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Pashley et al., 1995 - Google Patents

Scanning tunneling microscopy studies of the GaAs (001) surface and the nucleation of ZnSe on GaAs (001)

Pashley et al., 1995

Document ID
7298939257228235210
Author
Pashley M
Li D
Publication year
Publication venue
Materials Science and Engineering: B

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Snippet

A critical issue in the epitaxial growth of ZnSe based blue laser diodes is the formation of stacking faults in the ZnSe which originate at the interface with the GaAs substrate. These stacking faults are known to cause rapid optical degradation of the lasers. In this paper we …
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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