T3 (es) * | 2011-03-21 | 2017-06-28 | Sunlight Photonics Inc. | Formación de películas finas en múltiples fases para dispositivos fotovoltaicos |
| US9018032B2 (en) * | 2012-04-13 | 2015-04-28 | Tsmc Solar Ltd. | CIGS solar cell structure and method for fabricating the same |
| US8809674B2 (en) * | 2012-04-25 | 2014-08-19 | Guardian Industries Corp. | Back electrode configuration for electroplated CIGS photovoltaic devices and methods of making same |
| US8809109B2 (en) * | 2012-05-21 | 2014-08-19 | Stion Corporation | Method and structure for eliminating edge peeling in thin-film photovoltaic absorber materials |
| US9177876B2 (en) * | 2012-08-27 | 2015-11-03 | Intermolecular, Inc. | Optical absorbers |
| US20150263210A1 (en) * | 2012-09-17 | 2015-09-17 | Korea Institute Of Industrial Technology | Cis/cgs/cigs thin-film manufacturing method and solar cell manufactured by using the same |
| US9112095B2 (en) | 2012-12-14 | 2015-08-18 | Intermolecular, Inc. | CIGS absorber formed by co-sputtered indium |
| US9899561B2 (en) * | 2012-12-20 | 2018-02-20 | Bengbu Design & Research Institute For Glass Industry | Method for producing a compound semiconductor, and thin-film solar cell |
| US9196768B2 (en) * | 2013-03-15 | 2015-11-24 | Jehad A. Abushama | Method and apparatus for depositing copper—indium—gallium selenide (CuInGaSe2-CIGS) thin films and other materials on a substrate |
| FR3006109B1 (fr) * | 2013-05-24 | 2016-09-16 | Commissariat Energie Atomique | Procede de realisation de la jonction p-n d'une cellule photovoltaique en couches minces et procede d'obtention correspondant d'une cellule photovoltaique. |
| WO2016013984A1 (en) * | 2014-07-24 | 2016-01-28 | Agency For Science, Technology And Research | Process for depositing metal or metalloid chalcogenides |
| CN107406965A (zh) | 2015-01-12 | 2017-11-28 | 纽升股份有限公司 | 可用于制造硫属化物半导体的含碱金属的前体膜的高速溅射沉积 |
| US20160233322A1 (en) * | 2015-02-06 | 2016-08-11 | G-Force Nanotechnology Ltd. | Method for fabricating chalcogenide films |
| JP2018523920A (ja) | 2015-08-05 | 2018-08-23 | ダウ グローバル テクノロジーズ エルエルシー | カルコゲニド含有光電変換光吸収層を含む光電変換素子及び光電変換素子を形成する関連方法 |
| JP7070946B2 (ja) * | 2017-04-19 | 2022-05-18 | 中建材硝子新材料研究院集団有限公司 | 薄膜太陽電池用層構造を製造するための方法 |
| CN108305906B (zh) * | 2018-02-08 | 2019-09-03 | 北京铂阳顶荣光伏科技有限公司 | 太阳能电池吸收层的制备方法和太阳能电池的制备方法 |
| CN108493768A (zh) * | 2018-04-10 | 2018-09-04 | 中国科学院半导体研究所 | 脊型波导结构激光器p型电极的制备方法 |
| CN110649121A (zh) * | 2018-06-11 | 2020-01-03 | 北京铂阳顶荣光伏科技有限公司 | 一种太阳能电池吸收层及其制备方法、太阳能电池 |
| KR102295733B1 (ko) * | 2018-08-09 | 2021-08-31 | 한양대학교 에리카산학협력단 | 광전기화학 구조체 및 그 제조 방법, 그리고 광전기화학 소자. |
| KR102665745B1 (ko) * | 2018-11-01 | 2024-05-14 | 한국전자통신연구원 | 반도체 소자 및 이의 제조 방법 |
| KR102762460B1 (ko) * | 2019-11-01 | 2025-02-03 | 인천대학교 산학협력단 | 스퍼터링 기반 황화 처리에 의한 cigs 광흡수층 표면 에너지 밴드갭 증가 방법 |
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| JPH07258881A (ja) * | 1994-03-23 | 1995-10-09 | Yazaki Corp | CuInSe2 膜の製造方法 |
| JPH07326577A (ja) * | 1994-06-01 | 1995-12-12 | Matsushita Electric Ind Co Ltd | カルコパイライト構造半導体薄膜の製造方法 |
| US5674555A (en) | 1995-11-30 | 1997-10-07 | University Of Delaware | Process for preparing group Ib-IIIa-VIa semiconducting films |
| CA2284826C (en) * | 1997-04-21 | 2007-06-05 | Davis, Joseph & Negley | Preparation of copper-indium-gallium-diselenide precursor films by electrodeposition for fabricating high efficiency solar cells |
| US6323417B1 (en) | 1998-09-29 | 2001-11-27 | Lockheed Martin Corporation | Method of making I-III-VI semiconductor materials for use in photovoltaic cells |
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| EP1424735B1 (en) | 2001-07-06 | 2010-07-28 | Honda Giken Kogyo Kabushiki Kaisha | Method for forming light-absorbing layer |
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| AP2180A (en) | 2003-08-14 | 2010-11-29 | Univ Johannesburg | Group I-III-VI quaternary or higher alloy semiconductor films. |
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| JP2009231744A (ja) * | 2008-03-25 | 2009-10-08 | Showa Denko Kk | I−iii−vi族カルコパイライト型薄膜系太陽電池およびその製造方法 |
| WO2011040272A1 (ja) * | 2009-09-29 | 2011-04-07 | 京セラ株式会社 | 光電変換装置 |
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2011
- 2011-03-14 WO PCT/US2011/028324 patent/WO2011115894A1/en not_active Ceased
- 2011-03-14 US US13/047,139 patent/US8969720B2/en not_active Expired - Fee Related
- 2011-03-14 JP JP2013500120A patent/JP5837564B2/ja not_active Expired - Fee Related
- 2011-03-14 MX MX2012010733A patent/MX2012010733A/es active IP Right Grant
- 2011-03-14 MX MX2012010732A patent/MX2012010732A/es active IP Right Grant
- 2011-03-14 US US13/047,190 patent/US8993882B2/en not_active Expired - Fee Related
- 2011-03-14 JP JP2013500122A patent/JP5956418B2/ja not_active Expired - Fee Related
- 2011-03-14 WO PCT/US2011/028310 patent/WO2011115887A1/en not_active Ceased
- 2011-03-14 EP EP11709605.7A patent/EP2548217B1/en not_active Not-in-force
- 2011-03-14 EP EP11709851A patent/EP2548218A1/en not_active Withdrawn
- 2011-03-14 KR KR1020127026910A patent/KR101761098B1/ko not_active Expired - Fee Related
- 2011-03-14 KR KR1020127026900A patent/KR20130016281A/ko not_active Ceased
- 2011-03-14 SG SG2012068540A patent/SG184088A1/en unknown
- 2011-03-14 SG SG2012068524A patent/SG184087A1/en unknown
- 2011-03-14 BR BR112012023255A patent/BR112012023255A2/pt not_active Application Discontinuation
- 2011-03-14 CN CN201180022880.7A patent/CN102893370B/zh not_active Expired - Fee Related
- 2011-03-14 CN CN201180023493.5A patent/CN102893371B/zh not_active Expired - Fee Related
- 2011-03-14 BR BR112012023397A patent/BR112012023397A2/pt not_active IP Right Cessation
- 2011-03-17 TW TW100109086A patent/TW201201397A/zh unknown
- 2011-03-17 TW TW100109085A patent/TWI510664B/zh not_active IP Right Cessation
-
2015
- 2015-03-09 US US14/641,796 patent/US20150179860A1/en not_active Abandoned
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2017
- 2017-05-19 US US15/599,949 patent/US9911887B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US8969720B2 (en) | 2015-03-03 |
| SG184088A1 (en) | 2012-10-30 |
| KR101761098B1 (ko) | 2017-07-25 |
| US20150179860A1 (en) | 2015-06-25 |
| WO2011115894A1 (en) | 2011-09-22 |
| US8993882B2 (en) | 2015-03-31 |
| EP2548217B1 (en) | 2017-04-19 |
| CN102893370A (zh) | 2013-01-23 |
| US20110226336A1 (en) | 2011-09-22 |
| KR20130016281A (ko) | 2013-02-14 |
| JP5956418B2 (ja) | 2016-07-27 |
| SG184087A1 (en) | 2012-10-30 |
| TW201139716A (en) | 2011-11-16 |
| WO2011115887A1 (en) | 2011-09-22 |
| BR112012023397A2 (pt) | 2016-06-07 |
| TWI510664B (zh) | 2015-12-01 |
| CN102893370B (zh) | 2015-12-16 |
| CN102893371A (zh) | 2013-01-23 |
| JP2013522159A (ja) | 2013-06-13 |
| JP2013522910A (ja) | 2013-06-13 |
| TW201201397A (en) | 2012-01-01 |
| US20110253219A1 (en) | 2011-10-20 |
| JP5837564B2 (ja) | 2015-12-24 |
| KR20130016283A (ko) | 2013-02-14 |
| MX2012010732A (es) | 2013-04-03 |
| CN102893371B (zh) | 2016-09-28 |
| EP2548218A1 (en) | 2013-01-23 |
| US9911887B2 (en) | 2018-03-06 |
| EP2548217A1 (en) | 2013-01-23 |
| US20170263797A1 (en) | 2017-09-14 |
| BR112012023255A2 (pt) | 2016-05-17 |
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